11/22/2010	10:37:05 AM	Bypass valve closed
11/22/2010	10:37:06 AM	Main Vac valve closed
11/22/2010	10:37:42 AM	Bypass valve opened
11/22/2010	10:37:43 AM	Bypass valve closed
11/22/2010	10:39:15 AM	Bypass valve opened
11/22/2010	10:41:21 AM	Bypass valve closed
11/22/2010	10:41:22 AM	Bypass valve opened
11/22/2010	10:41:23 AM	Bypass valve closed
11/22/2010	10:41:24 AM	Bypass valve opened
11/22/2010	10:41:25 AM	Bypass valve closed
11/22/2010	10:41:26 AM	Bypass valve opened
11/22/2010	10:43:55 AM	Bypass valve closed
11/22/2010	10:48:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/22/2010	10:48:58 AM	Recipe started at 10:48 AM
11/22/2010	10:48:58 AM	H2 valve closed
11/22/2010	10:48:58 AM	BCl3 valve closed
11/22/2010	10:48:58 AM	PH3 valve closed
11/22/2010	10:48:58 AM	SiCl4 pre valve closed
11/22/2010	10:48:58 AM	SiCl4 post valve closed
11/22/2010	10:48:58 AM	Main Vac valve closed
11/22/2010	10:48:58 AM	Bypass valve closed
11/22/2010	10:48:58 AM	Bubbler valve closed
11/22/2010	10:48:58 AM	Helium valve opened
11/22/2010	10:48:58 AM	Helium MFC set to  500.000000
11/22/2010	10:48:58 AM	H2 MFC set to  0.000000
11/22/2010	10:48:58 AM	BCl3 MFC set to  0.000000
11/22/2010	10:48:58 AM	PHl3 MFC set to  0.000000
11/22/2010	10:48:58 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:48:58 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:48:59 AM	Tube furnace set to 0
11/22/2010	10:50:17 AM	Helium valve closed
11/22/2010	10:50:17 AM	H2 valve closed
11/22/2010	10:50:17 AM	BCl3 valve closed
11/22/2010	10:50:17 AM	PH3 valve closed
11/22/2010	10:50:17 AM	SiCl4 pre valve closed
11/22/2010	10:50:17 AM	SiCl4 post valve closed
11/22/2010	10:50:17 AM	Main Vac valve closed
11/22/2010	10:50:17 AM	Bypass valve closed
11/22/2010	10:50:17 AM	Bubbler valve closed
11/22/2010	10:50:17 AM	Helium MFC set to  0.000000
11/22/2010	10:50:17 AM	H2 MFC set to  0.000000
11/22/2010	10:50:17 AM	BCl3 MFC set to  0.000000
11/22/2010	10:50:17 AM	PHl3 MFC set to  0.000000
11/22/2010	10:50:17 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:50:17 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:50:17 AM	Tube furnace set to 0
11/22/2010	10:50:18 AM	Run finished at 10:50 AM
11/22/2010	10:50:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/22/2010	10:54:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:55:00 AM	Recipe started at 10:54 AM
11/22/2010	10:55:00 AM	Helium valve closed
11/22/2010	10:55:00 AM	H2 valve closed
11/22/2010	10:55:00 AM	BCl3 valve closed
11/22/2010	10:55:00 AM	PH3 valve closed
11/22/2010	10:55:00 AM	SiCl4 pre valve closed
11/22/2010	10:55:00 AM	SiCl4 post valve closed
11/22/2010	10:55:00 AM	Main Vac valve closed
11/22/2010	10:55:00 AM	Bubbler valve closed
11/22/2010	10:55:00 AM	Bypass valve opened
11/22/2010	10:55:00 AM	Helium MFC set to  0.000000
11/22/2010	10:55:00 AM	H2 MFC set to  0.000000
11/22/2010	10:55:00 AM	BCl3 MFC set to  0.000000
11/22/2010	10:55:00 AM	PHl3 MFC set to  0.000000
11/22/2010	10:55:00 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:55:00 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:55:00 AM	Tube furnace set to 0
11/22/2010	10:55:52 AM	Helium valve closed
11/22/2010	10:55:52 AM	H2 valve closed
11/22/2010	10:55:52 AM	BCl3 valve closed
11/22/2010	10:55:52 AM	PH3 valve closed
11/22/2010	10:55:52 AM	SiCl4 pre valve closed
11/22/2010	10:55:52 AM	SiCl4 post valve closed
11/22/2010	10:55:52 AM	Bubbler valve closed
11/22/2010	10:55:52 AM	Main Vac valve opened
11/22/2010	10:55:52 AM	Bypass valve opened
11/22/2010	10:55:52 AM	Helium MFC set to  0.000000
11/22/2010	10:55:52 AM	H2 MFC set to  0.000000
11/22/2010	10:55:52 AM	BCl3 MFC set to  0.000000
11/22/2010	10:55:52 AM	PHl3 MFC set to  0.000000
11/22/2010	10:55:52 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:55:52 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:55:53 AM	Tube furnace set to 0
11/22/2010	10:56:53 AM	H2 valve closed
11/22/2010	10:56:53 AM	BCl3 valve closed
11/22/2010	10:56:53 AM	PH3 valve closed
11/22/2010	10:56:53 AM	SiCl4 pre valve closed
11/22/2010	10:56:53 AM	SiCl4 post valve closed
11/22/2010	10:56:53 AM	Bubbler valve closed
11/22/2010	10:56:53 AM	Helium valve opened
11/22/2010	10:56:53 AM	Main Vac valve opened
11/22/2010	10:56:53 AM	Bypass valve opened
11/22/2010	10:56:53 AM	Helium MFC set to  100.000000
11/22/2010	10:56:53 AM	H2 MFC set to  0.000000
11/22/2010	10:56:53 AM	BCl3 MFC set to  0.000000
11/22/2010	10:56:53 AM	PHl3 MFC set to  0.000000
11/22/2010	10:56:53 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:56:53 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:56:53 AM	Tube furnace set to 0
11/22/2010	10:57:53 AM	Helium valve closed
11/22/2010	10:57:53 AM	H2 valve closed
11/22/2010	10:57:53 AM	BCl3 valve closed
11/22/2010	10:57:53 AM	PH3 valve closed
11/22/2010	10:57:53 AM	SiCl4 pre valve closed
11/22/2010	10:57:53 AM	SiCl4 post valve closed
11/22/2010	10:57:53 AM	Bubbler valve closed
11/22/2010	10:57:53 AM	Main Vac valve opened
11/22/2010	10:57:53 AM	Bypass valve opened
11/22/2010	10:57:53 AM	Helium MFC set to  0.000000
11/22/2010	10:57:53 AM	H2 MFC set to  0.000000
11/22/2010	10:57:53 AM	BCl3 MFC set to  0.000000
11/22/2010	10:57:53 AM	PHl3 MFC set to  0.000000
11/22/2010	10:57:53 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:57:53 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:57:53 AM	Tube furnace set to 0
11/22/2010	10:58:53 AM	H2 valve closed
11/22/2010	10:58:53 AM	BCl3 valve closed
11/22/2010	10:58:53 AM	PH3 valve closed
11/22/2010	10:58:53 AM	SiCl4 pre valve closed
11/22/2010	10:58:53 AM	SiCl4 post valve closed
11/22/2010	10:58:53 AM	Bubbler valve closed
11/22/2010	10:58:53 AM	Helium valve opened
11/22/2010	10:58:53 AM	Main Vac valve opened
11/22/2010	10:58:53 AM	Bypass valve opened
11/22/2010	10:58:53 AM	Helium MFC set to  100.000000
11/22/2010	10:58:53 AM	H2 MFC set to  0.000000
11/22/2010	10:58:53 AM	BCl3 MFC set to  0.000000
11/22/2010	10:58:53 AM	PHl3 MFC set to  0.000000
11/22/2010	10:58:53 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:58:53 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:58:53 AM	Tube furnace set to 0
11/22/2010	10:59:53 AM	Helium valve closed
11/22/2010	10:59:53 AM	H2 valve closed
11/22/2010	10:59:53 AM	BCl3 valve closed
11/22/2010	10:59:53 AM	PH3 valve closed
11/22/2010	10:59:53 AM	SiCl4 pre valve closed
11/22/2010	10:59:53 AM	SiCl4 post valve closed
11/22/2010	10:59:53 AM	Bubbler valve closed
11/22/2010	10:59:53 AM	Main Vac valve opened
11/22/2010	10:59:53 AM	Bypass valve opened
11/22/2010	10:59:53 AM	Helium MFC set to  0.000000
11/22/2010	10:59:53 AM	H2 MFC set to  0.000000
11/22/2010	10:59:53 AM	BCl3 MFC set to  0.000000
11/22/2010	10:59:53 AM	PHl3 MFC set to  0.000000
11/22/2010	10:59:53 AM	SiCl4 MFC set to  0.000000
11/22/2010	10:59:53 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:59:53 AM	Tube furnace set to 0
11/22/2010	11:00:53 AM	H2 valve closed
11/22/2010	11:00:53 AM	BCl3 valve closed
11/22/2010	11:00:53 AM	PH3 valve closed
11/22/2010	11:00:53 AM	SiCl4 pre valve closed
11/22/2010	11:00:53 AM	SiCl4 post valve closed
11/22/2010	11:00:53 AM	Bubbler valve closed
11/22/2010	11:00:53 AM	Helium valve opened
11/22/2010	11:00:53 AM	Main Vac valve opened
11/22/2010	11:00:53 AM	Bypass valve opened
11/22/2010	11:00:53 AM	Helium MFC set to  100.000000
11/22/2010	11:00:53 AM	H2 MFC set to  0.000000
11/22/2010	11:00:53 AM	BCl3 MFC set to  0.000000
11/22/2010	11:00:53 AM	PHl3 MFC set to  0.000000
11/22/2010	11:00:53 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:00:53 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:00:54 AM	Tube furnace set to 0
11/22/2010	11:01:54 AM	Helium valve closed
11/22/2010	11:01:54 AM	H2 valve closed
11/22/2010	11:01:54 AM	BCl3 valve closed
11/22/2010	11:01:54 AM	PH3 valve closed
11/22/2010	11:01:54 AM	SiCl4 pre valve closed
11/22/2010	11:01:54 AM	SiCl4 post valve closed
11/22/2010	11:01:54 AM	Bubbler valve closed
11/22/2010	11:01:54 AM	Main Vac valve opened
11/22/2010	11:01:54 AM	Bypass valve opened
11/22/2010	11:01:54 AM	Helium MFC set to  0.000000
11/22/2010	11:01:54 AM	H2 MFC set to  0.000000
11/22/2010	11:01:54 AM	BCl3 MFC set to  0.000000
11/22/2010	11:01:54 AM	PHl3 MFC set to  0.000000
11/22/2010	11:01:54 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:01:54 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:01:54 AM	Tube furnace set to 0
11/22/2010	11:02:54 AM	H2 valve closed
11/22/2010	11:02:54 AM	BCl3 valve closed
11/22/2010	11:02:54 AM	PH3 valve closed
11/22/2010	11:02:54 AM	SiCl4 pre valve closed
11/22/2010	11:02:54 AM	SiCl4 post valve closed
11/22/2010	11:02:54 AM	Bubbler valve closed
11/22/2010	11:02:54 AM	Helium valve opened
11/22/2010	11:02:54 AM	Main Vac valve opened
11/22/2010	11:02:54 AM	Bypass valve opened
11/22/2010	11:02:54 AM	Helium MFC set to  100.000000
11/22/2010	11:02:54 AM	H2 MFC set to  0.000000
11/22/2010	11:02:54 AM	BCl3 MFC set to  0.000000
11/22/2010	11:02:54 AM	PHl3 MFC set to  0.000000
11/22/2010	11:02:54 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:02:54 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:02:54 AM	Tube furnace set to 0
11/22/2010	11:03:54 AM	Helium valve closed
11/22/2010	11:03:54 AM	H2 valve closed
11/22/2010	11:03:54 AM	BCl3 valve closed
11/22/2010	11:03:54 AM	PH3 valve closed
11/22/2010	11:03:54 AM	SiCl4 pre valve closed
11/22/2010	11:03:54 AM	SiCl4 post valve closed
11/22/2010	11:03:54 AM	Bubbler valve closed
11/22/2010	11:03:54 AM	Main Vac valve opened
11/22/2010	11:03:54 AM	Bypass valve opened
11/22/2010	11:03:54 AM	Helium MFC set to  0.000000
11/22/2010	11:03:54 AM	H2 MFC set to  0.000000
11/22/2010	11:03:54 AM	BCl3 MFC set to  0.000000
11/22/2010	11:03:54 AM	PHl3 MFC set to  0.000000
11/22/2010	11:03:54 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:03:54 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:03:54 AM	Tube furnace set to 0
11/22/2010	11:04:54 AM	H2 valve closed
11/22/2010	11:04:54 AM	BCl3 valve closed
11/22/2010	11:04:54 AM	PH3 valve closed
11/22/2010	11:04:54 AM	SiCl4 pre valve closed
11/22/2010	11:04:54 AM	SiCl4 post valve closed
11/22/2010	11:04:54 AM	Bubbler valve closed
11/22/2010	11:04:54 AM	Helium valve opened
11/22/2010	11:04:54 AM	Main Vac valve opened
11/22/2010	11:04:54 AM	Bypass valve opened
11/22/2010	11:04:54 AM	Helium MFC set to  100.000000
11/22/2010	11:04:54 AM	H2 MFC set to  0.000000
11/22/2010	11:04:54 AM	BCl3 MFC set to  0.000000
11/22/2010	11:04:54 AM	PHl3 MFC set to  0.000000
11/22/2010	11:04:54 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:04:54 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:04:54 AM	Tube furnace set to 0
11/22/2010	11:05:54 AM	Helium valve closed
11/22/2010	11:05:54 AM	H2 valve closed
11/22/2010	11:05:54 AM	BCl3 valve closed
11/22/2010	11:05:54 AM	PH3 valve closed
11/22/2010	11:05:54 AM	SiCl4 pre valve closed
11/22/2010	11:05:54 AM	SiCl4 post valve closed
11/22/2010	11:05:54 AM	Bubbler valve closed
11/22/2010	11:05:54 AM	Main Vac valve opened
11/22/2010	11:05:54 AM	Bypass valve opened
11/22/2010	11:05:54 AM	Helium MFC set to  0.000000
11/22/2010	11:05:54 AM	H2 MFC set to  0.000000
11/22/2010	11:05:54 AM	BCl3 MFC set to  0.000000
11/22/2010	11:05:54 AM	PHl3 MFC set to  0.000000
11/22/2010	11:05:54 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:05:54 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:05:55 AM	Tube furnace set to 0
11/22/2010	11:06:55 AM	H2 valve closed
11/22/2010	11:06:55 AM	BCl3 valve closed
11/22/2010	11:06:55 AM	PH3 valve closed
11/22/2010	11:06:55 AM	SiCl4 pre valve closed
11/22/2010	11:06:55 AM	SiCl4 post valve closed
11/22/2010	11:06:55 AM	Bubbler valve closed
11/22/2010	11:06:55 AM	Helium valve opened
11/22/2010	11:06:55 AM	Main Vac valve opened
11/22/2010	11:06:55 AM	Bypass valve opened
11/22/2010	11:06:55 AM	Helium MFC set to  100.000000
11/22/2010	11:06:55 AM	H2 MFC set to  0.000000
11/22/2010	11:06:55 AM	BCl3 MFC set to  0.000000
11/22/2010	11:06:55 AM	PHl3 MFC set to  0.000000
11/22/2010	11:06:55 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:06:55 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:06:55 AM	Tube furnace set to 0
11/22/2010	11:07:55 AM	Helium valve closed
11/22/2010	11:07:55 AM	H2 valve closed
11/22/2010	11:07:55 AM	BCl3 valve closed
11/22/2010	11:07:55 AM	PH3 valve closed
11/22/2010	11:07:55 AM	SiCl4 pre valve closed
11/22/2010	11:07:55 AM	SiCl4 post valve closed
11/22/2010	11:07:55 AM	Bubbler valve closed
11/22/2010	11:07:55 AM	Main Vac valve opened
11/22/2010	11:07:55 AM	Bypass valve opened
11/22/2010	11:07:55 AM	Helium MFC set to  0.000000
11/22/2010	11:07:55 AM	H2 MFC set to  0.000000
11/22/2010	11:07:55 AM	BCl3 MFC set to  0.000000
11/22/2010	11:07:55 AM	PHl3 MFC set to  0.000000
11/22/2010	11:07:55 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:07:55 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:07:55 AM	Tube furnace set to 0
11/22/2010	11:08:55 AM	H2 valve closed
11/22/2010	11:08:55 AM	BCl3 valve closed
11/22/2010	11:08:55 AM	PH3 valve closed
11/22/2010	11:08:55 AM	SiCl4 pre valve closed
11/22/2010	11:08:55 AM	SiCl4 post valve closed
11/22/2010	11:08:55 AM	Bubbler valve closed
11/22/2010	11:08:55 AM	Helium valve opened
11/22/2010	11:08:55 AM	Main Vac valve opened
11/22/2010	11:08:55 AM	Bypass valve opened
11/22/2010	11:08:55 AM	Helium MFC set to  100.000000
11/22/2010	11:08:55 AM	H2 MFC set to  0.000000
11/22/2010	11:08:55 AM	BCl3 MFC set to  0.000000
11/22/2010	11:08:55 AM	PHl3 MFC set to  0.000000
11/22/2010	11:08:55 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:08:55 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:08:55 AM	Tube furnace set to 0
11/22/2010	11:09:55 AM	Helium valve closed
11/22/2010	11:09:55 AM	H2 valve closed
11/22/2010	11:09:55 AM	BCl3 valve closed
11/22/2010	11:09:55 AM	PH3 valve closed
11/22/2010	11:09:55 AM	SiCl4 pre valve closed
11/22/2010	11:09:55 AM	SiCl4 post valve closed
11/22/2010	11:09:55 AM	Bubbler valve closed
11/22/2010	11:09:55 AM	Main Vac valve opened
11/22/2010	11:09:55 AM	Bypass valve opened
11/22/2010	11:09:55 AM	Helium MFC set to  0.000000
11/22/2010	11:09:55 AM	H2 MFC set to  0.000000
11/22/2010	11:09:55 AM	BCl3 MFC set to  0.000000
11/22/2010	11:09:55 AM	PHl3 MFC set to  0.000000
11/22/2010	11:09:55 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:09:55 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:09:55 AM	Tube furnace set to 0
11/22/2010	11:10:55 AM	H2 valve closed
11/22/2010	11:10:55 AM	BCl3 valve closed
11/22/2010	11:10:55 AM	PH3 valve closed
11/22/2010	11:10:55 AM	SiCl4 pre valve closed
11/22/2010	11:10:55 AM	SiCl4 post valve closed
11/22/2010	11:10:55 AM	Bubbler valve closed
11/22/2010	11:10:55 AM	Helium valve opened
11/22/2010	11:10:55 AM	Main Vac valve opened
11/22/2010	11:10:55 AM	Bypass valve opened
11/22/2010	11:10:55 AM	Helium MFC set to  100.000000
11/22/2010	11:10:55 AM	H2 MFC set to  0.000000
11/22/2010	11:10:55 AM	BCl3 MFC set to  0.000000
11/22/2010	11:10:55 AM	PHl3 MFC set to  0.000000
11/22/2010	11:10:55 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:10:55 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:10:56 AM	Tube furnace set to 0
11/22/2010	11:11:56 AM	Helium valve closed
11/22/2010	11:11:56 AM	H2 valve closed
11/22/2010	11:11:56 AM	BCl3 valve closed
11/22/2010	11:11:56 AM	PH3 valve closed
11/22/2010	11:11:56 AM	SiCl4 pre valve closed
11/22/2010	11:11:56 AM	SiCl4 post valve closed
11/22/2010	11:11:56 AM	Bubbler valve closed
11/22/2010	11:11:56 AM	Main Vac valve opened
11/22/2010	11:11:56 AM	Bypass valve opened
11/22/2010	11:11:56 AM	Helium MFC set to  0.000000
11/22/2010	11:11:56 AM	H2 MFC set to  0.000000
11/22/2010	11:11:56 AM	BCl3 MFC set to  0.000000
11/22/2010	11:11:56 AM	PHl3 MFC set to  0.000000
11/22/2010	11:11:56 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:11:56 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:11:56 AM	Tube furnace set to 0
11/22/2010	11:12:56 AM	H2 valve closed
11/22/2010	11:12:56 AM	BCl3 valve closed
11/22/2010	11:12:56 AM	PH3 valve closed
11/22/2010	11:12:56 AM	SiCl4 pre valve closed
11/22/2010	11:12:56 AM	SiCl4 post valve closed
11/22/2010	11:12:56 AM	Bubbler valve closed
11/22/2010	11:12:56 AM	Helium valve opened
11/22/2010	11:12:56 AM	Main Vac valve opened
11/22/2010	11:12:56 AM	Bypass valve opened
11/22/2010	11:12:56 AM	Helium MFC set to  100.000000
11/22/2010	11:12:56 AM	H2 MFC set to  0.000000
11/22/2010	11:12:56 AM	BCl3 MFC set to  0.000000
11/22/2010	11:12:56 AM	PHl3 MFC set to  0.000000
11/22/2010	11:12:56 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:12:56 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:12:56 AM	Tube furnace set to 0
11/22/2010	11:13:56 AM	Helium valve closed
11/22/2010	11:13:56 AM	H2 valve closed
11/22/2010	11:13:56 AM	BCl3 valve closed
11/22/2010	11:13:56 AM	PH3 valve closed
11/22/2010	11:13:56 AM	SiCl4 pre valve closed
11/22/2010	11:13:56 AM	SiCl4 post valve closed
11/22/2010	11:13:56 AM	Bubbler valve closed
11/22/2010	11:13:56 AM	Main Vac valve opened
11/22/2010	11:13:56 AM	Bypass valve opened
11/22/2010	11:13:56 AM	Helium MFC set to  0.000000
11/22/2010	11:13:56 AM	H2 MFC set to  0.000000
11/22/2010	11:13:56 AM	BCl3 MFC set to  0.000000
11/22/2010	11:13:56 AM	PHl3 MFC set to  0.000000
11/22/2010	11:13:56 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:13:56 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:13:56 AM	Tube furnace set to 0
11/22/2010	11:14:56 AM	H2 valve closed
11/22/2010	11:14:56 AM	BCl3 valve closed
11/22/2010	11:14:56 AM	PH3 valve closed
11/22/2010	11:14:56 AM	SiCl4 pre valve closed
11/22/2010	11:14:56 AM	SiCl4 post valve closed
11/22/2010	11:14:56 AM	Bubbler valve closed
11/22/2010	11:14:56 AM	Helium valve opened
11/22/2010	11:14:56 AM	Main Vac valve opened
11/22/2010	11:14:56 AM	Bypass valve opened
11/22/2010	11:14:56 AM	Helium MFC set to  100.000000
11/22/2010	11:14:56 AM	H2 MFC set to  0.000000
11/22/2010	11:14:56 AM	BCl3 MFC set to  0.000000
11/22/2010	11:14:56 AM	PHl3 MFC set to  0.000000
11/22/2010	11:14:56 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:14:56 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:14:56 AM	Tube furnace set to 0
11/22/2010	11:15:56 AM	Helium valve closed
11/22/2010	11:15:56 AM	H2 valve closed
11/22/2010	11:15:56 AM	BCl3 valve closed
11/22/2010	11:15:56 AM	PH3 valve closed
11/22/2010	11:15:56 AM	SiCl4 pre valve closed
11/22/2010	11:15:56 AM	SiCl4 post valve closed
11/22/2010	11:15:56 AM	Bubbler valve closed
11/22/2010	11:15:56 AM	Main Vac valve opened
11/22/2010	11:15:56 AM	Bypass valve opened
11/22/2010	11:15:56 AM	Helium MFC set to  0.000000
11/22/2010	11:15:56 AM	H2 MFC set to  0.000000
11/22/2010	11:15:56 AM	BCl3 MFC set to  0.000000
11/22/2010	11:15:56 AM	PHl3 MFC set to  0.000000
11/22/2010	11:15:56 AM	SiCl4 MFC set to  0.000000
11/22/2010	11:15:56 AM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:15:57 AM	Tube furnace set to 0
11/22/2010	11:15:58 AM	Run finished at 11:15 AM
11/22/2010	11:15:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	12:00:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	12:00:12 PM	Recipe started at 12:00 PM
11/22/2010	12:00:12 PM	Helium valve closed
11/22/2010	12:00:12 PM	H2 valve closed
11/22/2010	12:00:12 PM	BCl3 valve closed
11/22/2010	12:00:12 PM	PH3 valve closed
11/22/2010	12:00:12 PM	SiCl4 pre valve closed
11/22/2010	12:00:12 PM	SiCl4 post valve closed
11/22/2010	12:00:12 PM	Main Vac valve closed
11/22/2010	12:00:12 PM	Bubbler valve closed
11/22/2010	12:00:12 PM	Bypass valve opened
11/22/2010	12:00:12 PM	Helium MFC set to  0.000000
11/22/2010	12:00:12 PM	H2 MFC set to  0.000000
11/22/2010	12:00:12 PM	BCl3 MFC set to  0.000000
11/22/2010	12:00:12 PM	PHl3 MFC set to  0.000000
11/22/2010	12:00:12 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:00:12 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:00:12 PM	Tube furnace set to 0
11/22/2010	12:00:12 PM	Helium valve closed
11/22/2010	12:00:12 PM	H2 valve closed
11/22/2010	12:00:12 PM	BCl3 valve closed
11/22/2010	12:00:12 PM	PH3 valve closed
11/22/2010	12:00:12 PM	SiCl4 pre valve closed
11/22/2010	12:00:12 PM	SiCl4 post valve closed
11/22/2010	12:00:12 PM	Bubbler valve closed
11/22/2010	12:00:12 PM	Main Vac valve opened
11/22/2010	12:00:12 PM	Bypass valve opened
11/22/2010	12:00:12 PM	Helium MFC set to  0.000000
11/22/2010	12:00:12 PM	H2 MFC set to  0.000000
11/22/2010	12:00:12 PM	BCl3 MFC set to  0.000000
11/22/2010	12:00:12 PM	PHl3 MFC set to  0.000000
11/22/2010	12:00:12 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:00:12 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:00:12 PM	Tube furnace set to 0
11/22/2010	12:01:12 PM	H2 valve closed
11/22/2010	12:01:12 PM	BCl3 valve closed
11/22/2010	12:01:12 PM	PH3 valve closed
11/22/2010	12:01:12 PM	SiCl4 pre valve closed
11/22/2010	12:01:12 PM	SiCl4 post valve closed
11/22/2010	12:01:12 PM	Bubbler valve closed
11/22/2010	12:01:12 PM	Helium valve opened
11/22/2010	12:01:12 PM	Main Vac valve opened
11/22/2010	12:01:12 PM	Bypass valve opened
11/22/2010	12:01:12 PM	Helium MFC set to  100.000000
11/22/2010	12:01:12 PM	H2 MFC set to  0.000000
11/22/2010	12:01:12 PM	BCl3 MFC set to  0.000000
11/22/2010	12:01:12 PM	PHl3 MFC set to  0.000000
11/22/2010	12:01:12 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:01:12 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:01:13 PM	Tube furnace set to 0
11/22/2010	12:02:13 PM	Helium valve closed
11/22/2010	12:02:13 PM	H2 valve closed
11/22/2010	12:02:13 PM	BCl3 valve closed
11/22/2010	12:02:13 PM	PH3 valve closed
11/22/2010	12:02:13 PM	SiCl4 pre valve closed
11/22/2010	12:02:13 PM	SiCl4 post valve closed
11/22/2010	12:02:13 PM	Bubbler valve closed
11/22/2010	12:02:13 PM	Main Vac valve opened
11/22/2010	12:02:13 PM	Bypass valve opened
11/22/2010	12:02:13 PM	Helium MFC set to  0.000000
11/22/2010	12:02:13 PM	H2 MFC set to  0.000000
11/22/2010	12:02:13 PM	BCl3 MFC set to  0.000000
11/22/2010	12:02:13 PM	PHl3 MFC set to  0.000000
11/22/2010	12:02:13 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:02:13 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:02:13 PM	Tube furnace set to 0
11/22/2010	12:03:13 PM	H2 valve closed
11/22/2010	12:03:13 PM	BCl3 valve closed
11/22/2010	12:03:13 PM	PH3 valve closed
11/22/2010	12:03:13 PM	SiCl4 pre valve closed
11/22/2010	12:03:13 PM	SiCl4 post valve closed
11/22/2010	12:03:13 PM	Bubbler valve closed
11/22/2010	12:03:13 PM	Helium valve opened
11/22/2010	12:03:13 PM	Main Vac valve opened
11/22/2010	12:03:13 PM	Bypass valve opened
11/22/2010	12:03:13 PM	Helium MFC set to  100.000000
11/22/2010	12:03:13 PM	H2 MFC set to  0.000000
11/22/2010	12:03:13 PM	BCl3 MFC set to  0.000000
11/22/2010	12:03:13 PM	PHl3 MFC set to  0.000000
11/22/2010	12:03:13 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:03:13 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:03:13 PM	Tube furnace set to 0
11/22/2010	12:04:13 PM	Helium valve closed
11/22/2010	12:04:13 PM	H2 valve closed
11/22/2010	12:04:13 PM	BCl3 valve closed
11/22/2010	12:04:13 PM	PH3 valve closed
11/22/2010	12:04:13 PM	SiCl4 pre valve closed
11/22/2010	12:04:13 PM	SiCl4 post valve closed
11/22/2010	12:04:13 PM	Bubbler valve closed
11/22/2010	12:04:13 PM	Main Vac valve opened
11/22/2010	12:04:13 PM	Bypass valve opened
11/22/2010	12:04:13 PM	Helium MFC set to  0.000000
11/22/2010	12:04:13 PM	H2 MFC set to  0.000000
11/22/2010	12:04:13 PM	BCl3 MFC set to  0.000000
11/22/2010	12:04:13 PM	PHl3 MFC set to  0.000000
11/22/2010	12:04:13 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:04:13 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:04:13 PM	Tube furnace set to 0
11/22/2010	12:05:13 PM	H2 valve closed
11/22/2010	12:05:13 PM	BCl3 valve closed
11/22/2010	12:05:13 PM	PH3 valve closed
11/22/2010	12:05:13 PM	SiCl4 pre valve closed
11/22/2010	12:05:13 PM	SiCl4 post valve closed
11/22/2010	12:05:13 PM	Bubbler valve closed
11/22/2010	12:05:13 PM	Helium valve opened
11/22/2010	12:05:13 PM	Main Vac valve opened
11/22/2010	12:05:13 PM	Bypass valve opened
11/22/2010	12:05:13 PM	Helium MFC set to  100.000000
11/22/2010	12:05:13 PM	H2 MFC set to  0.000000
11/22/2010	12:05:13 PM	BCl3 MFC set to  0.000000
11/22/2010	12:05:13 PM	PHl3 MFC set to  0.000000
11/22/2010	12:05:13 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:05:13 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:05:13 PM	Tube furnace set to 0
11/22/2010	12:06:13 PM	Helium valve closed
11/22/2010	12:06:13 PM	H2 valve closed
11/22/2010	12:06:13 PM	BCl3 valve closed
11/22/2010	12:06:13 PM	PH3 valve closed
11/22/2010	12:06:13 PM	SiCl4 pre valve closed
11/22/2010	12:06:13 PM	SiCl4 post valve closed
11/22/2010	12:06:13 PM	Bubbler valve closed
11/22/2010	12:06:13 PM	Main Vac valve opened
11/22/2010	12:06:13 PM	Bypass valve opened
11/22/2010	12:06:13 PM	Helium MFC set to  0.000000
11/22/2010	12:06:13 PM	H2 MFC set to  0.000000
11/22/2010	12:06:13 PM	BCl3 MFC set to  0.000000
11/22/2010	12:06:13 PM	PHl3 MFC set to  0.000000
11/22/2010	12:06:13 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:06:13 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:06:14 PM	Tube furnace set to 0
11/22/2010	12:07:14 PM	H2 valve closed
11/22/2010	12:07:14 PM	BCl3 valve closed
11/22/2010	12:07:14 PM	PH3 valve closed
11/22/2010	12:07:14 PM	SiCl4 pre valve closed
11/22/2010	12:07:14 PM	SiCl4 post valve closed
11/22/2010	12:07:14 PM	Bubbler valve closed
11/22/2010	12:07:14 PM	Helium valve opened
11/22/2010	12:07:14 PM	Main Vac valve opened
11/22/2010	12:07:14 PM	Bypass valve opened
11/22/2010	12:07:14 PM	Helium MFC set to  100.000000
11/22/2010	12:07:14 PM	H2 MFC set to  0.000000
11/22/2010	12:07:14 PM	BCl3 MFC set to  0.000000
11/22/2010	12:07:14 PM	PHl3 MFC set to  0.000000
11/22/2010	12:07:14 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:07:14 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:07:14 PM	Tube furnace set to 0
11/22/2010	12:08:14 PM	Helium valve closed
11/22/2010	12:08:14 PM	H2 valve closed
11/22/2010	12:08:14 PM	BCl3 valve closed
11/22/2010	12:08:14 PM	PH3 valve closed
11/22/2010	12:08:14 PM	SiCl4 pre valve closed
11/22/2010	12:08:14 PM	SiCl4 post valve closed
11/22/2010	12:08:14 PM	Bubbler valve closed
11/22/2010	12:08:14 PM	Main Vac valve opened
11/22/2010	12:08:14 PM	Bypass valve opened
11/22/2010	12:08:14 PM	Helium MFC set to  0.000000
11/22/2010	12:08:14 PM	H2 MFC set to  0.000000
11/22/2010	12:08:14 PM	BCl3 MFC set to  0.000000
11/22/2010	12:08:14 PM	PHl3 MFC set to  0.000000
11/22/2010	12:08:14 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:08:14 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:08:14 PM	Tube furnace set to 0
11/22/2010	12:09:14 PM	H2 valve closed
11/22/2010	12:09:14 PM	BCl3 valve closed
11/22/2010	12:09:14 PM	PH3 valve closed
11/22/2010	12:09:14 PM	SiCl4 pre valve closed
11/22/2010	12:09:14 PM	SiCl4 post valve closed
11/22/2010	12:09:14 PM	Bubbler valve closed
11/22/2010	12:09:14 PM	Helium valve opened
11/22/2010	12:09:14 PM	Main Vac valve opened
11/22/2010	12:09:14 PM	Bypass valve opened
11/22/2010	12:09:14 PM	Helium MFC set to  100.000000
11/22/2010	12:09:14 PM	H2 MFC set to  0.000000
11/22/2010	12:09:14 PM	BCl3 MFC set to  0.000000
11/22/2010	12:09:14 PM	PHl3 MFC set to  0.000000
11/22/2010	12:09:14 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:09:14 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:09:14 PM	Tube furnace set to 0
11/22/2010	12:10:14 PM	Helium valve closed
11/22/2010	12:10:14 PM	H2 valve closed
11/22/2010	12:10:14 PM	BCl3 valve closed
11/22/2010	12:10:14 PM	PH3 valve closed
11/22/2010	12:10:14 PM	SiCl4 pre valve closed
11/22/2010	12:10:14 PM	SiCl4 post valve closed
11/22/2010	12:10:14 PM	Bubbler valve closed
11/22/2010	12:10:14 PM	Main Vac valve opened
11/22/2010	12:10:14 PM	Bypass valve opened
11/22/2010	12:10:14 PM	Helium MFC set to  0.000000
11/22/2010	12:10:14 PM	H2 MFC set to  0.000000
11/22/2010	12:10:14 PM	BCl3 MFC set to  0.000000
11/22/2010	12:10:14 PM	PHl3 MFC set to  0.000000
11/22/2010	12:10:14 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:10:14 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:10:14 PM	Tube furnace set to 0
11/22/2010	12:11:14 PM	H2 valve closed
11/22/2010	12:11:14 PM	BCl3 valve closed
11/22/2010	12:11:14 PM	PH3 valve closed
11/22/2010	12:11:14 PM	SiCl4 pre valve closed
11/22/2010	12:11:14 PM	SiCl4 post valve closed
11/22/2010	12:11:14 PM	Bubbler valve closed
11/22/2010	12:11:14 PM	Helium valve opened
11/22/2010	12:11:14 PM	Main Vac valve opened
11/22/2010	12:11:14 PM	Bypass valve opened
11/22/2010	12:11:14 PM	Helium MFC set to  100.000000
11/22/2010	12:11:14 PM	H2 MFC set to  0.000000
11/22/2010	12:11:14 PM	BCl3 MFC set to  0.000000
11/22/2010	12:11:14 PM	PHl3 MFC set to  0.000000
11/22/2010	12:11:14 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:11:14 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:11:15 PM	Tube furnace set to 0
11/22/2010	12:12:15 PM	Helium valve closed
11/22/2010	12:12:15 PM	H2 valve closed
11/22/2010	12:12:15 PM	BCl3 valve closed
11/22/2010	12:12:15 PM	PH3 valve closed
11/22/2010	12:12:15 PM	SiCl4 pre valve closed
11/22/2010	12:12:15 PM	SiCl4 post valve closed
11/22/2010	12:12:15 PM	Bubbler valve closed
11/22/2010	12:12:15 PM	Main Vac valve opened
11/22/2010	12:12:15 PM	Bypass valve opened
11/22/2010	12:12:15 PM	Helium MFC set to  0.000000
11/22/2010	12:12:15 PM	H2 MFC set to  0.000000
11/22/2010	12:12:15 PM	BCl3 MFC set to  0.000000
11/22/2010	12:12:15 PM	PHl3 MFC set to  0.000000
11/22/2010	12:12:15 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:12:15 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:12:15 PM	Tube furnace set to 0
11/22/2010	12:12:54 PM	Run aborted at 12:12 PM
11/22/2010	12:12:54 PM	Helium valve closed
11/22/2010	12:12:54 PM	H2 valve closed
11/22/2010	12:12:54 PM	BCl3 valve closed
11/22/2010	12:12:54 PM	PH3 valve closed
11/22/2010	12:12:54 PM	SiCl4 pre valve closed
11/22/2010	12:12:54 PM	SiCl4 post valve closed
11/22/2010	12:12:54 PM	Bypass valve closed
11/22/2010	12:12:54 PM	Main Vac valve closed
11/22/2010	12:12:54 PM	Bubbler valve closed
11/22/2010	12:12:54 PM	Helium MFC set to  0.000000
11/22/2010	12:12:54 PM	H2 MFC set to  0.000000
11/22/2010	12:12:54 PM	BCl3 MFC set to  0.000000
11/22/2010	12:12:54 PM	PHl3 MFC set to  0.000000
11/22/2010	12:12:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:12:54 PM	Tube furnace set to 0
11/22/2010	12:12:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	12:14:01 PM	Recipe started at 12:13 PM
11/22/2010	12:14:01 PM	Helium valve closed
11/22/2010	12:14:01 PM	BCl3 valve closed
11/22/2010	12:14:01 PM	PH3 valve closed
11/22/2010	12:14:01 PM	SiCl4 pre valve closed
11/22/2010	12:14:01 PM	SiCl4 post valve closed
11/22/2010	12:14:01 PM	Main Vac valve closed
11/22/2010	12:14:01 PM	Bypass valve closed
11/22/2010	12:14:01 PM	Bubbler valve closed
11/22/2010	12:14:01 PM	H2 valve opened
11/22/2010	12:14:01 PM	Helium MFC set to  0.000000
11/22/2010	12:14:01 PM	H2 MFC set to  500.000000
11/22/2010	12:14:01 PM	BCl3 MFC set to  0.000000
11/22/2010	12:14:01 PM	PHl3 MFC set to  0.000000
11/22/2010	12:14:01 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:14:01 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:14:02 PM	Tube furnace set to 0
11/22/2010	12:15:22 PM	Helium valve closed
11/22/2010	12:15:22 PM	BCl3 valve closed
11/22/2010	12:15:22 PM	PH3 valve closed
11/22/2010	12:15:22 PM	SiCl4 pre valve closed
11/22/2010	12:15:22 PM	SiCl4 post valve closed
11/22/2010	12:15:22 PM	Main Vac valve closed
11/22/2010	12:15:22 PM	Bypass valve closed
11/22/2010	12:15:22 PM	H2 valve opened
11/22/2010	12:15:22 PM	Bubbler valve opened
11/22/2010	12:15:22 PM	Helium MFC set to  0.000000
11/22/2010	12:15:22 PM	H2 MFC set to  500.000000
11/22/2010	12:15:22 PM	BCl3 MFC set to  0.000000
11/22/2010	12:15:22 PM	PHl3 MFC set to  0.000000
11/22/2010	12:15:22 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:15:22 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:15:22 PM	Tube furnace set to 1000
11/22/2010	12:35:22 PM	Helium valve closed
11/22/2010	12:35:22 PM	PH3 valve closed
11/22/2010	12:35:22 PM	Main Vac valve closed
11/22/2010	12:35:22 PM	Bypass valve closed
11/22/2010	12:35:22 PM	H2 valve opened
11/22/2010	12:35:22 PM	BCl3 valve opened
11/22/2010	12:35:22 PM	SiCl4 pre valve opened
11/22/2010	12:35:22 PM	SiCl4 post valve opened
11/22/2010	12:35:22 PM	Bubbler valve opened
11/22/2010	12:35:22 PM	Helium MFC set to  0.000000
11/22/2010	12:35:22 PM	H2 MFC set to  500.000000
11/22/2010	12:35:22 PM	BCl3 MFC set to  12.000000
11/22/2010	12:35:22 PM	PHl3 MFC set to  0.000000
11/22/2010	12:35:22 PM	SiCl4 MFC set to  50.000000
11/22/2010	12:35:22 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:35:23 PM	Tube furnace set to 1000
11/22/2010	12:50:23 PM	H2 valve closed
11/22/2010	12:50:23 PM	BCl3 valve closed
11/22/2010	12:50:23 PM	PH3 valve closed
11/22/2010	12:50:23 PM	SiCl4 pre valve closed
11/22/2010	12:50:23 PM	SiCl4 post valve closed
11/22/2010	12:50:23 PM	Main Vac valve closed
11/22/2010	12:50:23 PM	Bypass valve closed
11/22/2010	12:50:23 PM	Helium valve opened
11/22/2010	12:50:23 PM	Bubbler valve opened
11/22/2010	12:50:23 PM	Helium MFC set to  500.000000
11/22/2010	12:50:23 PM	H2 MFC set to  0.000000
11/22/2010	12:50:23 PM	BCl3 MFC set to  0.000000
11/22/2010	12:50:23 PM	PHl3 MFC set to  0.000000
11/22/2010	12:50:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:50:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:50:23 PM	Tube furnace set to 950
11/22/2010	12:55:23 PM	H2 valve closed
11/22/2010	12:55:23 PM	BCl3 valve closed
11/22/2010	12:55:23 PM	PH3 valve closed
11/22/2010	12:55:23 PM	SiCl4 pre valve closed
11/22/2010	12:55:23 PM	SiCl4 post valve closed
11/22/2010	12:55:23 PM	Main Vac valve closed
11/22/2010	12:55:23 PM	Bypass valve closed
11/22/2010	12:55:23 PM	Helium valve opened
11/22/2010	12:55:23 PM	Bubbler valve opened
11/22/2010	12:55:23 PM	Helium MFC set to  500.000000
11/22/2010	12:55:23 PM	H2 MFC set to  0.000000
11/22/2010	12:55:23 PM	BCl3 MFC set to  0.000000
11/22/2010	12:55:23 PM	PHl3 MFC set to  0.000000
11/22/2010	12:55:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	12:55:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	12:55:23 PM	Tube furnace set to 900
11/22/2010	1:00:23 PM	H2 valve closed
11/22/2010	1:00:23 PM	BCl3 valve closed
11/22/2010	1:00:23 PM	PH3 valve closed
11/22/2010	1:00:23 PM	SiCl4 pre valve closed
11/22/2010	1:00:23 PM	SiCl4 post valve closed
11/22/2010	1:00:23 PM	Main Vac valve closed
11/22/2010	1:00:23 PM	Bypass valve closed
11/22/2010	1:00:23 PM	Helium valve opened
11/22/2010	1:00:23 PM	Bubbler valve opened
11/22/2010	1:00:23 PM	Helium MFC set to  500.000000
11/22/2010	1:00:23 PM	H2 MFC set to  0.000000
11/22/2010	1:00:23 PM	BCl3 MFC set to  0.000000
11/22/2010	1:00:23 PM	PHl3 MFC set to  0.000000
11/22/2010	1:00:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:00:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:00:23 PM	Tube furnace set to 850
11/22/2010	1:05:23 PM	H2 valve closed
11/22/2010	1:05:23 PM	BCl3 valve closed
11/22/2010	1:05:23 PM	PH3 valve closed
11/22/2010	1:05:23 PM	SiCl4 pre valve closed
11/22/2010	1:05:23 PM	SiCl4 post valve closed
11/22/2010	1:05:23 PM	Main Vac valve closed
11/22/2010	1:05:23 PM	Bypass valve closed
11/22/2010	1:05:23 PM	Helium valve opened
11/22/2010	1:05:23 PM	Bubbler valve opened
11/22/2010	1:05:23 PM	Helium MFC set to  500.000000
11/22/2010	1:05:23 PM	H2 MFC set to  0.000000
11/22/2010	1:05:23 PM	BCl3 MFC set to  0.000000
11/22/2010	1:05:23 PM	PHl3 MFC set to  0.000000
11/22/2010	1:05:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:05:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:05:23 PM	Tube furnace set to 800
11/22/2010	1:10:23 PM	H2 valve closed
11/22/2010	1:10:23 PM	BCl3 valve closed
11/22/2010	1:10:23 PM	PH3 valve closed
11/22/2010	1:10:23 PM	SiCl4 pre valve closed
11/22/2010	1:10:23 PM	SiCl4 post valve closed
11/22/2010	1:10:23 PM	Main Vac valve closed
11/22/2010	1:10:23 PM	Bypass valve closed
11/22/2010	1:10:23 PM	Helium valve opened
11/22/2010	1:10:23 PM	Bubbler valve opened
11/22/2010	1:10:23 PM	Helium MFC set to  500.000000
11/22/2010	1:10:23 PM	H2 MFC set to  0.000000
11/22/2010	1:10:23 PM	BCl3 MFC set to  0.000000
11/22/2010	1:10:23 PM	PHl3 MFC set to  0.000000
11/22/2010	1:10:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:10:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:10:24 PM	Tube furnace set to 750
11/22/2010	1:15:24 PM	H2 valve closed
11/22/2010	1:15:24 PM	BCl3 valve closed
11/22/2010	1:15:24 PM	PH3 valve closed
11/22/2010	1:15:24 PM	SiCl4 pre valve closed
11/22/2010	1:15:24 PM	SiCl4 post valve closed
11/22/2010	1:15:24 PM	Main Vac valve closed
11/22/2010	1:15:24 PM	Bypass valve closed
11/22/2010	1:15:24 PM	Helium valve opened
11/22/2010	1:15:24 PM	Bubbler valve opened
11/22/2010	1:15:24 PM	Helium MFC set to  500.000000
11/22/2010	1:15:24 PM	H2 MFC set to  0.000000
11/22/2010	1:15:24 PM	BCl3 MFC set to  0.000000
11/22/2010	1:15:24 PM	PHl3 MFC set to  0.000000
11/22/2010	1:15:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:15:24 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:15:24 PM	Tube furnace set to 700
11/22/2010	1:16:07 PM	Run aborted at 1:16 PM
11/22/2010	1:16:07 PM	Helium valve closed
11/22/2010	1:16:07 PM	H2 valve closed
11/22/2010	1:16:07 PM	BCl3 valve closed
11/22/2010	1:16:07 PM	PH3 valve closed
11/22/2010	1:16:07 PM	SiCl4 pre valve closed
11/22/2010	1:16:07 PM	SiCl4 post valve closed
11/22/2010	1:16:07 PM	Bypass valve closed
11/22/2010	1:16:07 PM	Main Vac valve closed
11/22/2010	1:16:07 PM	Bubbler valve closed
11/22/2010	1:16:07 PM	Helium MFC set to  0.000000
11/22/2010	1:16:07 PM	H2 MFC set to  0.000000
11/22/2010	1:16:07 PM	BCl3 MFC set to  0.000000
11/22/2010	1:16:07 PM	PHl3 MFC set to  0.000000
11/22/2010	1:16:07 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:16:07 PM	Tube furnace set to 0
11/22/2010	1:41:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	1:41:31 PM	Recipe started at 1:41 PM
11/22/2010	1:41:31 PM	Helium valve closed
11/22/2010	1:41:31 PM	H2 valve closed
11/22/2010	1:41:31 PM	BCl3 valve closed
11/22/2010	1:41:31 PM	PH3 valve closed
11/22/2010	1:41:31 PM	SiCl4 pre valve closed
11/22/2010	1:41:31 PM	SiCl4 post valve closed
11/22/2010	1:41:31 PM	Main Vac valve closed
11/22/2010	1:41:31 PM	Bubbler valve closed
11/22/2010	1:41:31 PM	Bypass valve opened
11/22/2010	1:41:31 PM	Helium MFC set to  0.000000
11/22/2010	1:41:31 PM	H2 MFC set to  0.000000
11/22/2010	1:41:31 PM	BCl3 MFC set to  0.000000
11/22/2010	1:41:31 PM	PHl3 MFC set to  0.000000
11/22/2010	1:41:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:41:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:41:31 PM	Tube furnace set to 0
11/22/2010	1:42:26 PM	Helium valve closed
11/22/2010	1:42:26 PM	H2 valve closed
11/22/2010	1:42:26 PM	BCl3 valve closed
11/22/2010	1:42:26 PM	PH3 valve closed
11/22/2010	1:42:26 PM	SiCl4 pre valve closed
11/22/2010	1:42:26 PM	SiCl4 post valve closed
11/22/2010	1:42:27 PM	Bubbler valve closed
11/22/2010	1:42:27 PM	Main Vac valve opened
11/22/2010	1:42:27 PM	Bypass valve opened
11/22/2010	1:42:27 PM	Helium MFC set to  0.000000
11/22/2010	1:42:27 PM	H2 MFC set to  0.000000
11/22/2010	1:42:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:42:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:42:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:42:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:42:27 PM	Tube furnace set to 0
11/22/2010	1:43:27 PM	H2 valve closed
11/22/2010	1:43:27 PM	BCl3 valve closed
11/22/2010	1:43:27 PM	PH3 valve closed
11/22/2010	1:43:27 PM	SiCl4 pre valve closed
11/22/2010	1:43:27 PM	SiCl4 post valve closed
11/22/2010	1:43:27 PM	Bubbler valve closed
11/22/2010	1:43:27 PM	Helium valve opened
11/22/2010	1:43:27 PM	Main Vac valve opened
11/22/2010	1:43:27 PM	Bypass valve opened
11/22/2010	1:43:27 PM	Helium MFC set to  100.000000
11/22/2010	1:43:27 PM	H2 MFC set to  0.000000
11/22/2010	1:43:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:43:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:43:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:43:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:43:27 PM	Tube furnace set to 0
11/22/2010	1:44:27 PM	Helium valve closed
11/22/2010	1:44:27 PM	H2 valve closed
11/22/2010	1:44:27 PM	BCl3 valve closed
11/22/2010	1:44:27 PM	PH3 valve closed
11/22/2010	1:44:27 PM	SiCl4 pre valve closed
11/22/2010	1:44:27 PM	SiCl4 post valve closed
11/22/2010	1:44:27 PM	Bubbler valve closed
11/22/2010	1:44:27 PM	Main Vac valve opened
11/22/2010	1:44:27 PM	Bypass valve opened
11/22/2010	1:44:27 PM	Helium MFC set to  0.000000
11/22/2010	1:44:27 PM	H2 MFC set to  0.000000
11/22/2010	1:44:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:44:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:44:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:44:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:44:27 PM	Tube furnace set to 0
11/22/2010	1:45:27 PM	H2 valve closed
11/22/2010	1:45:27 PM	BCl3 valve closed
11/22/2010	1:45:27 PM	PH3 valve closed
11/22/2010	1:45:27 PM	SiCl4 pre valve closed
11/22/2010	1:45:27 PM	SiCl4 post valve closed
11/22/2010	1:45:27 PM	Bubbler valve closed
11/22/2010	1:45:27 PM	Helium valve opened
11/22/2010	1:45:27 PM	Main Vac valve opened
11/22/2010	1:45:27 PM	Bypass valve opened
11/22/2010	1:45:27 PM	Helium MFC set to  100.000000
11/22/2010	1:45:27 PM	H2 MFC set to  0.000000
11/22/2010	1:45:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:45:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:45:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:45:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:45:27 PM	Tube furnace set to 0
11/22/2010	1:46:27 PM	Helium valve closed
11/22/2010	1:46:27 PM	H2 valve closed
11/22/2010	1:46:27 PM	BCl3 valve closed
11/22/2010	1:46:27 PM	PH3 valve closed
11/22/2010	1:46:27 PM	SiCl4 pre valve closed
11/22/2010	1:46:27 PM	SiCl4 post valve closed
11/22/2010	1:46:27 PM	Bubbler valve closed
11/22/2010	1:46:27 PM	Main Vac valve opened
11/22/2010	1:46:27 PM	Bypass valve opened
11/22/2010	1:46:27 PM	Helium MFC set to  0.000000
11/22/2010	1:46:27 PM	H2 MFC set to  0.000000
11/22/2010	1:46:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:46:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:46:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:46:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:46:27 PM	Tube furnace set to 0
11/22/2010	1:47:27 PM	H2 valve closed
11/22/2010	1:47:27 PM	BCl3 valve closed
11/22/2010	1:47:27 PM	PH3 valve closed
11/22/2010	1:47:27 PM	SiCl4 pre valve closed
11/22/2010	1:47:27 PM	SiCl4 post valve closed
11/22/2010	1:47:27 PM	Bubbler valve closed
11/22/2010	1:47:27 PM	Helium valve opened
11/22/2010	1:47:27 PM	Main Vac valve opened
11/22/2010	1:47:27 PM	Bypass valve opened
11/22/2010	1:47:27 PM	Helium MFC set to  100.000000
11/22/2010	1:47:27 PM	H2 MFC set to  0.000000
11/22/2010	1:47:27 PM	BCl3 MFC set to  0.000000
11/22/2010	1:47:27 PM	PHl3 MFC set to  0.000000
11/22/2010	1:47:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:47:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:47:28 PM	Tube furnace set to 0
11/22/2010	1:48:28 PM	Helium valve closed
11/22/2010	1:48:28 PM	H2 valve closed
11/22/2010	1:48:28 PM	BCl3 valve closed
11/22/2010	1:48:28 PM	PH3 valve closed
11/22/2010	1:48:28 PM	SiCl4 pre valve closed
11/22/2010	1:48:28 PM	SiCl4 post valve closed
11/22/2010	1:48:28 PM	Bubbler valve closed
11/22/2010	1:48:28 PM	Main Vac valve opened
11/22/2010	1:48:28 PM	Bypass valve opened
11/22/2010	1:48:28 PM	Helium MFC set to  0.000000
11/22/2010	1:48:28 PM	H2 MFC set to  0.000000
11/22/2010	1:48:28 PM	BCl3 MFC set to  0.000000
11/22/2010	1:48:28 PM	PHl3 MFC set to  0.000000
11/22/2010	1:48:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:48:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:48:28 PM	Tube furnace set to 0
11/22/2010	1:49:10 PM	Run aborted at 1:49 PM
11/22/2010	1:49:10 PM	Helium valve closed
11/22/2010	1:49:10 PM	H2 valve closed
11/22/2010	1:49:10 PM	BCl3 valve closed
11/22/2010	1:49:10 PM	PH3 valve closed
11/22/2010	1:49:10 PM	SiCl4 pre valve closed
11/22/2010	1:49:10 PM	SiCl4 post valve closed
11/22/2010	1:49:10 PM	Bypass valve closed
11/22/2010	1:49:10 PM	Main Vac valve closed
11/22/2010	1:49:10 PM	Bubbler valve closed
11/22/2010	1:49:10 PM	Helium MFC set to  0.000000
11/22/2010	1:49:10 PM	H2 MFC set to  0.000000
11/22/2010	1:49:10 PM	BCl3 MFC set to  0.000000
11/22/2010	1:49:10 PM	PHl3 MFC set to  0.000000
11/22/2010	1:49:10 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:49:10 PM	Tube furnace set to 0
11/22/2010	1:49:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	1:49:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	1:49:23 PM	Recipe started at 1:49 PM
11/22/2010	1:49:23 PM	Helium valve closed
11/22/2010	1:49:23 PM	H2 valve closed
11/22/2010	1:49:23 PM	BCl3 valve closed
11/22/2010	1:49:23 PM	PH3 valve closed
11/22/2010	1:49:23 PM	SiCl4 pre valve closed
11/22/2010	1:49:23 PM	SiCl4 post valve closed
11/22/2010	1:49:23 PM	Main Vac valve closed
11/22/2010	1:49:23 PM	Bubbler valve closed
11/22/2010	1:49:23 PM	Bypass valve opened
11/22/2010	1:49:23 PM	Helium MFC set to  0.000000
11/22/2010	1:49:23 PM	H2 MFC set to  0.000000
11/22/2010	1:49:23 PM	BCl3 MFC set to  0.000000
11/22/2010	1:49:23 PM	PHl3 MFC set to  0.000000
11/22/2010	1:49:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:49:23 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:49:24 PM	Tube furnace set to 0
11/22/2010	1:49:24 PM	Helium valve closed
11/22/2010	1:49:24 PM	H2 valve closed
11/22/2010	1:49:24 PM	BCl3 valve closed
11/22/2010	1:49:24 PM	PH3 valve closed
11/22/2010	1:49:24 PM	SiCl4 pre valve closed
11/22/2010	1:49:24 PM	SiCl4 post valve closed
11/22/2010	1:49:24 PM	Bubbler valve closed
11/22/2010	1:49:24 PM	Main Vac valve opened
11/22/2010	1:49:24 PM	Bypass valve opened
11/22/2010	1:49:24 PM	Helium MFC set to  0.000000
11/22/2010	1:49:24 PM	H2 MFC set to  0.000000
11/22/2010	1:49:24 PM	BCl3 MFC set to  0.000000
11/22/2010	1:49:24 PM	PHl3 MFC set to  0.000000
11/22/2010	1:49:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:49:24 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:49:24 PM	Tube furnace set to 0
11/22/2010	1:50:24 PM	H2 valve closed
11/22/2010	1:50:24 PM	BCl3 valve closed
11/22/2010	1:50:24 PM	PH3 valve closed
11/22/2010	1:50:24 PM	SiCl4 pre valve closed
11/22/2010	1:50:24 PM	SiCl4 post valve closed
11/22/2010	1:50:24 PM	Bubbler valve closed
11/22/2010	1:50:24 PM	Helium valve opened
11/22/2010	1:50:24 PM	Main Vac valve opened
11/22/2010	1:50:24 PM	Bypass valve opened
11/22/2010	1:50:24 PM	Helium MFC set to  100.000000
11/22/2010	1:50:24 PM	H2 MFC set to  0.000000
11/22/2010	1:50:24 PM	BCl3 MFC set to  0.000000
11/22/2010	1:50:24 PM	PHl3 MFC set to  0.000000
11/22/2010	1:50:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:50:24 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:50:24 PM	Tube furnace set to 0
11/22/2010	1:51:24 PM	Helium valve closed
11/22/2010	1:51:24 PM	H2 valve closed
11/22/2010	1:51:24 PM	BCl3 valve closed
11/22/2010	1:51:24 PM	PH3 valve closed
11/22/2010	1:51:24 PM	SiCl4 pre valve closed
11/22/2010	1:51:24 PM	SiCl4 post valve closed
11/22/2010	1:51:24 PM	Bubbler valve closed
11/22/2010	1:51:24 PM	Main Vac valve opened
11/22/2010	1:51:24 PM	Bypass valve opened
11/22/2010	1:51:24 PM	Helium MFC set to  0.000000
11/22/2010	1:51:24 PM	H2 MFC set to  0.000000
11/22/2010	1:51:24 PM	BCl3 MFC set to  0.000000
11/22/2010	1:51:24 PM	PHl3 MFC set to  0.000000
11/22/2010	1:51:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:51:24 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:51:24 PM	Tube furnace set to 0
11/22/2010	1:52:25 PM	H2 valve closed
11/22/2010	1:52:25 PM	BCl3 valve closed
11/22/2010	1:52:25 PM	PH3 valve closed
11/22/2010	1:52:25 PM	SiCl4 pre valve closed
11/22/2010	1:52:25 PM	SiCl4 post valve closed
11/22/2010	1:52:25 PM	Bubbler valve closed
11/22/2010	1:52:25 PM	Helium valve opened
11/22/2010	1:52:25 PM	Main Vac valve opened
11/22/2010	1:52:25 PM	Bypass valve opened
11/22/2010	1:52:25 PM	Helium MFC set to  100.000000
11/22/2010	1:52:25 PM	H2 MFC set to  0.000000
11/22/2010	1:52:25 PM	BCl3 MFC set to  0.000000
11/22/2010	1:52:25 PM	PHl3 MFC set to  0.000000
11/22/2010	1:52:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:52:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:52:25 PM	Tube furnace set to 0
11/22/2010	1:53:25 PM	Helium valve closed
11/22/2010	1:53:25 PM	H2 valve closed
11/22/2010	1:53:25 PM	BCl3 valve closed
11/22/2010	1:53:25 PM	PH3 valve closed
11/22/2010	1:53:25 PM	SiCl4 pre valve closed
11/22/2010	1:53:25 PM	SiCl4 post valve closed
11/22/2010	1:53:25 PM	Bubbler valve closed
11/22/2010	1:53:25 PM	Main Vac valve opened
11/22/2010	1:53:25 PM	Bypass valve opened
11/22/2010	1:53:25 PM	Helium MFC set to  0.000000
11/22/2010	1:53:25 PM	H2 MFC set to  0.000000
11/22/2010	1:53:25 PM	BCl3 MFC set to  0.000000
11/22/2010	1:53:25 PM	PHl3 MFC set to  0.000000
11/22/2010	1:53:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:53:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:53:25 PM	Tube furnace set to 0
11/22/2010	1:54:25 PM	H2 valve closed
11/22/2010	1:54:25 PM	BCl3 valve closed
11/22/2010	1:54:25 PM	PH3 valve closed
11/22/2010	1:54:25 PM	SiCl4 pre valve closed
11/22/2010	1:54:25 PM	SiCl4 post valve closed
11/22/2010	1:54:25 PM	Bubbler valve closed
11/22/2010	1:54:25 PM	Helium valve opened
11/22/2010	1:54:25 PM	Main Vac valve opened
11/22/2010	1:54:25 PM	Bypass valve opened
11/22/2010	1:54:25 PM	Helium MFC set to  100.000000
11/22/2010	1:54:25 PM	H2 MFC set to  0.000000
11/22/2010	1:54:25 PM	BCl3 MFC set to  0.000000
11/22/2010	1:54:25 PM	PHl3 MFC set to  0.000000
11/22/2010	1:54:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:54:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:54:25 PM	Tube furnace set to 0
11/22/2010	1:55:25 PM	Helium valve closed
11/22/2010	1:55:25 PM	H2 valve closed
11/22/2010	1:55:25 PM	BCl3 valve closed
11/22/2010	1:55:25 PM	PH3 valve closed
11/22/2010	1:55:25 PM	SiCl4 pre valve closed
11/22/2010	1:55:25 PM	SiCl4 post valve closed
11/22/2010	1:55:25 PM	Bubbler valve closed
11/22/2010	1:55:25 PM	Main Vac valve opened
11/22/2010	1:55:25 PM	Bypass valve opened
11/22/2010	1:55:25 PM	Helium MFC set to  0.000000
11/22/2010	1:55:25 PM	H2 MFC set to  0.000000
11/22/2010	1:55:25 PM	BCl3 MFC set to  0.000000
11/22/2010	1:55:25 PM	PHl3 MFC set to  0.000000
11/22/2010	1:55:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:55:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:55:25 PM	Tube furnace set to 0
11/22/2010	1:56:25 PM	H2 valve closed
11/22/2010	1:56:25 PM	BCl3 valve closed
11/22/2010	1:56:25 PM	PH3 valve closed
11/22/2010	1:56:25 PM	SiCl4 pre valve closed
11/22/2010	1:56:25 PM	SiCl4 post valve closed
11/22/2010	1:56:25 PM	Bubbler valve closed
11/22/2010	1:56:25 PM	Helium valve opened
11/22/2010	1:56:25 PM	Main Vac valve opened
11/22/2010	1:56:25 PM	Bypass valve opened
11/22/2010	1:56:25 PM	Helium MFC set to  100.000000
11/22/2010	1:56:25 PM	H2 MFC set to  0.000000
11/22/2010	1:56:25 PM	BCl3 MFC set to  0.000000
11/22/2010	1:56:25 PM	PHl3 MFC set to  0.000000
11/22/2010	1:56:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:56:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:56:26 PM	Tube furnace set to 0
11/22/2010	1:57:26 PM	Helium valve closed
11/22/2010	1:57:26 PM	H2 valve closed
11/22/2010	1:57:26 PM	BCl3 valve closed
11/22/2010	1:57:26 PM	PH3 valve closed
11/22/2010	1:57:26 PM	SiCl4 pre valve closed
11/22/2010	1:57:26 PM	SiCl4 post valve closed
11/22/2010	1:57:26 PM	Bubbler valve closed
11/22/2010	1:57:26 PM	Main Vac valve opened
11/22/2010	1:57:26 PM	Bypass valve opened
11/22/2010	1:57:26 PM	Helium MFC set to  0.000000
11/22/2010	1:57:26 PM	H2 MFC set to  0.000000
11/22/2010	1:57:26 PM	BCl3 MFC set to  0.000000
11/22/2010	1:57:26 PM	PHl3 MFC set to  0.000000
11/22/2010	1:57:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:57:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:57:26 PM	Tube furnace set to 0
11/22/2010	1:58:26 PM	H2 valve closed
11/22/2010	1:58:26 PM	BCl3 valve closed
11/22/2010	1:58:26 PM	PH3 valve closed
11/22/2010	1:58:26 PM	SiCl4 pre valve closed
11/22/2010	1:58:26 PM	SiCl4 post valve closed
11/22/2010	1:58:26 PM	Bubbler valve closed
11/22/2010	1:58:26 PM	Helium valve opened
11/22/2010	1:58:26 PM	Main Vac valve opened
11/22/2010	1:58:26 PM	Bypass valve opened
11/22/2010	1:58:26 PM	Helium MFC set to  100.000000
11/22/2010	1:58:26 PM	H2 MFC set to  0.000000
11/22/2010	1:58:26 PM	BCl3 MFC set to  0.000000
11/22/2010	1:58:26 PM	PHl3 MFC set to  0.000000
11/22/2010	1:58:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:58:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:58:26 PM	Tube furnace set to 0
11/22/2010	1:59:11 PM	Helium valve closed
11/22/2010	1:59:11 PM	H2 valve closed
11/22/2010	1:59:11 PM	BCl3 valve closed
11/22/2010	1:59:11 PM	PH3 valve closed
11/22/2010	1:59:11 PM	SiCl4 pre valve closed
11/22/2010	1:59:11 PM	SiCl4 post valve closed
11/22/2010	1:59:11 PM	Bubbler valve closed
11/22/2010	1:59:11 PM	Main Vac valve opened
11/22/2010	1:59:11 PM	Bypass valve opened
11/22/2010	1:59:11 PM	Helium MFC set to  0.000000
11/22/2010	1:59:11 PM	H2 MFC set to  0.000000
11/22/2010	1:59:11 PM	BCl3 MFC set to  0.000000
11/22/2010	1:59:11 PM	PHl3 MFC set to  0.000000
11/22/2010	1:59:11 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:59:11 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:59:11 PM	Tube furnace set to 0
11/22/2010	1:59:53 PM	H2 valve closed
11/22/2010	1:59:53 PM	BCl3 valve closed
11/22/2010	1:59:53 PM	PH3 valve closed
11/22/2010	1:59:53 PM	SiCl4 pre valve closed
11/22/2010	1:59:53 PM	SiCl4 post valve closed
11/22/2010	1:59:53 PM	Bubbler valve closed
11/22/2010	1:59:53 PM	Helium valve opened
11/22/2010	1:59:53 PM	Main Vac valve opened
11/22/2010	1:59:53 PM	Bypass valve opened
11/22/2010	1:59:53 PM	Helium MFC set to  100.000000
11/22/2010	1:59:53 PM	H2 MFC set to  0.000000
11/22/2010	1:59:53 PM	BCl3 MFC set to  0.000000
11/22/2010	1:59:53 PM	PHl3 MFC set to  0.000000
11/22/2010	1:59:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	1:59:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	1:59:53 PM	Tube furnace set to 0
11/22/2010	2:00:53 PM	Helium valve closed
11/22/2010	2:00:53 PM	H2 valve closed
11/22/2010	2:00:53 PM	BCl3 valve closed
11/22/2010	2:00:53 PM	PH3 valve closed
11/22/2010	2:00:53 PM	SiCl4 pre valve closed
11/22/2010	2:00:53 PM	SiCl4 post valve closed
11/22/2010	2:00:53 PM	Bubbler valve closed
11/22/2010	2:00:53 PM	Main Vac valve opened
11/22/2010	2:00:53 PM	Bypass valve opened
11/22/2010	2:00:53 PM	Helium MFC set to  0.000000
11/22/2010	2:00:53 PM	H2 MFC set to  0.000000
11/22/2010	2:00:53 PM	BCl3 MFC set to  0.000000
11/22/2010	2:00:53 PM	PHl3 MFC set to  0.000000
11/22/2010	2:00:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:00:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:00:54 PM	Tube furnace set to 0
11/22/2010	2:01:54 PM	H2 valve closed
11/22/2010	2:01:54 PM	BCl3 valve closed
11/22/2010	2:01:54 PM	PH3 valve closed
11/22/2010	2:01:54 PM	SiCl4 pre valve closed
11/22/2010	2:01:54 PM	SiCl4 post valve closed
11/22/2010	2:01:54 PM	Bubbler valve closed
11/22/2010	2:01:54 PM	Helium valve opened
11/22/2010	2:01:54 PM	Main Vac valve opened
11/22/2010	2:01:54 PM	Bypass valve opened
11/22/2010	2:01:54 PM	Helium MFC set to  100.000000
11/22/2010	2:01:54 PM	H2 MFC set to  0.000000
11/22/2010	2:01:54 PM	BCl3 MFC set to  0.000000
11/22/2010	2:01:54 PM	PHl3 MFC set to  0.000000
11/22/2010	2:01:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:01:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:01:54 PM	Tube furnace set to 0
11/22/2010	2:02:54 PM	Helium valve closed
11/22/2010	2:02:54 PM	H2 valve closed
11/22/2010	2:02:54 PM	BCl3 valve closed
11/22/2010	2:02:54 PM	PH3 valve closed
11/22/2010	2:02:54 PM	SiCl4 pre valve closed
11/22/2010	2:02:54 PM	SiCl4 post valve closed
11/22/2010	2:02:54 PM	Bubbler valve closed
11/22/2010	2:02:54 PM	Main Vac valve opened
11/22/2010	2:02:54 PM	Bypass valve opened
11/22/2010	2:02:54 PM	Helium MFC set to  0.000000
11/22/2010	2:02:54 PM	H2 MFC set to  0.000000
11/22/2010	2:02:54 PM	BCl3 MFC set to  0.000000
11/22/2010	2:02:54 PM	PHl3 MFC set to  0.000000
11/22/2010	2:02:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:02:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:02:54 PM	Tube furnace set to 0
11/22/2010	2:03:54 PM	H2 valve closed
11/22/2010	2:03:54 PM	BCl3 valve closed
11/22/2010	2:03:54 PM	PH3 valve closed
11/22/2010	2:03:54 PM	SiCl4 pre valve closed
11/22/2010	2:03:54 PM	SiCl4 post valve closed
11/22/2010	2:03:54 PM	Bubbler valve closed
11/22/2010	2:03:54 PM	Helium valve opened
11/22/2010	2:03:54 PM	Main Vac valve opened
11/22/2010	2:03:54 PM	Bypass valve opened
11/22/2010	2:03:54 PM	Helium MFC set to  100.000000
11/22/2010	2:03:54 PM	H2 MFC set to  0.000000
11/22/2010	2:03:54 PM	BCl3 MFC set to  0.000000
11/22/2010	2:03:54 PM	PHl3 MFC set to  0.000000
11/22/2010	2:03:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:03:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:03:54 PM	Tube furnace set to 0
11/22/2010	2:04:54 PM	Helium valve closed
11/22/2010	2:04:54 PM	H2 valve closed
11/22/2010	2:04:54 PM	BCl3 valve closed
11/22/2010	2:04:54 PM	PH3 valve closed
11/22/2010	2:04:54 PM	SiCl4 pre valve closed
11/22/2010	2:04:54 PM	SiCl4 post valve closed
11/22/2010	2:04:54 PM	Bubbler valve closed
11/22/2010	2:04:54 PM	Main Vac valve opened
11/22/2010	2:04:54 PM	Bypass valve opened
11/22/2010	2:04:54 PM	Helium MFC set to  0.000000
11/22/2010	2:04:54 PM	H2 MFC set to  0.000000
11/22/2010	2:04:54 PM	BCl3 MFC set to  0.000000
11/22/2010	2:04:54 PM	PHl3 MFC set to  0.000000
11/22/2010	2:04:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:04:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:04:54 PM	Tube furnace set to 0
11/22/2010	2:05:54 PM	H2 valve closed
11/22/2010	2:05:54 PM	BCl3 valve closed
11/22/2010	2:05:54 PM	PH3 valve closed
11/22/2010	2:05:54 PM	SiCl4 pre valve closed
11/22/2010	2:05:54 PM	SiCl4 post valve closed
11/22/2010	2:05:54 PM	Bubbler valve closed
11/22/2010	2:05:54 PM	Helium valve opened
11/22/2010	2:05:54 PM	Main Vac valve opened
11/22/2010	2:05:54 PM	Bypass valve opened
11/22/2010	2:05:54 PM	Helium MFC set to  100.000000
11/22/2010	2:05:54 PM	H2 MFC set to  0.000000
11/22/2010	2:05:54 PM	BCl3 MFC set to  0.000000
11/22/2010	2:05:54 PM	PHl3 MFC set to  0.000000
11/22/2010	2:05:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:05:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:05:54 PM	Tube furnace set to 0
11/22/2010	2:06:55 PM	Helium valve closed
11/22/2010	2:06:55 PM	H2 valve closed
11/22/2010	2:06:55 PM	BCl3 valve closed
11/22/2010	2:06:55 PM	PH3 valve closed
11/22/2010	2:06:55 PM	SiCl4 pre valve closed
11/22/2010	2:06:55 PM	SiCl4 post valve closed
11/22/2010	2:06:55 PM	Bubbler valve closed
11/22/2010	2:06:55 PM	Main Vac valve opened
11/22/2010	2:06:55 PM	Bypass valve opened
11/22/2010	2:06:55 PM	Helium MFC set to  0.000000
11/22/2010	2:06:55 PM	H2 MFC set to  0.000000
11/22/2010	2:06:55 PM	BCl3 MFC set to  0.000000
11/22/2010	2:06:55 PM	PHl3 MFC set to  0.000000
11/22/2010	2:06:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:06:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:06:55 PM	Tube furnace set to 0
11/22/2010	2:07:55 PM	H2 valve closed
11/22/2010	2:07:55 PM	BCl3 valve closed
11/22/2010	2:07:55 PM	PH3 valve closed
11/22/2010	2:07:55 PM	SiCl4 pre valve closed
11/22/2010	2:07:55 PM	SiCl4 post valve closed
11/22/2010	2:07:55 PM	Bubbler valve closed
11/22/2010	2:07:55 PM	Helium valve opened
11/22/2010	2:07:55 PM	Main Vac valve opened
11/22/2010	2:07:55 PM	Bypass valve opened
11/22/2010	2:07:55 PM	Helium MFC set to  100.000000
11/22/2010	2:07:55 PM	H2 MFC set to  0.000000
11/22/2010	2:07:55 PM	BCl3 MFC set to  0.000000
11/22/2010	2:07:55 PM	PHl3 MFC set to  0.000000
11/22/2010	2:07:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:07:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:07:55 PM	Tube furnace set to 0
11/22/2010	2:08:02 PM	Helium valve closed
11/22/2010	2:08:02 PM	H2 valve closed
11/22/2010	2:08:02 PM	BCl3 valve closed
11/22/2010	2:08:02 PM	PH3 valve closed
11/22/2010	2:08:02 PM	SiCl4 pre valve closed
11/22/2010	2:08:02 PM	SiCl4 post valve closed
11/22/2010	2:08:02 PM	Bubbler valve closed
11/22/2010	2:08:02 PM	Main Vac valve opened
11/22/2010	2:08:02 PM	Bypass valve opened
11/22/2010	2:08:02 PM	Helium MFC set to  0.000000
11/22/2010	2:08:02 PM	H2 MFC set to  0.000000
11/22/2010	2:08:02 PM	BCl3 MFC set to  0.000000
11/22/2010	2:08:02 PM	PHl3 MFC set to  0.000000
11/22/2010	2:08:02 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:08:02 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:08:02 PM	Tube furnace set to 0
11/22/2010	2:08:03 PM	Run finished at 2:08 PM
11/22/2010	2:08:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	2:08:53 PM	Bypass valve closed
11/22/2010	2:08:54 PM	Main Vac valve closed
11/22/2010	2:09:09 PM	Helium MFC set to  100.000000
11/22/2010	2:09:10 PM	Helium valve opened
11/22/2010	2:09:23 PM	Helium valve closed
11/22/2010	2:09:27 PM	Bypass valve opened
11/22/2010	2:09:32 PM	Main Vac valve opened
11/22/2010	2:10:23 PM	Helium valve opened
11/22/2010	2:10:28 PM	Helium valve closed
11/22/2010	2:11:15 PM	Bypass valve closed
11/22/2010	2:11:16 PM	Main Vac valve closed
11/22/2010	2:11:24 PM	Bypass valve opened
11/22/2010	2:11:24 PM	Main Vac valve opened
11/22/2010	2:11:27 PM	Helium valve opened
11/22/2010	2:11:29 PM	Helium valve closed
11/22/2010	2:12:17 PM	Recipe started at 2:12 PM
11/22/2010	2:12:17 PM	Helium valve closed
11/22/2010	2:12:17 PM	BCl3 valve closed
11/22/2010	2:12:17 PM	PH3 valve closed
11/22/2010	2:12:17 PM	SiCl4 pre valve closed
11/22/2010	2:12:17 PM	SiCl4 post valve closed
11/22/2010	2:12:17 PM	Main Vac valve closed
11/22/2010	2:12:17 PM	Bypass valve closed
11/22/2010	2:12:17 PM	Bubbler valve closed
11/22/2010	2:12:17 PM	H2 valve opened
11/22/2010	2:12:17 PM	Helium MFC set to  0.000000
11/22/2010	2:12:17 PM	H2 MFC set to  500.000000
11/22/2010	2:12:17 PM	BCl3 MFC set to  0.000000
11/22/2010	2:12:17 PM	PHl3 MFC set to  0.000000
11/22/2010	2:12:17 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:12:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:12:17 PM	Tube furnace set to 0
11/22/2010	2:13:36 PM	Helium valve closed
11/22/2010	2:13:36 PM	BCl3 valve closed
11/22/2010	2:13:36 PM	PH3 valve closed
11/22/2010	2:13:36 PM	SiCl4 pre valve closed
11/22/2010	2:13:36 PM	SiCl4 post valve closed
11/22/2010	2:13:36 PM	Main Vac valve closed
11/22/2010	2:13:36 PM	Bypass valve closed
11/22/2010	2:13:36 PM	H2 valve opened
11/22/2010	2:13:36 PM	Bubbler valve opened
11/22/2010	2:13:36 PM	Helium MFC set to  0.000000
11/22/2010	2:13:36 PM	H2 MFC set to  500.000000
11/22/2010	2:13:36 PM	BCl3 MFC set to  0.000000
11/22/2010	2:13:36 PM	PHl3 MFC set to  0.000000
11/22/2010	2:13:36 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:13:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:13:36 PM	Tube furnace set to 1000
11/22/2010	2:33:36 PM	Helium valve closed
11/22/2010	2:33:36 PM	PH3 valve closed
11/22/2010	2:33:36 PM	Main Vac valve closed
11/22/2010	2:33:36 PM	Bypass valve closed
11/22/2010	2:33:36 PM	H2 valve opened
11/22/2010	2:33:36 PM	BCl3 valve opened
11/22/2010	2:33:36 PM	SiCl4 pre valve opened
11/22/2010	2:33:36 PM	SiCl4 post valve opened
11/22/2010	2:33:36 PM	Bubbler valve opened
11/22/2010	2:33:36 PM	Helium MFC set to  0.000000
11/22/2010	2:33:36 PM	H2 MFC set to  500.000000
11/22/2010	2:33:36 PM	BCl3 MFC set to  12.000000
11/22/2010	2:33:36 PM	PHl3 MFC set to  0.000000
11/22/2010	2:33:36 PM	SiCl4 MFC set to  50.000000
11/22/2010	2:33:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:33:36 PM	Tube furnace set to 1000
11/22/2010	2:48:36 PM	H2 valve closed
11/22/2010	2:48:36 PM	BCl3 valve closed
11/22/2010	2:48:36 PM	PH3 valve closed
11/22/2010	2:48:36 PM	SiCl4 pre valve closed
11/22/2010	2:48:36 PM	SiCl4 post valve closed
11/22/2010	2:48:36 PM	Main Vac valve closed
11/22/2010	2:48:36 PM	Bypass valve closed
11/22/2010	2:48:36 PM	Helium valve opened
11/22/2010	2:48:36 PM	Bubbler valve opened
11/22/2010	2:48:36 PM	Helium MFC set to  500.000000
11/22/2010	2:48:36 PM	H2 MFC set to  0.000000
11/22/2010	2:48:36 PM	BCl3 MFC set to  0.000000
11/22/2010	2:48:36 PM	PHl3 MFC set to  0.000000
11/22/2010	2:48:36 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:48:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:48:36 PM	Tube furnace set to 950
11/22/2010	2:53:36 PM	H2 valve closed
11/22/2010	2:53:36 PM	BCl3 valve closed
11/22/2010	2:53:36 PM	PH3 valve closed
11/22/2010	2:53:36 PM	SiCl4 pre valve closed
11/22/2010	2:53:36 PM	SiCl4 post valve closed
11/22/2010	2:53:36 PM	Main Vac valve closed
11/22/2010	2:53:36 PM	Bypass valve closed
11/22/2010	2:53:36 PM	Helium valve opened
11/22/2010	2:53:36 PM	Bubbler valve opened
11/22/2010	2:53:36 PM	Helium MFC set to  500.000000
11/22/2010	2:53:36 PM	H2 MFC set to  0.000000
11/22/2010	2:53:36 PM	BCl3 MFC set to  0.000000
11/22/2010	2:53:36 PM	PHl3 MFC set to  0.000000
11/22/2010	2:53:36 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:53:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:53:36 PM	Tube furnace set to 900
11/22/2010	2:58:36 PM	H2 valve closed
11/22/2010	2:58:36 PM	BCl3 valve closed
11/22/2010	2:58:36 PM	PH3 valve closed
11/22/2010	2:58:36 PM	SiCl4 pre valve closed
11/22/2010	2:58:36 PM	SiCl4 post valve closed
11/22/2010	2:58:36 PM	Main Vac valve closed
11/22/2010	2:58:36 PM	Bypass valve closed
11/22/2010	2:58:36 PM	Helium valve opened
11/22/2010	2:58:36 PM	Bubbler valve opened
11/22/2010	2:58:36 PM	Helium MFC set to  500.000000
11/22/2010	2:58:36 PM	H2 MFC set to  0.000000
11/22/2010	2:58:36 PM	BCl3 MFC set to  0.000000
11/22/2010	2:58:36 PM	PHl3 MFC set to  0.000000
11/22/2010	2:58:36 PM	SiCl4 MFC set to  0.000000
11/22/2010	2:58:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	2:58:36 PM	Tube furnace set to 850
11/22/2010	3:03:36 PM	H2 valve closed
11/22/2010	3:03:36 PM	BCl3 valve closed
11/22/2010	3:03:36 PM	PH3 valve closed
11/22/2010	3:03:36 PM	SiCl4 pre valve closed
11/22/2010	3:03:36 PM	SiCl4 post valve closed
11/22/2010	3:03:36 PM	Main Vac valve closed
11/22/2010	3:03:36 PM	Bypass valve closed
11/22/2010	3:03:36 PM	Helium valve opened
11/22/2010	3:03:36 PM	Bubbler valve opened
11/22/2010	3:03:36 PM	Helium MFC set to  500.000000
11/22/2010	3:03:36 PM	H2 MFC set to  0.000000
11/22/2010	3:03:36 PM	BCl3 MFC set to  0.000000
11/22/2010	3:03:36 PM	PHl3 MFC set to  0.000000
11/22/2010	3:03:36 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:03:36 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:03:37 PM	Tube furnace set to 800
11/22/2010	3:08:37 PM	H2 valve closed
11/22/2010	3:08:37 PM	BCl3 valve closed
11/22/2010	3:08:37 PM	PH3 valve closed
11/22/2010	3:08:37 PM	SiCl4 pre valve closed
11/22/2010	3:08:37 PM	SiCl4 post valve closed
11/22/2010	3:08:37 PM	Main Vac valve closed
11/22/2010	3:08:37 PM	Bypass valve closed
11/22/2010	3:08:37 PM	Helium valve opened
11/22/2010	3:08:37 PM	Bubbler valve opened
11/22/2010	3:08:37 PM	Helium MFC set to  500.000000
11/22/2010	3:08:37 PM	H2 MFC set to  0.000000
11/22/2010	3:08:37 PM	BCl3 MFC set to  0.000000
11/22/2010	3:08:37 PM	PHl3 MFC set to  0.000000
11/22/2010	3:08:37 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:08:37 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:08:37 PM	Tube furnace set to 750
11/22/2010	3:13:37 PM	H2 valve closed
11/22/2010	3:13:37 PM	BCl3 valve closed
11/22/2010	3:13:37 PM	PH3 valve closed
11/22/2010	3:13:37 PM	SiCl4 pre valve closed
11/22/2010	3:13:37 PM	SiCl4 post valve closed
11/22/2010	3:13:37 PM	Main Vac valve closed
11/22/2010	3:13:37 PM	Bypass valve closed
11/22/2010	3:13:37 PM	Helium valve opened
11/22/2010	3:13:37 PM	Bubbler valve opened
11/22/2010	3:13:37 PM	Helium MFC set to  500.000000
11/22/2010	3:13:37 PM	H2 MFC set to  0.000000
11/22/2010	3:13:37 PM	BCl3 MFC set to  0.000000
11/22/2010	3:13:37 PM	PHl3 MFC set to  0.000000
11/22/2010	3:13:37 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:13:37 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:13:37 PM	Tube furnace set to 700
11/22/2010	3:18:37 PM	H2 valve closed
11/22/2010	3:18:37 PM	BCl3 valve closed
11/22/2010	3:18:37 PM	PH3 valve closed
11/22/2010	3:18:37 PM	SiCl4 pre valve closed
11/22/2010	3:18:37 PM	SiCl4 post valve closed
11/22/2010	3:18:37 PM	Main Vac valve closed
11/22/2010	3:18:37 PM	Bypass valve closed
11/22/2010	3:18:37 PM	Helium valve opened
11/22/2010	3:18:37 PM	Bubbler valve opened
11/22/2010	3:18:37 PM	Helium MFC set to  500.000000
11/22/2010	3:18:37 PM	H2 MFC set to  0.000000
11/22/2010	3:18:37 PM	BCl3 MFC set to  0.000000
11/22/2010	3:18:37 PM	PHl3 MFC set to  0.000000
11/22/2010	3:18:37 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:18:37 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:18:37 PM	Tube furnace set to 0
11/22/2010	3:38:37 PM	Helium valve closed
11/22/2010	3:38:37 PM	H2 valve closed
11/22/2010	3:38:37 PM	BCl3 valve closed
11/22/2010	3:38:37 PM	PH3 valve closed
11/22/2010	3:38:37 PM	SiCl4 pre valve closed
11/22/2010	3:38:37 PM	SiCl4 post valve closed
11/22/2010	3:38:37 PM	Main Vac valve closed
11/22/2010	3:38:37 PM	Bypass valve closed
11/22/2010	3:38:37 PM	Bubbler valve closed
11/22/2010	3:38:37 PM	Helium MFC set to  0.000000
11/22/2010	3:38:37 PM	H2 MFC set to  0.000000
11/22/2010	3:38:37 PM	BCl3 MFC set to  0.000000
11/22/2010	3:38:37 PM	PHl3 MFC set to  0.000000
11/22/2010	3:38:37 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:38:37 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:38:37 PM	Tube furnace set to 0
11/22/2010	3:38:38 PM	Run finished at 3:38 PM
11/22/2010	3:56:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	3:57:01 PM	Recipe started at 3:56 PM
11/22/2010	3:57:01 PM	Helium valve closed
11/22/2010	3:57:01 PM	H2 valve closed
11/22/2010	3:57:01 PM	BCl3 valve closed
11/22/2010	3:57:01 PM	PH3 valve closed
11/22/2010	3:57:01 PM	SiCl4 pre valve closed
11/22/2010	3:57:01 PM	SiCl4 post valve closed
11/22/2010	3:57:01 PM	Main Vac valve closed
11/22/2010	3:57:01 PM	Bubbler valve closed
11/22/2010	3:57:01 PM	Bypass valve opened
11/22/2010	3:57:01 PM	Helium MFC set to  0.000000
11/22/2010	3:57:01 PM	H2 MFC set to  0.000000
11/22/2010	3:57:01 PM	BCl3 MFC set to  0.000000
11/22/2010	3:57:01 PM	PHl3 MFC set to  0.000000
11/22/2010	3:57:01 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:57:01 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:57:01 PM	Tube furnace set to 0
11/22/2010	3:57:54 PM	Helium valve closed
11/22/2010	3:57:54 PM	H2 valve closed
11/22/2010	3:57:54 PM	BCl3 valve closed
11/22/2010	3:57:54 PM	PH3 valve closed
11/22/2010	3:57:54 PM	SiCl4 pre valve closed
11/22/2010	3:57:54 PM	SiCl4 post valve closed
11/22/2010	3:57:54 PM	Bubbler valve closed
11/22/2010	3:57:54 PM	Main Vac valve opened
11/22/2010	3:57:54 PM	Bypass valve opened
11/22/2010	3:57:54 PM	Helium MFC set to  0.000000
11/22/2010	3:57:54 PM	H2 MFC set to  0.000000
11/22/2010	3:57:54 PM	BCl3 MFC set to  0.000000
11/22/2010	3:57:54 PM	PHl3 MFC set to  0.000000
11/22/2010	3:57:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:57:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:57:55 PM	Tube furnace set to 0
11/22/2010	3:58:55 PM	H2 valve closed
11/22/2010	3:58:55 PM	BCl3 valve closed
11/22/2010	3:58:55 PM	PH3 valve closed
11/22/2010	3:58:55 PM	SiCl4 pre valve closed
11/22/2010	3:58:55 PM	SiCl4 post valve closed
11/22/2010	3:58:55 PM	Bubbler valve closed
11/22/2010	3:58:55 PM	Helium valve opened
11/22/2010	3:58:55 PM	Main Vac valve opened
11/22/2010	3:58:55 PM	Bypass valve opened
11/22/2010	3:58:55 PM	Helium MFC set to  100.000000
11/22/2010	3:58:55 PM	H2 MFC set to  0.000000
11/22/2010	3:58:55 PM	BCl3 MFC set to  0.000000
11/22/2010	3:58:55 PM	PHl3 MFC set to  0.000000
11/22/2010	3:58:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:58:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:58:55 PM	Tube furnace set to 0
11/22/2010	3:59:55 PM	Helium valve closed
11/22/2010	3:59:55 PM	H2 valve closed
11/22/2010	3:59:55 PM	BCl3 valve closed
11/22/2010	3:59:55 PM	PH3 valve closed
11/22/2010	3:59:55 PM	SiCl4 pre valve closed
11/22/2010	3:59:55 PM	SiCl4 post valve closed
11/22/2010	3:59:55 PM	Bubbler valve closed
11/22/2010	3:59:55 PM	Main Vac valve opened
11/22/2010	3:59:55 PM	Bypass valve opened
11/22/2010	3:59:55 PM	Helium MFC set to  0.000000
11/22/2010	3:59:55 PM	H2 MFC set to  0.000000
11/22/2010	3:59:55 PM	BCl3 MFC set to  0.000000
11/22/2010	3:59:55 PM	PHl3 MFC set to  0.000000
11/22/2010	3:59:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	3:59:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	3:59:55 PM	Tube furnace set to 0
11/22/2010	4:00:55 PM	H2 valve closed
11/22/2010	4:00:55 PM	BCl3 valve closed
11/22/2010	4:00:55 PM	PH3 valve closed
11/22/2010	4:00:55 PM	SiCl4 pre valve closed
11/22/2010	4:00:55 PM	SiCl4 post valve closed
11/22/2010	4:00:55 PM	Bubbler valve closed
11/22/2010	4:00:55 PM	Helium valve opened
11/22/2010	4:00:55 PM	Main Vac valve opened
11/22/2010	4:00:55 PM	Bypass valve opened
11/22/2010	4:00:55 PM	Helium MFC set to  100.000000
11/22/2010	4:00:55 PM	H2 MFC set to  0.000000
11/22/2010	4:00:55 PM	BCl3 MFC set to  0.000000
11/22/2010	4:00:55 PM	PHl3 MFC set to  0.000000
11/22/2010	4:00:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:00:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:00:55 PM	Tube furnace set to 0
11/22/2010	4:01:55 PM	Helium valve closed
11/22/2010	4:01:55 PM	H2 valve closed
11/22/2010	4:01:55 PM	BCl3 valve closed
11/22/2010	4:01:55 PM	PH3 valve closed
11/22/2010	4:01:55 PM	SiCl4 pre valve closed
11/22/2010	4:01:55 PM	SiCl4 post valve closed
11/22/2010	4:01:55 PM	Bubbler valve closed
11/22/2010	4:01:55 PM	Main Vac valve opened
11/22/2010	4:01:55 PM	Bypass valve opened
11/22/2010	4:01:55 PM	Helium MFC set to  0.000000
11/22/2010	4:01:55 PM	H2 MFC set to  0.000000
11/22/2010	4:01:55 PM	BCl3 MFC set to  0.000000
11/22/2010	4:01:55 PM	PHl3 MFC set to  0.000000
11/22/2010	4:01:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:01:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:01:55 PM	Tube furnace set to 0
11/22/2010	4:02:55 PM	H2 valve closed
11/22/2010	4:02:55 PM	BCl3 valve closed
11/22/2010	4:02:55 PM	PH3 valve closed
11/22/2010	4:02:55 PM	SiCl4 pre valve closed
11/22/2010	4:02:55 PM	SiCl4 post valve closed
11/22/2010	4:02:55 PM	Bubbler valve closed
11/22/2010	4:02:55 PM	Helium valve opened
11/22/2010	4:02:55 PM	Main Vac valve opened
11/22/2010	4:02:55 PM	Bypass valve opened
11/22/2010	4:02:55 PM	Helium MFC set to  100.000000
11/22/2010	4:02:55 PM	H2 MFC set to  0.000000
11/22/2010	4:02:55 PM	BCl3 MFC set to  0.000000
11/22/2010	4:02:55 PM	PHl3 MFC set to  0.000000
11/22/2010	4:02:55 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:02:55 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:02:55 PM	Tube furnace set to 0
11/22/2010	4:03:56 PM	Helium valve closed
11/22/2010	4:03:56 PM	H2 valve closed
11/22/2010	4:03:56 PM	BCl3 valve closed
11/22/2010	4:03:56 PM	PH3 valve closed
11/22/2010	4:03:56 PM	SiCl4 pre valve closed
11/22/2010	4:03:56 PM	SiCl4 post valve closed
11/22/2010	4:03:56 PM	Bubbler valve closed
11/22/2010	4:03:56 PM	Main Vac valve opened
11/22/2010	4:03:56 PM	Bypass valve opened
11/22/2010	4:03:56 PM	Helium MFC set to  0.000000
11/22/2010	4:03:56 PM	H2 MFC set to  0.000000
11/22/2010	4:03:56 PM	BCl3 MFC set to  0.000000
11/22/2010	4:03:56 PM	PHl3 MFC set to  0.000000
11/22/2010	4:03:56 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:03:56 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:03:56 PM	Tube furnace set to 0
11/22/2010	4:04:56 PM	H2 valve closed
11/22/2010	4:04:56 PM	BCl3 valve closed
11/22/2010	4:04:56 PM	PH3 valve closed
11/22/2010	4:04:56 PM	SiCl4 pre valve closed
11/22/2010	4:04:56 PM	SiCl4 post valve closed
11/22/2010	4:04:56 PM	Bubbler valve closed
11/22/2010	4:04:56 PM	Helium valve opened
11/22/2010	4:04:56 PM	Main Vac valve opened
11/22/2010	4:04:56 PM	Bypass valve opened
11/22/2010	4:04:56 PM	Helium MFC set to  100.000000
11/22/2010	4:04:56 PM	H2 MFC set to  0.000000
11/22/2010	4:04:56 PM	BCl3 MFC set to  0.000000
11/22/2010	4:04:56 PM	PHl3 MFC set to  0.000000
11/22/2010	4:04:56 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:04:56 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:04:56 PM	Tube furnace set to 0
11/22/2010	4:05:56 PM	Helium valve closed
11/22/2010	4:05:56 PM	H2 valve closed
11/22/2010	4:05:56 PM	BCl3 valve closed
11/22/2010	4:05:56 PM	PH3 valve closed
11/22/2010	4:05:56 PM	SiCl4 pre valve closed
11/22/2010	4:05:56 PM	SiCl4 post valve closed
11/22/2010	4:05:56 PM	Bubbler valve closed
11/22/2010	4:05:56 PM	Main Vac valve opened
11/22/2010	4:05:56 PM	Bypass valve opened
11/22/2010	4:05:56 PM	Helium MFC set to  0.000000
11/22/2010	4:05:56 PM	H2 MFC set to  0.000000
11/22/2010	4:05:56 PM	BCl3 MFC set to  0.000000
11/22/2010	4:05:56 PM	PHl3 MFC set to  0.000000
11/22/2010	4:05:56 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:05:56 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:05:56 PM	Tube furnace set to 0
11/22/2010	4:06:56 PM	H2 valve closed
11/22/2010	4:06:56 PM	BCl3 valve closed
11/22/2010	4:06:56 PM	PH3 valve closed
11/22/2010	4:06:56 PM	SiCl4 pre valve closed
11/22/2010	4:06:56 PM	SiCl4 post valve closed
11/22/2010	4:06:56 PM	Bubbler valve closed
11/22/2010	4:06:56 PM	Helium valve opened
11/22/2010	4:06:56 PM	Main Vac valve opened
11/22/2010	4:06:56 PM	Bypass valve opened
11/22/2010	4:06:56 PM	Helium MFC set to  100.000000
11/22/2010	4:06:56 PM	H2 MFC set to  0.000000
11/22/2010	4:06:56 PM	BCl3 MFC set to  0.000000
11/22/2010	4:06:56 PM	PHl3 MFC set to  0.000000
11/22/2010	4:06:56 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:06:56 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:06:56 PM	Tube furnace set to 0
11/22/2010	4:07:56 PM	Helium valve closed
11/22/2010	4:07:56 PM	H2 valve closed
11/22/2010	4:07:56 PM	BCl3 valve closed
11/22/2010	4:07:56 PM	PH3 valve closed
11/22/2010	4:07:56 PM	SiCl4 pre valve closed
11/22/2010	4:07:56 PM	SiCl4 post valve closed
11/22/2010	4:07:56 PM	Bubbler valve closed
11/22/2010	4:07:56 PM	Main Vac valve opened
11/22/2010	4:07:56 PM	Bypass valve opened
11/22/2010	4:07:56 PM	Helium MFC set to  0.000000
11/22/2010	4:07:56 PM	H2 MFC set to  0.000000
11/22/2010	4:07:56 PM	BCl3 MFC set to  0.000000
11/22/2010	4:07:56 PM	PHl3 MFC set to  0.000000
11/22/2010	4:07:56 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:07:56 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:07:56 PM	Tube furnace set to 0
11/22/2010	4:08:56 PM	H2 valve closed
11/22/2010	4:08:56 PM	BCl3 valve closed
11/22/2010	4:08:56 PM	PH3 valve closed
11/22/2010	4:08:56 PM	SiCl4 pre valve closed
11/22/2010	4:08:56 PM	SiCl4 post valve closed
11/22/2010	4:08:56 PM	Bubbler valve closed
11/22/2010	4:08:57 PM	Helium valve opened
11/22/2010	4:08:57 PM	Main Vac valve opened
11/22/2010	4:08:57 PM	Bypass valve opened
11/22/2010	4:08:57 PM	Helium MFC set to  100.000000
11/22/2010	4:08:57 PM	H2 MFC set to  0.000000
11/22/2010	4:08:57 PM	BCl3 MFC set to  0.000000
11/22/2010	4:08:57 PM	PHl3 MFC set to  0.000000
11/22/2010	4:08:57 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:08:57 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:08:57 PM	Tube furnace set to 0
11/22/2010	4:09:52 PM	Helium valve closed
11/22/2010	4:09:52 PM	H2 valve closed
11/22/2010	4:09:52 PM	BCl3 valve closed
11/22/2010	4:09:52 PM	PH3 valve closed
11/22/2010	4:09:52 PM	SiCl4 pre valve closed
11/22/2010	4:09:52 PM	SiCl4 post valve closed
11/22/2010	4:09:52 PM	Bubbler valve closed
11/22/2010	4:09:52 PM	Main Vac valve opened
11/22/2010	4:09:52 PM	Bypass valve opened
11/22/2010	4:09:52 PM	Helium MFC set to  0.000000
11/22/2010	4:09:52 PM	H2 MFC set to  0.000000
11/22/2010	4:09:52 PM	BCl3 MFC set to  0.000000
11/22/2010	4:09:52 PM	PHl3 MFC set to  0.000000
11/22/2010	4:09:52 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:09:52 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:09:52 PM	Tube furnace set to 0
11/22/2010	4:10:52 PM	H2 valve closed
11/22/2010	4:10:52 PM	BCl3 valve closed
11/22/2010	4:10:52 PM	PH3 valve closed
11/22/2010	4:10:52 PM	SiCl4 pre valve closed
11/22/2010	4:10:52 PM	SiCl4 post valve closed
11/22/2010	4:10:52 PM	Bubbler valve closed
11/22/2010	4:10:52 PM	Helium valve opened
11/22/2010	4:10:52 PM	Main Vac valve opened
11/22/2010	4:10:52 PM	Bypass valve opened
11/22/2010	4:10:52 PM	Helium MFC set to  100.000000
11/22/2010	4:10:52 PM	H2 MFC set to  0.000000
11/22/2010	4:10:52 PM	BCl3 MFC set to  0.000000
11/22/2010	4:10:52 PM	PHl3 MFC set to  0.000000
11/22/2010	4:10:52 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:10:52 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:10:52 PM	Tube furnace set to 0
11/22/2010	4:11:52 PM	Helium valve closed
11/22/2010	4:11:52 PM	H2 valve closed
11/22/2010	4:11:52 PM	BCl3 valve closed
11/22/2010	4:11:52 PM	PH3 valve closed
11/22/2010	4:11:52 PM	SiCl4 pre valve closed
11/22/2010	4:11:52 PM	SiCl4 post valve closed
11/22/2010	4:11:52 PM	Bubbler valve closed
11/22/2010	4:11:52 PM	Main Vac valve opened
11/22/2010	4:11:52 PM	Bypass valve opened
11/22/2010	4:11:52 PM	Helium MFC set to  0.000000
11/22/2010	4:11:52 PM	H2 MFC set to  0.000000
11/22/2010	4:11:52 PM	BCl3 MFC set to  0.000000
11/22/2010	4:11:52 PM	PHl3 MFC set to  0.000000
11/22/2010	4:11:52 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:11:52 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:11:53 PM	Tube furnace set to 0
11/22/2010	4:12:53 PM	H2 valve closed
11/22/2010	4:12:53 PM	BCl3 valve closed
11/22/2010	4:12:53 PM	PH3 valve closed
11/22/2010	4:12:53 PM	SiCl4 pre valve closed
11/22/2010	4:12:53 PM	SiCl4 post valve closed
11/22/2010	4:12:53 PM	Bubbler valve closed
11/22/2010	4:12:53 PM	Helium valve opened
11/22/2010	4:12:53 PM	Main Vac valve opened
11/22/2010	4:12:53 PM	Bypass valve opened
11/22/2010	4:12:53 PM	Helium MFC set to  100.000000
11/22/2010	4:12:53 PM	H2 MFC set to  0.000000
11/22/2010	4:12:53 PM	BCl3 MFC set to  0.000000
11/22/2010	4:12:53 PM	PHl3 MFC set to  0.000000
11/22/2010	4:12:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:12:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:12:53 PM	Tube furnace set to 0
11/22/2010	4:13:53 PM	Helium valve closed
11/22/2010	4:13:53 PM	H2 valve closed
11/22/2010	4:13:53 PM	BCl3 valve closed
11/22/2010	4:13:53 PM	PH3 valve closed
11/22/2010	4:13:53 PM	SiCl4 pre valve closed
11/22/2010	4:13:53 PM	SiCl4 post valve closed
11/22/2010	4:13:53 PM	Bubbler valve closed
11/22/2010	4:13:53 PM	Main Vac valve opened
11/22/2010	4:13:53 PM	Bypass valve opened
11/22/2010	4:13:53 PM	Helium MFC set to  0.000000
11/22/2010	4:13:53 PM	H2 MFC set to  0.000000
11/22/2010	4:13:53 PM	BCl3 MFC set to  0.000000
11/22/2010	4:13:53 PM	PHl3 MFC set to  0.000000
11/22/2010	4:13:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:13:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:13:53 PM	Tube furnace set to 0
11/22/2010	4:14:53 PM	H2 valve closed
11/22/2010	4:14:53 PM	BCl3 valve closed
11/22/2010	4:14:53 PM	PH3 valve closed
11/22/2010	4:14:53 PM	SiCl4 pre valve closed
11/22/2010	4:14:53 PM	SiCl4 post valve closed
11/22/2010	4:14:53 PM	Bubbler valve closed
11/22/2010	4:14:53 PM	Helium valve opened
11/22/2010	4:14:53 PM	Main Vac valve opened
11/22/2010	4:14:53 PM	Bypass valve opened
11/22/2010	4:14:53 PM	Helium MFC set to  100.000000
11/22/2010	4:14:53 PM	H2 MFC set to  0.000000
11/22/2010	4:14:53 PM	BCl3 MFC set to  0.000000
11/22/2010	4:14:53 PM	PHl3 MFC set to  0.000000
11/22/2010	4:14:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:14:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:14:53 PM	Tube furnace set to 0
11/22/2010	4:15:53 PM	Helium valve closed
11/22/2010	4:15:53 PM	H2 valve closed
11/22/2010	4:15:53 PM	BCl3 valve closed
11/22/2010	4:15:53 PM	PH3 valve closed
11/22/2010	4:15:53 PM	SiCl4 pre valve closed
11/22/2010	4:15:53 PM	SiCl4 post valve closed
11/22/2010	4:15:53 PM	Bubbler valve closed
11/22/2010	4:15:53 PM	Main Vac valve opened
11/22/2010	4:15:53 PM	Bypass valve opened
11/22/2010	4:15:53 PM	Helium MFC set to  0.000000
11/22/2010	4:15:53 PM	H2 MFC set to  0.000000
11/22/2010	4:15:53 PM	BCl3 MFC set to  0.000000
11/22/2010	4:15:53 PM	PHl3 MFC set to  0.000000
11/22/2010	4:15:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:15:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:15:53 PM	Tube furnace set to 0
11/22/2010	4:16:53 PM	H2 valve closed
11/22/2010	4:16:53 PM	BCl3 valve closed
11/22/2010	4:16:53 PM	PH3 valve closed
11/22/2010	4:16:53 PM	SiCl4 pre valve closed
11/22/2010	4:16:53 PM	SiCl4 post valve closed
11/22/2010	4:16:53 PM	Bubbler valve closed
11/22/2010	4:16:53 PM	Helium valve opened
11/22/2010	4:16:53 PM	Main Vac valve opened
11/22/2010	4:16:53 PM	Bypass valve opened
11/22/2010	4:16:53 PM	Helium MFC set to  100.000000
11/22/2010	4:16:53 PM	H2 MFC set to  0.000000
11/22/2010	4:16:53 PM	BCl3 MFC set to  0.000000
11/22/2010	4:16:53 PM	PHl3 MFC set to  0.000000
11/22/2010	4:16:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:16:53 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:16:53 PM	Tube furnace set to 0
11/22/2010	4:17:54 PM	Helium valve closed
11/22/2010	4:17:54 PM	H2 valve closed
11/22/2010	4:17:54 PM	BCl3 valve closed
11/22/2010	4:17:54 PM	PH3 valve closed
11/22/2010	4:17:54 PM	SiCl4 pre valve closed
11/22/2010	4:17:54 PM	SiCl4 post valve closed
11/22/2010	4:17:54 PM	Bubbler valve closed
11/22/2010	4:17:54 PM	Main Vac valve opened
11/22/2010	4:17:54 PM	Bypass valve opened
11/22/2010	4:17:54 PM	Helium MFC set to  0.000000
11/22/2010	4:17:54 PM	H2 MFC set to  0.000000
11/22/2010	4:17:54 PM	BCl3 MFC set to  0.000000
11/22/2010	4:17:54 PM	PHl3 MFC set to  0.000000
11/22/2010	4:17:54 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:17:54 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:17:54 PM	Tube furnace set to 0
11/22/2010	4:17:55 PM	Run finished at 4:17 PM
11/22/2010	4:17:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	4:46:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	4:46:38 PM	Recipe started at 4:46 PM
11/22/2010	4:46:38 PM	Helium valve closed
11/22/2010	4:46:38 PM	H2 valve closed
11/22/2010	4:46:38 PM	BCl3 valve closed
11/22/2010	4:46:38 PM	PH3 valve closed
11/22/2010	4:46:38 PM	SiCl4 pre valve closed
11/22/2010	4:46:38 PM	SiCl4 post valve closed
11/22/2010	4:46:38 PM	Main Vac valve closed
11/22/2010	4:46:38 PM	Bubbler valve closed
11/22/2010	4:46:38 PM	Bypass valve opened
11/22/2010	4:46:38 PM	Helium MFC set to  0.000000
11/22/2010	4:46:38 PM	H2 MFC set to  0.000000
11/22/2010	4:46:38 PM	BCl3 MFC set to  0.000000
11/22/2010	4:46:38 PM	PHl3 MFC set to  0.000000
11/22/2010	4:46:38 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:46:38 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:46:38 PM	Tube furnace set to 0
11/22/2010	4:46:38 PM	Helium valve closed
11/22/2010	4:46:38 PM	H2 valve closed
11/22/2010	4:46:38 PM	BCl3 valve closed
11/22/2010	4:46:38 PM	PH3 valve closed
11/22/2010	4:46:38 PM	SiCl4 pre valve closed
11/22/2010	4:46:38 PM	SiCl4 post valve closed
11/22/2010	4:46:38 PM	Bubbler valve closed
11/22/2010	4:46:38 PM	Main Vac valve opened
11/22/2010	4:46:38 PM	Bypass valve opened
11/22/2010	4:46:38 PM	Helium MFC set to  0.000000
11/22/2010	4:46:38 PM	H2 MFC set to  0.000000
11/22/2010	4:46:38 PM	BCl3 MFC set to  0.000000
11/22/2010	4:46:38 PM	PHl3 MFC set to  0.000000
11/22/2010	4:46:38 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:46:38 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:46:38 PM	Tube furnace set to 0
11/22/2010	4:47:38 PM	H2 valve closed
11/22/2010	4:47:38 PM	BCl3 valve closed
11/22/2010	4:47:38 PM	PH3 valve closed
11/22/2010	4:47:38 PM	SiCl4 pre valve closed
11/22/2010	4:47:38 PM	SiCl4 post valve closed
11/22/2010	4:47:38 PM	Bubbler valve closed
11/22/2010	4:47:38 PM	Helium valve opened
11/22/2010	4:47:38 PM	Main Vac valve opened
11/22/2010	4:47:38 PM	Bypass valve opened
11/22/2010	4:47:38 PM	Helium MFC set to  100.000000
11/22/2010	4:47:38 PM	H2 MFC set to  0.000000
11/22/2010	4:47:38 PM	BCl3 MFC set to  0.000000
11/22/2010	4:47:38 PM	PHl3 MFC set to  0.000000
11/22/2010	4:47:38 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:47:38 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:47:38 PM	Tube furnace set to 0
11/22/2010	4:48:38 PM	Helium valve closed
11/22/2010	4:48:38 PM	H2 valve closed
11/22/2010	4:48:39 PM	BCl3 valve closed
11/22/2010	4:48:39 PM	PH3 valve closed
11/22/2010	4:48:39 PM	SiCl4 pre valve closed
11/22/2010	4:48:39 PM	SiCl4 post valve closed
11/22/2010	4:48:39 PM	Bubbler valve closed
11/22/2010	4:48:39 PM	Main Vac valve opened
11/22/2010	4:48:39 PM	Bypass valve opened
11/22/2010	4:48:39 PM	Helium MFC set to  0.000000
11/22/2010	4:48:39 PM	H2 MFC set to  0.000000
11/22/2010	4:48:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:48:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:48:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:48:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:48:39 PM	Tube furnace set to 0
11/22/2010	4:49:39 PM	H2 valve closed
11/22/2010	4:49:39 PM	BCl3 valve closed
11/22/2010	4:49:39 PM	PH3 valve closed
11/22/2010	4:49:39 PM	SiCl4 pre valve closed
11/22/2010	4:49:39 PM	SiCl4 post valve closed
11/22/2010	4:49:39 PM	Bubbler valve closed
11/22/2010	4:49:39 PM	Helium valve opened
11/22/2010	4:49:39 PM	Main Vac valve opened
11/22/2010	4:49:39 PM	Bypass valve opened
11/22/2010	4:49:39 PM	Helium MFC set to  100.000000
11/22/2010	4:49:39 PM	H2 MFC set to  0.000000
11/22/2010	4:49:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:49:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:49:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:49:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:49:39 PM	Tube furnace set to 0
11/22/2010	4:50:39 PM	Helium valve closed
11/22/2010	4:50:39 PM	H2 valve closed
11/22/2010	4:50:39 PM	BCl3 valve closed
11/22/2010	4:50:39 PM	PH3 valve closed
11/22/2010	4:50:39 PM	SiCl4 pre valve closed
11/22/2010	4:50:39 PM	SiCl4 post valve closed
11/22/2010	4:50:39 PM	Bubbler valve closed
11/22/2010	4:50:39 PM	Main Vac valve opened
11/22/2010	4:50:39 PM	Bypass valve opened
11/22/2010	4:50:39 PM	Helium MFC set to  0.000000
11/22/2010	4:50:39 PM	H2 MFC set to  0.000000
11/22/2010	4:50:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:50:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:50:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:50:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:50:39 PM	Tube furnace set to 0
11/22/2010	4:51:39 PM	H2 valve closed
11/22/2010	4:51:39 PM	BCl3 valve closed
11/22/2010	4:51:39 PM	PH3 valve closed
11/22/2010	4:51:39 PM	SiCl4 pre valve closed
11/22/2010	4:51:39 PM	SiCl4 post valve closed
11/22/2010	4:51:39 PM	Bubbler valve closed
11/22/2010	4:51:39 PM	Helium valve opened
11/22/2010	4:51:39 PM	Main Vac valve opened
11/22/2010	4:51:39 PM	Bypass valve opened
11/22/2010	4:51:39 PM	Helium MFC set to  100.000000
11/22/2010	4:51:39 PM	H2 MFC set to  0.000000
11/22/2010	4:51:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:51:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:51:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:51:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:51:39 PM	Tube furnace set to 0
11/22/2010	4:52:39 PM	Helium valve closed
11/22/2010	4:52:39 PM	H2 valve closed
11/22/2010	4:52:39 PM	BCl3 valve closed
11/22/2010	4:52:39 PM	PH3 valve closed
11/22/2010	4:52:39 PM	SiCl4 pre valve closed
11/22/2010	4:52:39 PM	SiCl4 post valve closed
11/22/2010	4:52:39 PM	Bubbler valve closed
11/22/2010	4:52:39 PM	Main Vac valve opened
11/22/2010	4:52:39 PM	Bypass valve opened
11/22/2010	4:52:39 PM	Helium MFC set to  0.000000
11/22/2010	4:52:39 PM	H2 MFC set to  0.000000
11/22/2010	4:52:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:52:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:52:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:52:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:52:39 PM	Tube furnace set to 0
11/22/2010	4:53:39 PM	H2 valve closed
11/22/2010	4:53:39 PM	BCl3 valve closed
11/22/2010	4:53:39 PM	PH3 valve closed
11/22/2010	4:53:39 PM	SiCl4 pre valve closed
11/22/2010	4:53:39 PM	SiCl4 post valve closed
11/22/2010	4:53:39 PM	Bubbler valve closed
11/22/2010	4:53:39 PM	Helium valve opened
11/22/2010	4:53:39 PM	Main Vac valve opened
11/22/2010	4:53:39 PM	Bypass valve opened
11/22/2010	4:53:39 PM	Helium MFC set to  100.000000
11/22/2010	4:53:39 PM	H2 MFC set to  0.000000
11/22/2010	4:53:39 PM	BCl3 MFC set to  0.000000
11/22/2010	4:53:39 PM	PHl3 MFC set to  0.000000
11/22/2010	4:53:39 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:53:39 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:53:40 PM	Tube furnace set to 0
11/22/2010	4:54:40 PM	Helium valve closed
11/22/2010	4:54:40 PM	H2 valve closed
11/22/2010	4:54:40 PM	BCl3 valve closed
11/22/2010	4:54:40 PM	PH3 valve closed
11/22/2010	4:54:40 PM	SiCl4 pre valve closed
11/22/2010	4:54:40 PM	SiCl4 post valve closed
11/22/2010	4:54:40 PM	Bubbler valve closed
11/22/2010	4:54:40 PM	Main Vac valve opened
11/22/2010	4:54:40 PM	Bypass valve opened
11/22/2010	4:54:40 PM	Helium MFC set to  0.000000
11/22/2010	4:54:40 PM	H2 MFC set to  0.000000
11/22/2010	4:54:40 PM	BCl3 MFC set to  0.000000
11/22/2010	4:54:40 PM	PHl3 MFC set to  0.000000
11/22/2010	4:54:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:54:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:54:40 PM	Tube furnace set to 0
11/22/2010	4:55:40 PM	H2 valve closed
11/22/2010	4:55:40 PM	BCl3 valve closed
11/22/2010	4:55:40 PM	PH3 valve closed
11/22/2010	4:55:40 PM	SiCl4 pre valve closed
11/22/2010	4:55:40 PM	SiCl4 post valve closed
11/22/2010	4:55:40 PM	Bubbler valve closed
11/22/2010	4:55:40 PM	Helium valve opened
11/22/2010	4:55:40 PM	Main Vac valve opened
11/22/2010	4:55:40 PM	Bypass valve opened
11/22/2010	4:55:40 PM	Helium MFC set to  100.000000
11/22/2010	4:55:40 PM	H2 MFC set to  0.000000
11/22/2010	4:55:40 PM	BCl3 MFC set to  0.000000
11/22/2010	4:55:40 PM	PHl3 MFC set to  0.000000
11/22/2010	4:55:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:55:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:55:40 PM	Tube furnace set to 0
11/22/2010	4:56:40 PM	Helium valve closed
11/22/2010	4:56:40 PM	H2 valve closed
11/22/2010	4:56:40 PM	BCl3 valve closed
11/22/2010	4:56:40 PM	PH3 valve closed
11/22/2010	4:56:40 PM	SiCl4 pre valve closed
11/22/2010	4:56:40 PM	SiCl4 post valve closed
11/22/2010	4:56:40 PM	Bubbler valve closed
11/22/2010	4:56:40 PM	Main Vac valve opened
11/22/2010	4:56:40 PM	Bypass valve opened
11/22/2010	4:56:40 PM	Helium MFC set to  0.000000
11/22/2010	4:56:40 PM	H2 MFC set to  0.000000
11/22/2010	4:56:40 PM	BCl3 MFC set to  0.000000
11/22/2010	4:56:40 PM	PHl3 MFC set to  0.000000
11/22/2010	4:56:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:56:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:56:40 PM	Tube furnace set to 0
11/22/2010	4:57:40 PM	H2 valve closed
11/22/2010	4:57:40 PM	BCl3 valve closed
11/22/2010	4:57:40 PM	PH3 valve closed
11/22/2010	4:57:40 PM	SiCl4 pre valve closed
11/22/2010	4:57:40 PM	SiCl4 post valve closed
11/22/2010	4:57:40 PM	Bubbler valve closed
11/22/2010	4:57:40 PM	Helium valve opened
11/22/2010	4:57:40 PM	Main Vac valve opened
11/22/2010	4:57:40 PM	Bypass valve opened
11/22/2010	4:57:40 PM	Helium MFC set to  100.000000
11/22/2010	4:57:40 PM	H2 MFC set to  0.000000
11/22/2010	4:57:40 PM	BCl3 MFC set to  0.000000
11/22/2010	4:57:40 PM	PHl3 MFC set to  0.000000
11/22/2010	4:57:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:57:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:57:40 PM	Tube furnace set to 0
11/22/2010	4:58:40 PM	Helium valve closed
11/22/2010	4:58:40 PM	H2 valve closed
11/22/2010	4:58:40 PM	BCl3 valve closed
11/22/2010	4:58:40 PM	PH3 valve closed
11/22/2010	4:58:40 PM	SiCl4 pre valve closed
11/22/2010	4:58:40 PM	SiCl4 post valve closed
11/22/2010	4:58:40 PM	Bubbler valve closed
11/22/2010	4:58:40 PM	Main Vac valve opened
11/22/2010	4:58:40 PM	Bypass valve opened
11/22/2010	4:58:40 PM	Helium MFC set to  0.000000
11/22/2010	4:58:40 PM	H2 MFC set to  0.000000
11/22/2010	4:58:40 PM	BCl3 MFC set to  0.000000
11/22/2010	4:58:40 PM	PHl3 MFC set to  0.000000
11/22/2010	4:58:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:58:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:58:41 PM	Tube furnace set to 0
11/22/2010	4:59:41 PM	H2 valve closed
11/22/2010	4:59:41 PM	BCl3 valve closed
11/22/2010	4:59:41 PM	PH3 valve closed
11/22/2010	4:59:41 PM	SiCl4 pre valve closed
11/22/2010	4:59:41 PM	SiCl4 post valve closed
11/22/2010	4:59:41 PM	Bubbler valve closed
11/22/2010	4:59:41 PM	Helium valve opened
11/22/2010	4:59:41 PM	Main Vac valve opened
11/22/2010	4:59:41 PM	Bypass valve opened
11/22/2010	4:59:41 PM	Helium MFC set to  100.000000
11/22/2010	4:59:41 PM	H2 MFC set to  0.000000
11/22/2010	4:59:41 PM	BCl3 MFC set to  0.000000
11/22/2010	4:59:41 PM	PHl3 MFC set to  0.000000
11/22/2010	4:59:41 PM	SiCl4 MFC set to  0.000000
11/22/2010	4:59:41 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	4:59:41 PM	Tube furnace set to 0
11/22/2010	5:00:41 PM	Helium valve closed
11/22/2010	5:00:41 PM	H2 valve closed
11/22/2010	5:00:41 PM	BCl3 valve closed
11/22/2010	5:00:41 PM	PH3 valve closed
11/22/2010	5:00:41 PM	SiCl4 pre valve closed
11/22/2010	5:00:41 PM	SiCl4 post valve closed
11/22/2010	5:00:41 PM	Bubbler valve closed
11/22/2010	5:00:41 PM	Main Vac valve opened
11/22/2010	5:00:41 PM	Bypass valve opened
11/22/2010	5:00:41 PM	Helium MFC set to  0.000000
11/22/2010	5:00:41 PM	H2 MFC set to  0.000000
11/22/2010	5:00:41 PM	BCl3 MFC set to  0.000000
11/22/2010	5:00:41 PM	PHl3 MFC set to  0.000000
11/22/2010	5:00:41 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:00:41 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:00:41 PM	Tube furnace set to 0
11/22/2010	5:01:41 PM	H2 valve closed
11/22/2010	5:01:41 PM	BCl3 valve closed
11/22/2010	5:01:41 PM	PH3 valve closed
11/22/2010	5:01:41 PM	SiCl4 pre valve closed
11/22/2010	5:01:41 PM	SiCl4 post valve closed
11/22/2010	5:01:41 PM	Bubbler valve closed
11/22/2010	5:01:41 PM	Helium valve opened
11/22/2010	5:01:41 PM	Main Vac valve opened
11/22/2010	5:01:41 PM	Bypass valve opened
11/22/2010	5:01:41 PM	Helium MFC set to  100.000000
11/22/2010	5:01:41 PM	H2 MFC set to  0.000000
11/22/2010	5:01:41 PM	BCl3 MFC set to  0.000000
11/22/2010	5:01:41 PM	PHl3 MFC set to  0.000000
11/22/2010	5:01:41 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:01:41 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:01:41 PM	Tube furnace set to 0
11/22/2010	5:02:41 PM	Helium valve closed
11/22/2010	5:02:41 PM	H2 valve closed
11/22/2010	5:02:41 PM	BCl3 valve closed
11/22/2010	5:02:41 PM	PH3 valve closed
11/22/2010	5:02:41 PM	SiCl4 pre valve closed
11/22/2010	5:02:41 PM	SiCl4 post valve closed
11/22/2010	5:02:41 PM	Bubbler valve closed
11/22/2010	5:02:41 PM	Main Vac valve opened
11/22/2010	5:02:41 PM	Bypass valve opened
11/22/2010	5:02:41 PM	Helium MFC set to  0.000000
11/22/2010	5:02:41 PM	H2 MFC set to  0.000000
11/22/2010	5:02:41 PM	BCl3 MFC set to  0.000000
11/22/2010	5:02:41 PM	PHl3 MFC set to  0.000000
11/22/2010	5:02:41 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:02:41 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:02:41 PM	Tube furnace set to 0
11/22/2010	5:03:41 PM	H2 valve closed
11/22/2010	5:03:41 PM	BCl3 valve closed
11/22/2010	5:03:41 PM	PH3 valve closed
11/22/2010	5:03:41 PM	SiCl4 pre valve closed
11/22/2010	5:03:41 PM	SiCl4 post valve closed
11/22/2010	5:03:41 PM	Bubbler valve closed
11/22/2010	5:03:41 PM	Helium valve opened
11/22/2010	5:03:41 PM	Main Vac valve opened
11/22/2010	5:03:41 PM	Bypass valve opened
11/22/2010	5:03:41 PM	Helium MFC set to  100.000000
11/22/2010	5:03:41 PM	H2 MFC set to  0.000000
11/22/2010	5:03:41 PM	BCl3 MFC set to  0.000000
11/22/2010	5:03:41 PM	PHl3 MFC set to  0.000000
11/22/2010	5:03:41 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:03:41 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:03:42 PM	Tube furnace set to 0
11/22/2010	5:04:42 PM	Helium valve closed
11/22/2010	5:04:42 PM	H2 valve closed
11/22/2010	5:04:42 PM	BCl3 valve closed
11/22/2010	5:04:42 PM	PH3 valve closed
11/22/2010	5:04:42 PM	SiCl4 pre valve closed
11/22/2010	5:04:42 PM	SiCl4 post valve closed
11/22/2010	5:04:42 PM	Bubbler valve closed
11/22/2010	5:04:42 PM	Main Vac valve opened
11/22/2010	5:04:42 PM	Bypass valve opened
11/22/2010	5:04:42 PM	Helium MFC set to  0.000000
11/22/2010	5:04:42 PM	H2 MFC set to  0.000000
11/22/2010	5:04:42 PM	BCl3 MFC set to  0.000000
11/22/2010	5:04:42 PM	PHl3 MFC set to  0.000000
11/22/2010	5:04:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:04:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:04:42 PM	Tube furnace set to 0
11/22/2010	5:05:42 PM	H2 valve closed
11/22/2010	5:05:42 PM	BCl3 valve closed
11/22/2010	5:05:42 PM	PH3 valve closed
11/22/2010	5:05:42 PM	SiCl4 pre valve closed
11/22/2010	5:05:42 PM	SiCl4 post valve closed
11/22/2010	5:05:42 PM	Bubbler valve closed
11/22/2010	5:05:42 PM	Helium valve opened
11/22/2010	5:05:42 PM	Main Vac valve opened
11/22/2010	5:05:42 PM	Bypass valve opened
11/22/2010	5:05:42 PM	Helium MFC set to  100.000000
11/22/2010	5:05:42 PM	H2 MFC set to  0.000000
11/22/2010	5:05:42 PM	BCl3 MFC set to  0.000000
11/22/2010	5:05:42 PM	PHl3 MFC set to  0.000000
11/22/2010	5:05:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:05:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:05:42 PM	Tube furnace set to 0
11/22/2010	5:06:42 PM	Helium valve closed
11/22/2010	5:06:42 PM	H2 valve closed
11/22/2010	5:06:42 PM	BCl3 valve closed
11/22/2010	5:06:42 PM	PH3 valve closed
11/22/2010	5:06:42 PM	SiCl4 pre valve closed
11/22/2010	5:06:42 PM	SiCl4 post valve closed
11/22/2010	5:06:42 PM	Bubbler valve closed
11/22/2010	5:06:42 PM	Main Vac valve opened
11/22/2010	5:06:42 PM	Bypass valve opened
11/22/2010	5:06:42 PM	Helium MFC set to  0.000000
11/22/2010	5:06:42 PM	H2 MFC set to  0.000000
11/22/2010	5:06:42 PM	BCl3 MFC set to  0.000000
11/22/2010	5:06:42 PM	PHl3 MFC set to  0.000000
11/22/2010	5:06:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:06:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:06:42 PM	Tube furnace set to 0
11/22/2010	5:06:43 PM	Run finished at 5:06 PM
11/22/2010	5:06:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	5:35:17 PM	Recipe started at 5:35 PM
11/22/2010	5:35:17 PM	Helium valve closed
11/22/2010	5:35:17 PM	BCl3 valve closed
11/22/2010	5:35:17 PM	PH3 valve closed
11/22/2010	5:35:17 PM	SiCl4 pre valve closed
11/22/2010	5:35:17 PM	SiCl4 post valve closed
11/22/2010	5:35:17 PM	Main Vac valve closed
11/22/2010	5:35:17 PM	Bypass valve closed
11/22/2010	5:35:17 PM	Bubbler valve closed
11/22/2010	5:35:17 PM	H2 valve opened
11/22/2010	5:35:17 PM	Helium MFC set to  0.000000
11/22/2010	5:35:17 PM	H2 MFC set to  500.000000
11/22/2010	5:35:17 PM	BCl3 MFC set to  0.000000
11/22/2010	5:35:17 PM	PHl3 MFC set to  0.000000
11/22/2010	5:35:17 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:35:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:35:17 PM	Tube furnace set to 0
11/22/2010	5:36:40 PM	Helium valve closed
11/22/2010	5:36:40 PM	BCl3 valve closed
11/22/2010	5:36:40 PM	PH3 valve closed
11/22/2010	5:36:40 PM	SiCl4 pre valve closed
11/22/2010	5:36:40 PM	SiCl4 post valve closed
11/22/2010	5:36:40 PM	Main Vac valve closed
11/22/2010	5:36:40 PM	Bypass valve closed
11/22/2010	5:36:40 PM	H2 valve opened
11/22/2010	5:36:40 PM	Bubbler valve opened
11/22/2010	5:36:40 PM	Helium MFC set to  0.000000
11/22/2010	5:36:40 PM	H2 MFC set to  500.000000
11/22/2010	5:36:40 PM	BCl3 MFC set to  0.000000
11/22/2010	5:36:40 PM	PHl3 MFC set to  0.000000
11/22/2010	5:36:40 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:36:40 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:36:40 PM	Tube furnace set to 1000
11/22/2010	5:43:20 PM	Run aborted at 5:43 PM
11/22/2010	5:43:20 PM	Helium valve closed
11/22/2010	5:43:20 PM	H2 valve closed
11/22/2010	5:43:20 PM	BCl3 valve closed
11/22/2010	5:43:20 PM	PH3 valve closed
11/22/2010	5:43:20 PM	SiCl4 pre valve closed
11/22/2010	5:43:20 PM	SiCl4 post valve closed
11/22/2010	5:43:20 PM	Bypass valve closed
11/22/2010	5:43:20 PM	Main Vac valve closed
11/22/2010	5:43:20 PM	Bubbler valve closed
11/22/2010	5:43:20 PM	Helium MFC set to  0.000000
11/22/2010	5:43:20 PM	H2 MFC set to  0.000000
11/22/2010	5:43:20 PM	BCl3 MFC set to  0.000000
11/22/2010	5:43:20 PM	PHl3 MFC set to  0.000000
11/22/2010	5:43:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:43:20 PM	Tube furnace set to 0
11/22/2010	5:43:25 PM	Recipe started at 5:43 PM
11/22/2010	5:43:25 PM	Helium valve closed
11/22/2010	5:43:25 PM	BCl3 valve closed
11/22/2010	5:43:25 PM	PH3 valve closed
11/22/2010	5:43:25 PM	SiCl4 pre valve closed
11/22/2010	5:43:25 PM	SiCl4 post valve closed
11/22/2010	5:43:25 PM	Main Vac valve closed
11/22/2010	5:43:25 PM	Bypass valve closed
11/22/2010	5:43:25 PM	Bubbler valve closed
11/22/2010	5:43:25 PM	H2 valve opened
11/22/2010	5:43:25 PM	Helium MFC set to  0.000000
11/22/2010	5:43:25 PM	H2 MFC set to  500.000000
11/22/2010	5:43:25 PM	BCl3 MFC set to  0.000000
11/22/2010	5:43:25 PM	PHl3 MFC set to  0.000000
11/22/2010	5:43:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:43:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:43:25 PM	Tube furnace set to 0
11/22/2010	5:43:27 PM	Helium valve closed
11/22/2010	5:43:27 PM	BCl3 valve closed
11/22/2010	5:43:27 PM	PH3 valve closed
11/22/2010	5:43:27 PM	SiCl4 pre valve closed
11/22/2010	5:43:27 PM	SiCl4 post valve closed
11/22/2010	5:43:27 PM	Main Vac valve closed
11/22/2010	5:43:27 PM	Bypass valve closed
11/22/2010	5:43:27 PM	H2 valve opened
11/22/2010	5:43:27 PM	Bubbler valve opened
11/22/2010	5:43:27 PM	Helium MFC set to  0.000000
11/22/2010	5:43:27 PM	H2 MFC set to  500.000000
11/22/2010	5:43:27 PM	BCl3 MFC set to  0.000000
11/22/2010	5:43:27 PM	PHl3 MFC set to  0.000000
11/22/2010	5:43:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	5:43:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	5:43:27 PM	Tube furnace set to 1000
11/22/2010	6:03:27 PM	Helium valve closed
11/22/2010	6:03:27 PM	PH3 valve closed
11/22/2010	6:03:27 PM	Main Vac valve closed
11/22/2010	6:03:27 PM	Bypass valve closed
11/22/2010	6:03:27 PM	H2 valve opened
11/22/2010	6:03:27 PM	BCl3 valve opened
11/22/2010	6:03:27 PM	SiCl4 pre valve opened
11/22/2010	6:03:27 PM	SiCl4 post valve opened
11/22/2010	6:03:27 PM	Bubbler valve opened
11/22/2010	6:03:27 PM	Helium MFC set to  0.000000
11/22/2010	6:03:27 PM	H2 MFC set to  500.000000
11/22/2010	6:03:27 PM	BCl3 MFC set to  12.000000
11/22/2010	6:03:27 PM	PHl3 MFC set to  0.000000
11/22/2010	6:03:27 PM	SiCl4 MFC set to  50.000000
11/22/2010	6:03:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:03:27 PM	Tube furnace set to 1000
11/22/2010	6:18:27 PM	H2 valve closed
11/22/2010	6:18:27 PM	BCl3 valve closed
11/22/2010	6:18:27 PM	PH3 valve closed
11/22/2010	6:18:27 PM	SiCl4 pre valve closed
11/22/2010	6:18:27 PM	SiCl4 post valve closed
11/22/2010	6:18:27 PM	Main Vac valve closed
11/22/2010	6:18:27 PM	Bypass valve closed
11/22/2010	6:18:27 PM	Helium valve opened
11/22/2010	6:18:27 PM	Bubbler valve opened
11/22/2010	6:18:27 PM	Helium MFC set to  500.000000
11/22/2010	6:18:27 PM	H2 MFC set to  0.000000
11/22/2010	6:18:27 PM	BCl3 MFC set to  0.000000
11/22/2010	6:18:27 PM	PHl3 MFC set to  0.000000
11/22/2010	6:18:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:18:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:18:27 PM	Tube furnace set to 950
11/22/2010	6:23:27 PM	H2 valve closed
11/22/2010	6:23:27 PM	BCl3 valve closed
11/22/2010	6:23:27 PM	PH3 valve closed
11/22/2010	6:23:27 PM	SiCl4 pre valve closed
11/22/2010	6:23:27 PM	SiCl4 post valve closed
11/22/2010	6:23:27 PM	Main Vac valve closed
11/22/2010	6:23:27 PM	Bypass valve closed
11/22/2010	6:23:27 PM	Helium valve opened
11/22/2010	6:23:27 PM	Bubbler valve opened
11/22/2010	6:23:27 PM	Helium MFC set to  500.000000
11/22/2010	6:23:27 PM	H2 MFC set to  0.000000
11/22/2010	6:23:27 PM	BCl3 MFC set to  0.000000
11/22/2010	6:23:27 PM	PHl3 MFC set to  0.000000
11/22/2010	6:23:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:23:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:23:27 PM	Tube furnace set to 900
11/22/2010	6:28:27 PM	H2 valve closed
11/22/2010	6:28:27 PM	BCl3 valve closed
11/22/2010	6:28:27 PM	PH3 valve closed
11/22/2010	6:28:27 PM	SiCl4 pre valve closed
11/22/2010	6:28:27 PM	SiCl4 post valve closed
11/22/2010	6:28:27 PM	Main Vac valve closed
11/22/2010	6:28:27 PM	Bypass valve closed
11/22/2010	6:28:27 PM	Helium valve opened
11/22/2010	6:28:27 PM	Bubbler valve opened
11/22/2010	6:28:27 PM	Helium MFC set to  500.000000
11/22/2010	6:28:27 PM	H2 MFC set to  0.000000
11/22/2010	6:28:27 PM	BCl3 MFC set to  0.000000
11/22/2010	6:28:27 PM	PHl3 MFC set to  0.000000
11/22/2010	6:28:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:28:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:28:27 PM	Tube furnace set to 850
11/22/2010	6:33:27 PM	H2 valve closed
11/22/2010	6:33:27 PM	BCl3 valve closed
11/22/2010	6:33:27 PM	PH3 valve closed
11/22/2010	6:33:27 PM	SiCl4 pre valve closed
11/22/2010	6:33:27 PM	SiCl4 post valve closed
11/22/2010	6:33:27 PM	Main Vac valve closed
11/22/2010	6:33:27 PM	Bypass valve closed
11/22/2010	6:33:27 PM	Helium valve opened
11/22/2010	6:33:27 PM	Bubbler valve opened
11/22/2010	6:33:27 PM	Helium MFC set to  500.000000
11/22/2010	6:33:27 PM	H2 MFC set to  0.000000
11/22/2010	6:33:27 PM	BCl3 MFC set to  0.000000
11/22/2010	6:33:27 PM	PHl3 MFC set to  0.000000
11/22/2010	6:33:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:33:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:33:28 PM	Tube furnace set to 800
11/22/2010	6:38:28 PM	H2 valve closed
11/22/2010	6:38:28 PM	BCl3 valve closed
11/22/2010	6:38:28 PM	PH3 valve closed
11/22/2010	6:38:28 PM	SiCl4 pre valve closed
11/22/2010	6:38:28 PM	SiCl4 post valve closed
11/22/2010	6:38:28 PM	Main Vac valve closed
11/22/2010	6:38:28 PM	Bypass valve closed
11/22/2010	6:38:28 PM	Helium valve opened
11/22/2010	6:38:28 PM	Bubbler valve opened
11/22/2010	6:38:28 PM	Helium MFC set to  500.000000
11/22/2010	6:38:28 PM	H2 MFC set to  0.000000
11/22/2010	6:38:28 PM	BCl3 MFC set to  0.000000
11/22/2010	6:38:28 PM	PHl3 MFC set to  0.000000
11/22/2010	6:38:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:38:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:38:28 PM	Tube furnace set to 750
11/22/2010	6:43:28 PM	H2 valve closed
11/22/2010	6:43:28 PM	BCl3 valve closed
11/22/2010	6:43:28 PM	PH3 valve closed
11/22/2010	6:43:28 PM	SiCl4 pre valve closed
11/22/2010	6:43:28 PM	SiCl4 post valve closed
11/22/2010	6:43:28 PM	Main Vac valve closed
11/22/2010	6:43:28 PM	Bypass valve closed
11/22/2010	6:43:28 PM	Helium valve opened
11/22/2010	6:43:28 PM	Bubbler valve opened
11/22/2010	6:43:28 PM	Helium MFC set to  500.000000
11/22/2010	6:43:28 PM	H2 MFC set to  0.000000
11/22/2010	6:43:28 PM	BCl3 MFC set to  0.000000
11/22/2010	6:43:28 PM	PHl3 MFC set to  0.000000
11/22/2010	6:43:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:43:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:43:28 PM	Tube furnace set to 700
11/22/2010	6:48:28 PM	H2 valve closed
11/22/2010	6:48:28 PM	BCl3 valve closed
11/22/2010	6:48:28 PM	PH3 valve closed
11/22/2010	6:48:28 PM	SiCl4 pre valve closed
11/22/2010	6:48:28 PM	SiCl4 post valve closed
11/22/2010	6:48:28 PM	Main Vac valve closed
11/22/2010	6:48:28 PM	Bypass valve closed
11/22/2010	6:48:28 PM	Helium valve opened
11/22/2010	6:48:28 PM	Bubbler valve opened
11/22/2010	6:48:28 PM	Helium MFC set to  500.000000
11/22/2010	6:48:28 PM	H2 MFC set to  0.000000
11/22/2010	6:48:28 PM	BCl3 MFC set to  0.000000
11/22/2010	6:48:28 PM	PHl3 MFC set to  0.000000
11/22/2010	6:48:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	6:48:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	6:48:28 PM	Tube furnace set to 0
11/22/2010	7:08:28 PM	Helium valve closed
11/22/2010	7:08:28 PM	H2 valve closed
11/22/2010	7:08:28 PM	BCl3 valve closed
11/22/2010	7:08:28 PM	PH3 valve closed
11/22/2010	7:08:28 PM	SiCl4 pre valve closed
11/22/2010	7:08:28 PM	SiCl4 post valve closed
11/22/2010	7:08:28 PM	Main Vac valve closed
11/22/2010	7:08:28 PM	Bypass valve closed
11/22/2010	7:08:28 PM	Bubbler valve closed
11/22/2010	7:08:28 PM	Helium MFC set to  0.000000
11/22/2010	7:08:28 PM	H2 MFC set to  0.000000
11/22/2010	7:08:28 PM	BCl3 MFC set to  0.000000
11/22/2010	7:08:28 PM	PHl3 MFC set to  0.000000
11/22/2010	7:08:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:08:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:08:28 PM	Tube furnace set to 0
11/22/2010	7:08:29 PM	Run finished at 7:08 PM
11/22/2010	7:39:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	7:39:59 PM	Recipe started at 7:39 PM
11/22/2010	7:39:59 PM	Helium valve closed
11/22/2010	7:39:59 PM	H2 valve closed
11/22/2010	7:39:59 PM	BCl3 valve closed
11/22/2010	7:39:59 PM	PH3 valve closed
11/22/2010	7:39:59 PM	SiCl4 pre valve closed
11/22/2010	7:39:59 PM	SiCl4 post valve closed
11/22/2010	7:39:59 PM	Main Vac valve closed
11/22/2010	7:39:59 PM	Bubbler valve closed
11/22/2010	7:39:59 PM	Bypass valve opened
11/22/2010	7:39:59 PM	Helium MFC set to  0.000000
11/22/2010	7:39:59 PM	H2 MFC set to  0.000000
11/22/2010	7:39:59 PM	BCl3 MFC set to  0.000000
11/22/2010	7:39:59 PM	PHl3 MFC set to  0.000000
11/22/2010	7:39:59 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:39:59 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:39:59 PM	Tube furnace set to 0
11/22/2010	7:40:51 PM	Helium valve closed
11/22/2010	7:40:51 PM	H2 valve closed
11/22/2010	7:40:51 PM	BCl3 valve closed
11/22/2010	7:40:51 PM	PH3 valve closed
11/22/2010	7:40:51 PM	SiCl4 pre valve closed
11/22/2010	7:40:51 PM	SiCl4 post valve closed
11/22/2010	7:40:51 PM	Bubbler valve closed
11/22/2010	7:40:51 PM	Main Vac valve opened
11/22/2010	7:40:51 PM	Bypass valve opened
11/22/2010	7:40:51 PM	Helium MFC set to  0.000000
11/22/2010	7:40:51 PM	H2 MFC set to  0.000000
11/22/2010	7:40:51 PM	BCl3 MFC set to  0.000000
11/22/2010	7:40:51 PM	PHl3 MFC set to  0.000000
11/22/2010	7:40:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:40:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:40:52 PM	Tube furnace set to 0
11/22/2010	7:40:52 PM	Run finished at 7:40 PM
11/22/2010	7:40:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	7:54:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	7:54:29 PM	Recipe started at 7:54 PM
11/22/2010	7:54:29 PM	Helium valve closed
11/22/2010	7:54:29 PM	H2 valve closed
11/22/2010	7:54:29 PM	BCl3 valve closed
11/22/2010	7:54:29 PM	PH3 valve closed
11/22/2010	7:54:29 PM	SiCl4 pre valve closed
11/22/2010	7:54:29 PM	SiCl4 post valve closed
11/22/2010	7:54:29 PM	Main Vac valve closed
11/22/2010	7:54:29 PM	Bubbler valve closed
11/22/2010	7:54:29 PM	Bypass valve opened
11/22/2010	7:54:29 PM	Helium MFC set to  0.000000
11/22/2010	7:54:29 PM	H2 MFC set to  0.000000
11/22/2010	7:54:29 PM	BCl3 MFC set to  0.000000
11/22/2010	7:54:29 PM	PHl3 MFC set to  0.000000
11/22/2010	7:54:29 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:54:29 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:54:30 PM	Tube furnace set to 0
11/22/2010	7:54:30 PM	Helium valve closed
11/22/2010	7:54:30 PM	H2 valve closed
11/22/2010	7:54:30 PM	BCl3 valve closed
11/22/2010	7:54:30 PM	PH3 valve closed
11/22/2010	7:54:30 PM	SiCl4 pre valve closed
11/22/2010	7:54:30 PM	SiCl4 post valve closed
11/22/2010	7:54:30 PM	Bubbler valve closed
11/22/2010	7:54:30 PM	Main Vac valve opened
11/22/2010	7:54:30 PM	Bypass valve opened
11/22/2010	7:54:30 PM	Helium MFC set to  0.000000
11/22/2010	7:54:30 PM	H2 MFC set to  0.000000
11/22/2010	7:54:30 PM	BCl3 MFC set to  0.000000
11/22/2010	7:54:30 PM	PHl3 MFC set to  0.000000
11/22/2010	7:54:30 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:54:30 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:54:30 PM	Tube furnace set to 0
11/22/2010	7:55:30 PM	H2 valve closed
11/22/2010	7:55:30 PM	BCl3 valve closed
11/22/2010	7:55:30 PM	PH3 valve closed
11/22/2010	7:55:30 PM	SiCl4 pre valve closed
11/22/2010	7:55:30 PM	SiCl4 post valve closed
11/22/2010	7:55:30 PM	Bubbler valve closed
11/22/2010	7:55:30 PM	Helium valve opened
11/22/2010	7:55:30 PM	Main Vac valve opened
11/22/2010	7:55:30 PM	Bypass valve opened
11/22/2010	7:55:30 PM	Helium MFC set to  100.000000
11/22/2010	7:55:30 PM	H2 MFC set to  0.000000
11/22/2010	7:55:30 PM	BCl3 MFC set to  0.000000
11/22/2010	7:55:30 PM	PHl3 MFC set to  0.000000
11/22/2010	7:55:30 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:55:30 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:55:30 PM	Tube furnace set to 0
11/22/2010	7:56:30 PM	Helium valve closed
11/22/2010	7:56:30 PM	H2 valve closed
11/22/2010	7:56:30 PM	BCl3 valve closed
11/22/2010	7:56:30 PM	PH3 valve closed
11/22/2010	7:56:30 PM	SiCl4 pre valve closed
11/22/2010	7:56:30 PM	SiCl4 post valve closed
11/22/2010	7:56:30 PM	Bubbler valve closed
11/22/2010	7:56:30 PM	Main Vac valve opened
11/22/2010	7:56:30 PM	Bypass valve opened
11/22/2010	7:56:30 PM	Helium MFC set to  0.000000
11/22/2010	7:56:30 PM	H2 MFC set to  0.000000
11/22/2010	7:56:30 PM	BCl3 MFC set to  0.000000
11/22/2010	7:56:30 PM	PHl3 MFC set to  0.000000
11/22/2010	7:56:30 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:56:30 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:56:30 PM	Tube furnace set to 0
11/22/2010	7:57:30 PM	H2 valve closed
11/22/2010	7:57:30 PM	BCl3 valve closed
11/22/2010	7:57:30 PM	PH3 valve closed
11/22/2010	7:57:30 PM	SiCl4 pre valve closed
11/22/2010	7:57:30 PM	SiCl4 post valve closed
11/22/2010	7:57:30 PM	Bubbler valve closed
11/22/2010	7:57:30 PM	Helium valve opened
11/22/2010	7:57:30 PM	Main Vac valve opened
11/22/2010	7:57:30 PM	Bypass valve opened
11/22/2010	7:57:30 PM	Helium MFC set to  100.000000
11/22/2010	7:57:30 PM	H2 MFC set to  0.000000
11/22/2010	7:57:30 PM	BCl3 MFC set to  0.000000
11/22/2010	7:57:30 PM	PHl3 MFC set to  0.000000
11/22/2010	7:57:30 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:57:30 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:57:31 PM	Tube furnace set to 0
11/22/2010	7:58:31 PM	Helium valve closed
11/22/2010	7:58:31 PM	H2 valve closed
11/22/2010	7:58:31 PM	BCl3 valve closed
11/22/2010	7:58:31 PM	PH3 valve closed
11/22/2010	7:58:31 PM	SiCl4 pre valve closed
11/22/2010	7:58:31 PM	SiCl4 post valve closed
11/22/2010	7:58:31 PM	Bubbler valve closed
11/22/2010	7:58:31 PM	Main Vac valve opened
11/22/2010	7:58:31 PM	Bypass valve opened
11/22/2010	7:58:31 PM	Helium MFC set to  0.000000
11/22/2010	7:58:31 PM	H2 MFC set to  0.000000
11/22/2010	7:58:31 PM	BCl3 MFC set to  0.000000
11/22/2010	7:58:31 PM	PHl3 MFC set to  0.000000
11/22/2010	7:58:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:58:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:58:31 PM	Tube furnace set to 0
11/22/2010	7:59:31 PM	H2 valve closed
11/22/2010	7:59:31 PM	BCl3 valve closed
11/22/2010	7:59:31 PM	PH3 valve closed
11/22/2010	7:59:31 PM	SiCl4 pre valve closed
11/22/2010	7:59:31 PM	SiCl4 post valve closed
11/22/2010	7:59:31 PM	Bubbler valve closed
11/22/2010	7:59:31 PM	Helium valve opened
11/22/2010	7:59:31 PM	Main Vac valve opened
11/22/2010	7:59:31 PM	Bypass valve opened
11/22/2010	7:59:31 PM	Helium MFC set to  100.000000
11/22/2010	7:59:31 PM	H2 MFC set to  0.000000
11/22/2010	7:59:31 PM	BCl3 MFC set to  0.000000
11/22/2010	7:59:31 PM	PHl3 MFC set to  0.000000
11/22/2010	7:59:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	7:59:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	7:59:31 PM	Tube furnace set to 0
11/22/2010	8:00:31 PM	Helium valve closed
11/22/2010	8:00:31 PM	H2 valve closed
11/22/2010	8:00:31 PM	BCl3 valve closed
11/22/2010	8:00:31 PM	PH3 valve closed
11/22/2010	8:00:31 PM	SiCl4 pre valve closed
11/22/2010	8:00:31 PM	SiCl4 post valve closed
11/22/2010	8:00:31 PM	Bubbler valve closed
11/22/2010	8:00:31 PM	Main Vac valve opened
11/22/2010	8:00:31 PM	Bypass valve opened
11/22/2010	8:00:31 PM	Helium MFC set to  0.000000
11/22/2010	8:00:31 PM	H2 MFC set to  0.000000
11/22/2010	8:00:31 PM	BCl3 MFC set to  0.000000
11/22/2010	8:00:31 PM	PHl3 MFC set to  0.000000
11/22/2010	8:00:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:00:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:00:31 PM	Tube furnace set to 0
11/22/2010	8:01:31 PM	H2 valve closed
11/22/2010	8:01:31 PM	BCl3 valve closed
11/22/2010	8:01:31 PM	PH3 valve closed
11/22/2010	8:01:31 PM	SiCl4 pre valve closed
11/22/2010	8:01:31 PM	SiCl4 post valve closed
11/22/2010	8:01:31 PM	Bubbler valve closed
11/22/2010	8:01:31 PM	Helium valve opened
11/22/2010	8:01:31 PM	Main Vac valve opened
11/22/2010	8:01:31 PM	Bypass valve opened
11/22/2010	8:01:31 PM	Helium MFC set to  100.000000
11/22/2010	8:01:31 PM	H2 MFC set to  0.000000
11/22/2010	8:01:31 PM	BCl3 MFC set to  0.000000
11/22/2010	8:01:31 PM	PHl3 MFC set to  0.000000
11/22/2010	8:01:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:01:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:01:31 PM	Tube furnace set to 0
11/22/2010	8:02:31 PM	Helium valve closed
11/22/2010	8:02:31 PM	H2 valve closed
11/22/2010	8:02:31 PM	BCl3 valve closed
11/22/2010	8:02:31 PM	PH3 valve closed
11/22/2010	8:02:31 PM	SiCl4 pre valve closed
11/22/2010	8:02:31 PM	SiCl4 post valve closed
11/22/2010	8:02:31 PM	Bubbler valve closed
11/22/2010	8:02:31 PM	Main Vac valve opened
11/22/2010	8:02:31 PM	Bypass valve opened
11/22/2010	8:02:31 PM	Helium MFC set to  0.000000
11/22/2010	8:02:31 PM	H2 MFC set to  0.000000
11/22/2010	8:02:31 PM	BCl3 MFC set to  0.000000
11/22/2010	8:02:31 PM	PHl3 MFC set to  0.000000
11/22/2010	8:02:31 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:02:31 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:02:32 PM	Tube furnace set to 0
11/22/2010	8:03:32 PM	H2 valve closed
11/22/2010	8:03:32 PM	BCl3 valve closed
11/22/2010	8:03:32 PM	PH3 valve closed
11/22/2010	8:03:32 PM	SiCl4 pre valve closed
11/22/2010	8:03:32 PM	SiCl4 post valve closed
11/22/2010	8:03:32 PM	Bubbler valve closed
11/22/2010	8:03:32 PM	Helium valve opened
11/22/2010	8:03:32 PM	Main Vac valve opened
11/22/2010	8:03:32 PM	Bypass valve opened
11/22/2010	8:03:32 PM	Helium MFC set to  100.000000
11/22/2010	8:03:32 PM	H2 MFC set to  0.000000
11/22/2010	8:03:32 PM	BCl3 MFC set to  0.000000
11/22/2010	8:03:32 PM	PHl3 MFC set to  0.000000
11/22/2010	8:03:32 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:03:32 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:03:32 PM	Tube furnace set to 0
11/22/2010	8:04:32 PM	Helium valve closed
11/22/2010	8:04:32 PM	H2 valve closed
11/22/2010	8:04:32 PM	BCl3 valve closed
11/22/2010	8:04:32 PM	PH3 valve closed
11/22/2010	8:04:32 PM	SiCl4 pre valve closed
11/22/2010	8:04:32 PM	SiCl4 post valve closed
11/22/2010	8:04:32 PM	Bubbler valve closed
11/22/2010	8:04:32 PM	Main Vac valve opened
11/22/2010	8:04:32 PM	Bypass valve opened
11/22/2010	8:04:32 PM	Helium MFC set to  0.000000
11/22/2010	8:04:32 PM	H2 MFC set to  0.000000
11/22/2010	8:04:32 PM	BCl3 MFC set to  0.000000
11/22/2010	8:04:32 PM	PHl3 MFC set to  0.000000
11/22/2010	8:04:32 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:04:32 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:04:32 PM	Tube furnace set to 0
11/22/2010	8:05:32 PM	H2 valve closed
11/22/2010	8:05:32 PM	BCl3 valve closed
11/22/2010	8:05:32 PM	PH3 valve closed
11/22/2010	8:05:32 PM	SiCl4 pre valve closed
11/22/2010	8:05:32 PM	SiCl4 post valve closed
11/22/2010	8:05:32 PM	Bubbler valve closed
11/22/2010	8:05:32 PM	Helium valve opened
11/22/2010	8:05:32 PM	Main Vac valve opened
11/22/2010	8:05:32 PM	Bypass valve opened
11/22/2010	8:05:32 PM	Helium MFC set to  100.000000
11/22/2010	8:05:32 PM	H2 MFC set to  0.000000
11/22/2010	8:05:32 PM	BCl3 MFC set to  0.000000
11/22/2010	8:05:32 PM	PHl3 MFC set to  0.000000
11/22/2010	8:05:32 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:05:32 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:05:32 PM	Tube furnace set to 0
11/22/2010	8:06:32 PM	Helium valve closed
11/22/2010	8:06:32 PM	H2 valve closed
11/22/2010	8:06:32 PM	BCl3 valve closed
11/22/2010	8:06:32 PM	PH3 valve closed
11/22/2010	8:06:32 PM	SiCl4 pre valve closed
11/22/2010	8:06:32 PM	SiCl4 post valve closed
11/22/2010	8:06:32 PM	Bubbler valve closed
11/22/2010	8:06:32 PM	Main Vac valve opened
11/22/2010	8:06:32 PM	Bypass valve opened
11/22/2010	8:06:32 PM	Helium MFC set to  0.000000
11/22/2010	8:06:32 PM	H2 MFC set to  0.000000
11/22/2010	8:06:32 PM	BCl3 MFC set to  0.000000
11/22/2010	8:06:32 PM	PHl3 MFC set to  0.000000
11/22/2010	8:06:32 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:06:32 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:06:32 PM	Tube furnace set to 0
11/22/2010	8:07:32 PM	H2 valve closed
11/22/2010	8:07:32 PM	BCl3 valve closed
11/22/2010	8:07:32 PM	PH3 valve closed
11/22/2010	8:07:32 PM	SiCl4 pre valve closed
11/22/2010	8:07:32 PM	SiCl4 post valve closed
11/22/2010	8:07:32 PM	Bubbler valve closed
11/22/2010	8:07:32 PM	Helium valve opened
11/22/2010	8:07:32 PM	Main Vac valve opened
11/22/2010	8:07:32 PM	Bypass valve opened
11/22/2010	8:07:32 PM	Helium MFC set to  100.000000
11/22/2010	8:07:32 PM	H2 MFC set to  0.000000
11/22/2010	8:07:32 PM	BCl3 MFC set to  0.000000
11/22/2010	8:07:32 PM	PHl3 MFC set to  0.000000
11/22/2010	8:07:32 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:07:32 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:07:33 PM	Tube furnace set to 0
11/22/2010	8:08:33 PM	Helium valve closed
11/22/2010	8:08:33 PM	H2 valve closed
11/22/2010	8:08:33 PM	BCl3 valve closed
11/22/2010	8:08:33 PM	PH3 valve closed
11/22/2010	8:08:33 PM	SiCl4 pre valve closed
11/22/2010	8:08:33 PM	SiCl4 post valve closed
11/22/2010	8:08:33 PM	Bubbler valve closed
11/22/2010	8:08:33 PM	Main Vac valve opened
11/22/2010	8:08:33 PM	Bypass valve opened
11/22/2010	8:08:33 PM	Helium MFC set to  0.000000
11/22/2010	8:08:33 PM	H2 MFC set to  0.000000
11/22/2010	8:08:33 PM	BCl3 MFC set to  0.000000
11/22/2010	8:08:33 PM	PHl3 MFC set to  0.000000
11/22/2010	8:08:33 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:08:33 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:08:33 PM	Tube furnace set to 0
11/22/2010	8:09:33 PM	H2 valve closed
11/22/2010	8:09:33 PM	BCl3 valve closed
11/22/2010	8:09:33 PM	PH3 valve closed
11/22/2010	8:09:33 PM	SiCl4 pre valve closed
11/22/2010	8:09:33 PM	SiCl4 post valve closed
11/22/2010	8:09:33 PM	Bubbler valve closed
11/22/2010	8:09:33 PM	Helium valve opened
11/22/2010	8:09:33 PM	Main Vac valve opened
11/22/2010	8:09:33 PM	Bypass valve opened
11/22/2010	8:09:33 PM	Helium MFC set to  100.000000
11/22/2010	8:09:33 PM	H2 MFC set to  0.000000
11/22/2010	8:09:33 PM	BCl3 MFC set to  0.000000
11/22/2010	8:09:33 PM	PHl3 MFC set to  0.000000
11/22/2010	8:09:33 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:09:33 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:09:33 PM	Tube furnace set to 0
11/22/2010	8:10:33 PM	Helium valve closed
11/22/2010	8:10:33 PM	H2 valve closed
11/22/2010	8:10:33 PM	BCl3 valve closed
11/22/2010	8:10:33 PM	PH3 valve closed
11/22/2010	8:10:33 PM	SiCl4 pre valve closed
11/22/2010	8:10:33 PM	SiCl4 post valve closed
11/22/2010	8:10:33 PM	Bubbler valve closed
11/22/2010	8:10:33 PM	Main Vac valve opened
11/22/2010	8:10:33 PM	Bypass valve opened
11/22/2010	8:10:33 PM	Helium MFC set to  0.000000
11/22/2010	8:10:33 PM	H2 MFC set to  0.000000
11/22/2010	8:10:33 PM	BCl3 MFC set to  0.000000
11/22/2010	8:10:33 PM	PHl3 MFC set to  0.000000
11/22/2010	8:10:33 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:10:33 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:10:33 PM	Tube furnace set to 0
11/22/2010	8:11:33 PM	H2 valve closed
11/22/2010	8:11:33 PM	BCl3 valve closed
11/22/2010	8:11:33 PM	PH3 valve closed
11/22/2010	8:11:33 PM	SiCl4 pre valve closed
11/22/2010	8:11:33 PM	SiCl4 post valve closed
11/22/2010	8:11:33 PM	Bubbler valve closed
11/22/2010	8:11:33 PM	Helium valve opened
11/22/2010	8:11:33 PM	Main Vac valve opened
11/22/2010	8:11:33 PM	Bypass valve opened
11/22/2010	8:11:33 PM	Helium MFC set to  100.000000
11/22/2010	8:11:33 PM	H2 MFC set to  0.000000
11/22/2010	8:11:33 PM	BCl3 MFC set to  0.000000
11/22/2010	8:11:33 PM	PHl3 MFC set to  0.000000
11/22/2010	8:11:33 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:11:33 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:11:33 PM	Tube furnace set to 0
11/22/2010	8:12:33 PM	Helium valve closed
11/22/2010	8:12:33 PM	H2 valve closed
11/22/2010	8:12:33 PM	BCl3 valve closed
11/22/2010	8:12:33 PM	PH3 valve closed
11/22/2010	8:12:33 PM	SiCl4 pre valve closed
11/22/2010	8:12:33 PM	SiCl4 post valve closed
11/22/2010	8:12:33 PM	Bubbler valve closed
11/22/2010	8:12:33 PM	Main Vac valve opened
11/22/2010	8:12:33 PM	Bypass valve opened
11/22/2010	8:12:33 PM	Helium MFC set to  0.000000
11/22/2010	8:12:33 PM	H2 MFC set to  0.000000
11/22/2010	8:12:33 PM	BCl3 MFC set to  0.000000
11/22/2010	8:12:33 PM	PHl3 MFC set to  0.000000
11/22/2010	8:12:33 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:12:33 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:12:34 PM	Tube furnace set to 0
11/22/2010	8:13:34 PM	H2 valve closed
11/22/2010	8:13:34 PM	BCl3 valve closed
11/22/2010	8:13:34 PM	PH3 valve closed
11/22/2010	8:13:34 PM	SiCl4 pre valve closed
11/22/2010	8:13:34 PM	SiCl4 post valve closed
11/22/2010	8:13:34 PM	Bubbler valve closed
11/22/2010	8:13:34 PM	Helium valve opened
11/22/2010	8:13:34 PM	Main Vac valve opened
11/22/2010	8:13:34 PM	Bypass valve opened
11/22/2010	8:13:34 PM	Helium MFC set to  100.000000
11/22/2010	8:13:34 PM	H2 MFC set to  0.000000
11/22/2010	8:13:34 PM	BCl3 MFC set to  0.000000
11/22/2010	8:13:34 PM	PHl3 MFC set to  0.000000
11/22/2010	8:13:34 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:13:34 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:13:34 PM	Tube furnace set to 0
11/22/2010	8:14:34 PM	Helium valve closed
11/22/2010	8:14:34 PM	H2 valve closed
11/22/2010	8:14:34 PM	BCl3 valve closed
11/22/2010	8:14:34 PM	PH3 valve closed
11/22/2010	8:14:34 PM	SiCl4 pre valve closed
11/22/2010	8:14:34 PM	SiCl4 post valve closed
11/22/2010	8:14:34 PM	Bubbler valve closed
11/22/2010	8:14:34 PM	Main Vac valve opened
11/22/2010	8:14:34 PM	Bypass valve opened
11/22/2010	8:14:34 PM	Helium MFC set to  0.000000
11/22/2010	8:14:34 PM	H2 MFC set to  0.000000
11/22/2010	8:14:34 PM	BCl3 MFC set to  0.000000
11/22/2010	8:14:34 PM	PHl3 MFC set to  0.000000
11/22/2010	8:14:34 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:14:34 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:14:34 PM	Tube furnace set to 0
11/22/2010	8:14:35 PM	Run finished at 8:14 PM
11/22/2010	8:14:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	8:16:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	8:16:25 PM	Recipe started at 8:16 PM
11/22/2010	8:16:25 PM	Helium valve closed
11/22/2010	8:16:25 PM	H2 valve closed
11/22/2010	8:16:25 PM	BCl3 valve closed
11/22/2010	8:16:25 PM	PH3 valve closed
11/22/2010	8:16:25 PM	SiCl4 pre valve closed
11/22/2010	8:16:25 PM	SiCl4 post valve closed
11/22/2010	8:16:25 PM	Main Vac valve closed
11/22/2010	8:16:25 PM	Bubbler valve closed
11/22/2010	8:16:25 PM	Bypass valve opened
11/22/2010	8:16:25 PM	Helium MFC set to  0.000000
11/22/2010	8:16:25 PM	H2 MFC set to  0.000000
11/22/2010	8:16:25 PM	BCl3 MFC set to  0.000000
11/22/2010	8:16:25 PM	PHl3 MFC set to  0.000000
11/22/2010	8:16:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:16:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:16:25 PM	Tube furnace set to 0
11/22/2010	8:16:26 PM	Helium valve closed
11/22/2010	8:16:26 PM	H2 valve closed
11/22/2010	8:16:26 PM	BCl3 valve closed
11/22/2010	8:16:26 PM	PH3 valve closed
11/22/2010	8:16:26 PM	SiCl4 pre valve closed
11/22/2010	8:16:26 PM	SiCl4 post valve closed
11/22/2010	8:16:26 PM	Bubbler valve closed
11/22/2010	8:16:26 PM	Main Vac valve opened
11/22/2010	8:16:26 PM	Bypass valve opened
11/22/2010	8:16:26 PM	Helium MFC set to  0.000000
11/22/2010	8:16:26 PM	H2 MFC set to  0.000000
11/22/2010	8:16:26 PM	BCl3 MFC set to  0.000000
11/22/2010	8:16:26 PM	PHl3 MFC set to  0.000000
11/22/2010	8:16:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:16:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:16:26 PM	Tube furnace set to 0
11/22/2010	8:17:26 PM	H2 valve closed
11/22/2010	8:17:26 PM	BCl3 valve closed
11/22/2010	8:17:26 PM	PH3 valve closed
11/22/2010	8:17:26 PM	SiCl4 pre valve closed
11/22/2010	8:17:26 PM	SiCl4 post valve closed
11/22/2010	8:17:26 PM	Bubbler valve closed
11/22/2010	8:17:26 PM	Helium valve opened
11/22/2010	8:17:26 PM	Main Vac valve opened
11/22/2010	8:17:26 PM	Bypass valve opened
11/22/2010	8:17:26 PM	Helium MFC set to  100.000000
11/22/2010	8:17:26 PM	H2 MFC set to  0.000000
11/22/2010	8:17:26 PM	BCl3 MFC set to  0.000000
11/22/2010	8:17:26 PM	PHl3 MFC set to  0.000000
11/22/2010	8:17:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:17:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:17:26 PM	Tube furnace set to 0
11/22/2010	8:18:26 PM	Helium valve closed
11/22/2010	8:18:26 PM	H2 valve closed
11/22/2010	8:18:26 PM	BCl3 valve closed
11/22/2010	8:18:26 PM	PH3 valve closed
11/22/2010	8:18:26 PM	SiCl4 pre valve closed
11/22/2010	8:18:26 PM	SiCl4 post valve closed
11/22/2010	8:18:26 PM	Bubbler valve closed
11/22/2010	8:18:26 PM	Main Vac valve opened
11/22/2010	8:18:26 PM	Bypass valve opened
11/22/2010	8:18:26 PM	Helium MFC set to  0.000000
11/22/2010	8:18:26 PM	H2 MFC set to  0.000000
11/22/2010	8:18:26 PM	BCl3 MFC set to  0.000000
11/22/2010	8:18:26 PM	PHl3 MFC set to  0.000000
11/22/2010	8:18:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:18:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:18:26 PM	Tube furnace set to 0
11/22/2010	8:19:26 PM	H2 valve closed
11/22/2010	8:19:26 PM	BCl3 valve closed
11/22/2010	8:19:26 PM	PH3 valve closed
11/22/2010	8:19:26 PM	SiCl4 pre valve closed
11/22/2010	8:19:26 PM	SiCl4 post valve closed
11/22/2010	8:19:26 PM	Bubbler valve closed
11/22/2010	8:19:26 PM	Helium valve opened
11/22/2010	8:19:26 PM	Main Vac valve opened
11/22/2010	8:19:26 PM	Bypass valve opened
11/22/2010	8:19:26 PM	Helium MFC set to  100.000000
11/22/2010	8:19:26 PM	H2 MFC set to  0.000000
11/22/2010	8:19:26 PM	BCl3 MFC set to  0.000000
11/22/2010	8:19:26 PM	PHl3 MFC set to  0.000000
11/22/2010	8:19:26 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:19:26 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:19:27 PM	Tube furnace set to 0
11/22/2010	8:20:27 PM	Helium valve closed
11/22/2010	8:20:27 PM	H2 valve closed
11/22/2010	8:20:27 PM	BCl3 valve closed
11/22/2010	8:20:27 PM	PH3 valve closed
11/22/2010	8:20:27 PM	SiCl4 pre valve closed
11/22/2010	8:20:27 PM	SiCl4 post valve closed
11/22/2010	8:20:27 PM	Bubbler valve closed
11/22/2010	8:20:27 PM	Main Vac valve opened
11/22/2010	8:20:27 PM	Bypass valve opened
11/22/2010	8:20:27 PM	Helium MFC set to  0.000000
11/22/2010	8:20:27 PM	H2 MFC set to  0.000000
11/22/2010	8:20:27 PM	BCl3 MFC set to  0.000000
11/22/2010	8:20:27 PM	PHl3 MFC set to  0.000000
11/22/2010	8:20:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:20:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:20:27 PM	Tube furnace set to 0
11/22/2010	8:21:27 PM	H2 valve closed
11/22/2010	8:21:27 PM	BCl3 valve closed
11/22/2010	8:21:27 PM	PH3 valve closed
11/22/2010	8:21:27 PM	SiCl4 pre valve closed
11/22/2010	8:21:27 PM	SiCl4 post valve closed
11/22/2010	8:21:27 PM	Bubbler valve closed
11/22/2010	8:21:27 PM	Helium valve opened
11/22/2010	8:21:27 PM	Main Vac valve opened
11/22/2010	8:21:27 PM	Bypass valve opened
11/22/2010	8:21:27 PM	Helium MFC set to  100.000000
11/22/2010	8:21:27 PM	H2 MFC set to  0.000000
11/22/2010	8:21:27 PM	BCl3 MFC set to  0.000000
11/22/2010	8:21:27 PM	PHl3 MFC set to  0.000000
11/22/2010	8:21:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:21:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:21:27 PM	Tube furnace set to 0
11/22/2010	8:22:27 PM	Helium valve closed
11/22/2010	8:22:27 PM	H2 valve closed
11/22/2010	8:22:27 PM	BCl3 valve closed
11/22/2010	8:22:27 PM	PH3 valve closed
11/22/2010	8:22:27 PM	SiCl4 pre valve closed
11/22/2010	8:22:27 PM	SiCl4 post valve closed
11/22/2010	8:22:27 PM	Bubbler valve closed
11/22/2010	8:22:27 PM	Main Vac valve opened
11/22/2010	8:22:27 PM	Bypass valve opened
11/22/2010	8:22:27 PM	Helium MFC set to  0.000000
11/22/2010	8:22:27 PM	H2 MFC set to  0.000000
11/22/2010	8:22:27 PM	BCl3 MFC set to  0.000000
11/22/2010	8:22:27 PM	PHl3 MFC set to  0.000000
11/22/2010	8:22:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:22:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:22:27 PM	Tube furnace set to 0
11/22/2010	8:23:27 PM	H2 valve closed
11/22/2010	8:23:27 PM	BCl3 valve closed
11/22/2010	8:23:27 PM	PH3 valve closed
11/22/2010	8:23:27 PM	SiCl4 pre valve closed
11/22/2010	8:23:27 PM	SiCl4 post valve closed
11/22/2010	8:23:27 PM	Bubbler valve closed
11/22/2010	8:23:27 PM	Helium valve opened
11/22/2010	8:23:27 PM	Main Vac valve opened
11/22/2010	8:23:27 PM	Bypass valve opened
11/22/2010	8:23:27 PM	Helium MFC set to  100.000000
11/22/2010	8:23:27 PM	H2 MFC set to  0.000000
11/22/2010	8:23:27 PM	BCl3 MFC set to  0.000000
11/22/2010	8:23:27 PM	PHl3 MFC set to  0.000000
11/22/2010	8:23:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:23:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:23:27 PM	Tube furnace set to 0
11/22/2010	8:24:27 PM	Helium valve closed
11/22/2010	8:24:27 PM	H2 valve closed
11/22/2010	8:24:27 PM	BCl3 valve closed
11/22/2010	8:24:27 PM	PH3 valve closed
11/22/2010	8:24:27 PM	SiCl4 pre valve closed
11/22/2010	8:24:27 PM	SiCl4 post valve closed
11/22/2010	8:24:27 PM	Bubbler valve closed
11/22/2010	8:24:27 PM	Main Vac valve opened
11/22/2010	8:24:27 PM	Bypass valve opened
11/22/2010	8:24:27 PM	Helium MFC set to  0.000000
11/22/2010	8:24:27 PM	H2 MFC set to  0.000000
11/22/2010	8:24:27 PM	BCl3 MFC set to  0.000000
11/22/2010	8:24:27 PM	PHl3 MFC set to  0.000000
11/22/2010	8:24:27 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:24:27 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:24:28 PM	Tube furnace set to 0
11/22/2010	8:25:28 PM	H2 valve closed
11/22/2010	8:25:28 PM	BCl3 valve closed
11/22/2010	8:25:28 PM	PH3 valve closed
11/22/2010	8:25:28 PM	SiCl4 pre valve closed
11/22/2010	8:25:28 PM	SiCl4 post valve closed
11/22/2010	8:25:28 PM	Bubbler valve closed
11/22/2010	8:25:28 PM	Helium valve opened
11/22/2010	8:25:28 PM	Main Vac valve opened
11/22/2010	8:25:28 PM	Bypass valve opened
11/22/2010	8:25:28 PM	Helium MFC set to  100.000000
11/22/2010	8:25:28 PM	H2 MFC set to  0.000000
11/22/2010	8:25:28 PM	BCl3 MFC set to  0.000000
11/22/2010	8:25:28 PM	PHl3 MFC set to  0.000000
11/22/2010	8:25:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:25:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:25:28 PM	Tube furnace set to 0
11/22/2010	8:26:28 PM	Helium valve closed
11/22/2010	8:26:28 PM	H2 valve closed
11/22/2010	8:26:28 PM	BCl3 valve closed
11/22/2010	8:26:28 PM	PH3 valve closed
11/22/2010	8:26:28 PM	SiCl4 pre valve closed
11/22/2010	8:26:28 PM	SiCl4 post valve closed
11/22/2010	8:26:28 PM	Bubbler valve closed
11/22/2010	8:26:28 PM	Main Vac valve opened
11/22/2010	8:26:28 PM	Bypass valve opened
11/22/2010	8:26:28 PM	Helium MFC set to  0.000000
11/22/2010	8:26:28 PM	H2 MFC set to  0.000000
11/22/2010	8:26:28 PM	BCl3 MFC set to  0.000000
11/22/2010	8:26:28 PM	PHl3 MFC set to  0.000000
11/22/2010	8:26:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:26:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:26:28 PM	Tube furnace set to 0
11/22/2010	8:27:28 PM	H2 valve closed
11/22/2010	8:27:28 PM	BCl3 valve closed
11/22/2010	8:27:28 PM	PH3 valve closed
11/22/2010	8:27:28 PM	SiCl4 pre valve closed
11/22/2010	8:27:28 PM	SiCl4 post valve closed
11/22/2010	8:27:28 PM	Bubbler valve closed
11/22/2010	8:27:28 PM	Helium valve opened
11/22/2010	8:27:28 PM	Main Vac valve opened
11/22/2010	8:27:28 PM	Bypass valve opened
11/22/2010	8:27:28 PM	Helium MFC set to  100.000000
11/22/2010	8:27:28 PM	H2 MFC set to  0.000000
11/22/2010	8:27:28 PM	BCl3 MFC set to  0.000000
11/22/2010	8:27:28 PM	PHl3 MFC set to  0.000000
11/22/2010	8:27:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:27:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:27:28 PM	Tube furnace set to 0
11/22/2010	8:28:28 PM	Helium valve closed
11/22/2010	8:28:28 PM	H2 valve closed
11/22/2010	8:28:28 PM	BCl3 valve closed
11/22/2010	8:28:28 PM	PH3 valve closed
11/22/2010	8:28:28 PM	SiCl4 pre valve closed
11/22/2010	8:28:28 PM	SiCl4 post valve closed
11/22/2010	8:28:28 PM	Bubbler valve closed
11/22/2010	8:28:28 PM	Main Vac valve opened
11/22/2010	8:28:28 PM	Bypass valve opened
11/22/2010	8:28:28 PM	Helium MFC set to  0.000000
11/22/2010	8:28:28 PM	H2 MFC set to  0.000000
11/22/2010	8:28:28 PM	BCl3 MFC set to  0.000000
11/22/2010	8:28:28 PM	PHl3 MFC set to  0.000000
11/22/2010	8:28:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:28:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:28:28 PM	Tube furnace set to 0
11/22/2010	8:29:28 PM	H2 valve closed
11/22/2010	8:29:28 PM	BCl3 valve closed
11/22/2010	8:29:28 PM	PH3 valve closed
11/22/2010	8:29:28 PM	SiCl4 pre valve closed
11/22/2010	8:29:28 PM	SiCl4 post valve closed
11/22/2010	8:29:28 PM	Bubbler valve closed
11/22/2010	8:29:28 PM	Helium valve opened
11/22/2010	8:29:28 PM	Main Vac valve opened
11/22/2010	8:29:28 PM	Bypass valve opened
11/22/2010	8:29:28 PM	Helium MFC set to  100.000000
11/22/2010	8:29:28 PM	H2 MFC set to  0.000000
11/22/2010	8:29:28 PM	BCl3 MFC set to  0.000000
11/22/2010	8:29:28 PM	PHl3 MFC set to  0.000000
11/22/2010	8:29:28 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:29:28 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:29:29 PM	Tube furnace set to 0
11/22/2010	8:30:16 PM	Helium valve closed
11/22/2010	8:30:16 PM	H2 valve closed
11/22/2010	8:30:16 PM	BCl3 valve closed
11/22/2010	8:30:16 PM	PH3 valve closed
11/22/2010	8:30:16 PM	SiCl4 pre valve closed
11/22/2010	8:30:16 PM	SiCl4 post valve closed
11/22/2010	8:30:16 PM	Bubbler valve closed
11/22/2010	8:30:16 PM	Main Vac valve opened
11/22/2010	8:30:16 PM	Bypass valve opened
11/22/2010	8:30:16 PM	Helium MFC set to  0.000000
11/22/2010	8:30:16 PM	H2 MFC set to  0.000000
11/22/2010	8:30:16 PM	BCl3 MFC set to  0.000000
11/22/2010	8:30:16 PM	PHl3 MFC set to  0.000000
11/22/2010	8:30:16 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:30:16 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:30:16 PM	Tube furnace set to 0
11/22/2010	8:31:00 PM	Run aborted at 8:31 PM
11/22/2010	8:31:00 PM	Helium valve closed
11/22/2010	8:31:00 PM	H2 valve closed
11/22/2010	8:31:00 PM	BCl3 valve closed
11/22/2010	8:31:00 PM	PH3 valve closed
11/22/2010	8:31:00 PM	SiCl4 pre valve closed
11/22/2010	8:31:00 PM	SiCl4 post valve closed
11/22/2010	8:31:00 PM	Bypass valve closed
11/22/2010	8:31:00 PM	Main Vac valve closed
11/22/2010	8:31:00 PM	Bubbler valve closed
11/22/2010	8:31:00 PM	Helium MFC set to  0.000000
11/22/2010	8:31:00 PM	H2 MFC set to  0.000000
11/22/2010	8:31:00 PM	BCl3 MFC set to  0.000000
11/22/2010	8:31:00 PM	PHl3 MFC set to  0.000000
11/22/2010	8:31:00 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:31:00 PM	Tube furnace set to 0
11/22/2010	8:31:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	8:31:10 PM	Bypass valve opened
11/22/2010	8:31:11 PM	Main Vac valve opened
11/22/2010	8:31:25 PM	Recipe started at 8:31 PM
11/22/2010	8:31:25 PM	Helium valve closed
11/22/2010	8:31:25 PM	BCl3 valve closed
11/22/2010	8:31:25 PM	PH3 valve closed
11/22/2010	8:31:25 PM	SiCl4 pre valve closed
11/22/2010	8:31:25 PM	SiCl4 post valve closed
11/22/2010	8:31:25 PM	Main Vac valve closed
11/22/2010	8:31:25 PM	Bypass valve closed
11/22/2010	8:31:25 PM	Bubbler valve closed
11/22/2010	8:31:25 PM	H2 valve opened
11/22/2010	8:31:25 PM	Helium MFC set to  0.000000
11/22/2010	8:31:25 PM	H2 MFC set to  500.000000
11/22/2010	8:31:25 PM	BCl3 MFC set to  0.000000
11/22/2010	8:31:25 PM	PHl3 MFC set to  0.000000
11/22/2010	8:31:25 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:31:25 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:31:25 PM	Tube furnace set to 0
11/22/2010	8:32:42 PM	Helium valve closed
11/22/2010	8:32:42 PM	BCl3 valve closed
11/22/2010	8:32:42 PM	PH3 valve closed
11/22/2010	8:32:42 PM	SiCl4 pre valve closed
11/22/2010	8:32:42 PM	SiCl4 post valve closed
11/22/2010	8:32:42 PM	Main Vac valve closed
11/22/2010	8:32:42 PM	Bypass valve closed
11/22/2010	8:32:42 PM	H2 valve opened
11/22/2010	8:32:42 PM	Bubbler valve opened
11/22/2010	8:32:42 PM	Helium MFC set to  0.000000
11/22/2010	8:32:42 PM	H2 MFC set to  500.000000
11/22/2010	8:32:42 PM	BCl3 MFC set to  0.000000
11/22/2010	8:32:42 PM	PHl3 MFC set to  0.000000
11/22/2010	8:32:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	8:32:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:32:42 PM	Tube furnace set to 1000
11/22/2010	8:52:42 PM	Helium valve closed
11/22/2010	8:52:42 PM	PH3 valve closed
11/22/2010	8:52:42 PM	Main Vac valve closed
11/22/2010	8:52:42 PM	Bypass valve closed
11/22/2010	8:52:42 PM	H2 valve opened
11/22/2010	8:52:42 PM	BCl3 valve opened
11/22/2010	8:52:42 PM	SiCl4 pre valve opened
11/22/2010	8:52:42 PM	SiCl4 post valve opened
11/22/2010	8:52:42 PM	Bubbler valve opened
11/22/2010	8:52:42 PM	Helium MFC set to  0.000000
11/22/2010	8:52:42 PM	H2 MFC set to  500.000000
11/22/2010	8:52:42 PM	BCl3 MFC set to  12.000000
11/22/2010	8:52:42 PM	PHl3 MFC set to  0.000000
11/22/2010	8:52:42 PM	SiCl4 MFC set to  50.000000
11/22/2010	8:52:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	8:52:43 PM	Tube furnace set to 1000
11/22/2010	9:07:43 PM	H2 valve closed
11/22/2010	9:07:43 PM	BCl3 valve closed
11/22/2010	9:07:43 PM	PH3 valve closed
11/22/2010	9:07:43 PM	SiCl4 pre valve closed
11/22/2010	9:07:43 PM	SiCl4 post valve closed
11/22/2010	9:07:43 PM	Main Vac valve closed
11/22/2010	9:07:43 PM	Bypass valve closed
11/22/2010	9:07:43 PM	Helium valve opened
11/22/2010	9:07:43 PM	Bubbler valve opened
11/22/2010	9:07:43 PM	Helium MFC set to  500.000000
11/22/2010	9:07:43 PM	H2 MFC set to  0.000000
11/22/2010	9:07:43 PM	BCl3 MFC set to  0.000000
11/22/2010	9:07:43 PM	PHl3 MFC set to  0.000000
11/22/2010	9:07:43 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:07:43 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:07:43 PM	Tube furnace set to 950
11/22/2010	9:12:43 PM	H2 valve closed
11/22/2010	9:12:43 PM	BCl3 valve closed
11/22/2010	9:12:43 PM	PH3 valve closed
11/22/2010	9:12:43 PM	SiCl4 pre valve closed
11/22/2010	9:12:43 PM	SiCl4 post valve closed
11/22/2010	9:12:43 PM	Main Vac valve closed
11/22/2010	9:12:43 PM	Bypass valve closed
11/22/2010	9:12:43 PM	Helium valve opened
11/22/2010	9:12:43 PM	Bubbler valve opened
11/22/2010	9:12:43 PM	Helium MFC set to  500.000000
11/22/2010	9:12:43 PM	H2 MFC set to  0.000000
11/22/2010	9:12:43 PM	BCl3 MFC set to  0.000000
11/22/2010	9:12:43 PM	PHl3 MFC set to  0.000000
11/22/2010	9:12:43 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:12:43 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:12:43 PM	Tube furnace set to 900
11/22/2010	9:17:43 PM	H2 valve closed
11/22/2010	9:17:43 PM	BCl3 valve closed
11/22/2010	9:17:43 PM	PH3 valve closed
11/22/2010	9:17:43 PM	SiCl4 pre valve closed
11/22/2010	9:17:43 PM	SiCl4 post valve closed
11/22/2010	9:17:43 PM	Main Vac valve closed
11/22/2010	9:17:43 PM	Bypass valve closed
11/22/2010	9:17:43 PM	Helium valve opened
11/22/2010	9:17:43 PM	Bubbler valve opened
11/22/2010	9:17:43 PM	Helium MFC set to  500.000000
11/22/2010	9:17:43 PM	H2 MFC set to  0.000000
11/22/2010	9:17:43 PM	BCl3 MFC set to  0.000000
11/22/2010	9:17:43 PM	PHl3 MFC set to  0.000000
11/22/2010	9:17:43 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:17:43 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:17:43 PM	Tube furnace set to 850
11/22/2010	9:22:43 PM	H2 valve closed
11/22/2010	9:22:43 PM	BCl3 valve closed
11/22/2010	9:22:43 PM	PH3 valve closed
11/22/2010	9:22:43 PM	SiCl4 pre valve closed
11/22/2010	9:22:43 PM	SiCl4 post valve closed
11/22/2010	9:22:43 PM	Main Vac valve closed
11/22/2010	9:22:43 PM	Bypass valve closed
11/22/2010	9:22:43 PM	Helium valve opened
11/22/2010	9:22:43 PM	Bubbler valve opened
11/22/2010	9:22:43 PM	Helium MFC set to  500.000000
11/22/2010	9:22:43 PM	H2 MFC set to  0.000000
11/22/2010	9:22:43 PM	BCl3 MFC set to  0.000000
11/22/2010	9:22:43 PM	PHl3 MFC set to  0.000000
11/22/2010	9:22:43 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:22:43 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:22:43 PM	Tube furnace set to 800
11/22/2010	9:27:43 PM	H2 valve closed
11/22/2010	9:27:43 PM	BCl3 valve closed
11/22/2010	9:27:43 PM	PH3 valve closed
11/22/2010	9:27:43 PM	SiCl4 pre valve closed
11/22/2010	9:27:43 PM	SiCl4 post valve closed
11/22/2010	9:27:43 PM	Main Vac valve closed
11/22/2010	9:27:43 PM	Bypass valve closed
11/22/2010	9:27:43 PM	Helium valve opened
11/22/2010	9:27:43 PM	Bubbler valve opened
11/22/2010	9:27:43 PM	Helium MFC set to  500.000000
11/22/2010	9:27:43 PM	H2 MFC set to  0.000000
11/22/2010	9:27:43 PM	BCl3 MFC set to  0.000000
11/22/2010	9:27:43 PM	PHl3 MFC set to  0.000000
11/22/2010	9:27:43 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:27:43 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:27:43 PM	Tube furnace set to 750
11/22/2010	9:32:43 PM	H2 valve closed
11/22/2010	9:32:43 PM	BCl3 valve closed
11/22/2010	9:32:43 PM	PH3 valve closed
11/22/2010	9:32:43 PM	SiCl4 pre valve closed
11/22/2010	9:32:44 PM	SiCl4 post valve closed
11/22/2010	9:32:44 PM	Main Vac valve closed
11/22/2010	9:32:44 PM	Bypass valve closed
11/22/2010	9:32:44 PM	Helium valve opened
11/22/2010	9:32:44 PM	Bubbler valve opened
11/22/2010	9:32:44 PM	Helium MFC set to  500.000000
11/22/2010	9:32:44 PM	H2 MFC set to  0.000000
11/22/2010	9:32:44 PM	BCl3 MFC set to  0.000000
11/22/2010	9:32:44 PM	PHl3 MFC set to  0.000000
11/22/2010	9:32:44 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:32:44 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:32:44 PM	Tube furnace set to 700
11/22/2010	9:37:44 PM	H2 valve closed
11/22/2010	9:37:44 PM	BCl3 valve closed
11/22/2010	9:37:44 PM	PH3 valve closed
11/22/2010	9:37:44 PM	SiCl4 pre valve closed
11/22/2010	9:37:44 PM	SiCl4 post valve closed
11/22/2010	9:37:44 PM	Main Vac valve closed
11/22/2010	9:37:44 PM	Bypass valve closed
11/22/2010	9:37:44 PM	Helium valve opened
11/22/2010	9:37:44 PM	Bubbler valve opened
11/22/2010	9:37:44 PM	Helium MFC set to  500.000000
11/22/2010	9:37:44 PM	H2 MFC set to  0.000000
11/22/2010	9:37:44 PM	BCl3 MFC set to  0.000000
11/22/2010	9:37:44 PM	PHl3 MFC set to  0.000000
11/22/2010	9:37:44 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:37:44 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:37:44 PM	Tube furnace set to 0
11/22/2010	9:53:24 PM	Run aborted at 9:53 PM
11/22/2010	9:53:24 PM	Helium valve closed
11/22/2010	9:53:24 PM	H2 valve closed
11/22/2010	9:53:24 PM	BCl3 valve closed
11/22/2010	9:53:24 PM	PH3 valve closed
11/22/2010	9:53:24 PM	SiCl4 pre valve closed
11/22/2010	9:53:24 PM	SiCl4 post valve closed
11/22/2010	9:53:24 PM	Bypass valve closed
11/22/2010	9:53:24 PM	Main Vac valve closed
11/22/2010	9:53:24 PM	Bubbler valve closed
11/22/2010	9:53:24 PM	Helium MFC set to  0.000000
11/22/2010	9:53:24 PM	H2 MFC set to  0.000000
11/22/2010	9:53:24 PM	BCl3 MFC set to  0.000000
11/22/2010	9:53:24 PM	PHl3 MFC set to  0.000000
11/22/2010	9:53:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:53:24 PM	Tube furnace set to 0
11/22/2010	9:57:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	9:57:07 PM	Recipe started at 9:57 PM
11/22/2010	9:57:07 PM	Helium valve closed
11/22/2010	9:57:07 PM	H2 valve closed
11/22/2010	9:57:07 PM	BCl3 valve closed
11/22/2010	9:57:07 PM	PH3 valve closed
11/22/2010	9:57:07 PM	SiCl4 pre valve closed
11/22/2010	9:57:07 PM	SiCl4 post valve closed
11/22/2010	9:57:07 PM	Main Vac valve closed
11/22/2010	9:57:07 PM	Bubbler valve closed
11/22/2010	9:57:07 PM	Bypass valve opened
11/22/2010	9:57:07 PM	Helium MFC set to  0.000000
11/22/2010	9:57:07 PM	H2 MFC set to  0.000000
11/22/2010	9:57:07 PM	BCl3 MFC set to  0.000000
11/22/2010	9:57:07 PM	PHl3 MFC set to  0.000000
11/22/2010	9:57:07 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:57:07 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:57:07 PM	Tube furnace set to 0
11/22/2010	9:57:58 PM	Helium valve closed
11/22/2010	9:57:58 PM	H2 valve closed
11/22/2010	9:57:58 PM	BCl3 valve closed
11/22/2010	9:57:58 PM	PH3 valve closed
11/22/2010	9:57:58 PM	SiCl4 pre valve closed
11/22/2010	9:57:58 PM	SiCl4 post valve closed
11/22/2010	9:57:58 PM	Bubbler valve closed
11/22/2010	9:57:58 PM	Main Vac valve opened
11/22/2010	9:57:58 PM	Bypass valve opened
11/22/2010	9:57:58 PM	Helium MFC set to  0.000000
11/22/2010	9:57:58 PM	H2 MFC set to  0.000000
11/22/2010	9:57:58 PM	BCl3 MFC set to  0.000000
11/22/2010	9:57:58 PM	PHl3 MFC set to  0.000000
11/22/2010	9:57:58 PM	SiCl4 MFC set to  0.000000
11/22/2010	9:57:58 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	9:57:59 PM	Tube furnace set to 0
11/22/2010	9:57:59 PM	Run finished at 9:57 PM
11/22/2010	9:57:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	10:11:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:11:49 PM	Recipe started at 10:11 PM
11/22/2010	10:11:49 PM	Helium valve closed
11/22/2010	10:11:49 PM	H2 valve closed
11/22/2010	10:11:49 PM	BCl3 valve closed
11/22/2010	10:11:49 PM	PH3 valve closed
11/22/2010	10:11:49 PM	SiCl4 pre valve closed
11/22/2010	10:11:49 PM	SiCl4 post valve closed
11/22/2010	10:11:49 PM	Main Vac valve closed
11/22/2010	10:11:49 PM	Bubbler valve closed
11/22/2010	10:11:49 PM	Bypass valve opened
11/22/2010	10:11:49 PM	Helium MFC set to  0.000000
11/22/2010	10:11:49 PM	H2 MFC set to  0.000000
11/22/2010	10:11:49 PM	BCl3 MFC set to  0.000000
11/22/2010	10:11:49 PM	PHl3 MFC set to  0.000000
11/22/2010	10:11:49 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:11:49 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:11:49 PM	Tube furnace set to 0
11/22/2010	10:11:49 PM	Helium valve closed
11/22/2010	10:11:49 PM	H2 valve closed
11/22/2010	10:11:49 PM	BCl3 valve closed
11/22/2010	10:11:49 PM	PH3 valve closed
11/22/2010	10:11:49 PM	SiCl4 pre valve closed
11/22/2010	10:11:49 PM	SiCl4 post valve closed
11/22/2010	10:11:49 PM	Bubbler valve closed
11/22/2010	10:11:49 PM	Main Vac valve opened
11/22/2010	10:11:49 PM	Bypass valve opened
11/22/2010	10:11:49 PM	Helium MFC set to  0.000000
11/22/2010	10:11:49 PM	H2 MFC set to  0.000000
11/22/2010	10:11:49 PM	BCl3 MFC set to  0.000000
11/22/2010	10:11:49 PM	PHl3 MFC set to  0.000000
11/22/2010	10:11:49 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:11:49 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:11:50 PM	Tube furnace set to 0
11/22/2010	10:12:50 PM	H2 valve closed
11/22/2010	10:12:50 PM	BCl3 valve closed
11/22/2010	10:12:50 PM	PH3 valve closed
11/22/2010	10:12:50 PM	SiCl4 pre valve closed
11/22/2010	10:12:50 PM	SiCl4 post valve closed
11/22/2010	10:12:50 PM	Bubbler valve closed
11/22/2010	10:12:50 PM	Helium valve opened
11/22/2010	10:12:50 PM	Main Vac valve opened
11/22/2010	10:12:50 PM	Bypass valve opened
11/22/2010	10:12:50 PM	Helium MFC set to  100.000000
11/22/2010	10:12:50 PM	H2 MFC set to  0.000000
11/22/2010	10:12:50 PM	BCl3 MFC set to  0.000000
11/22/2010	10:12:50 PM	PHl3 MFC set to  0.000000
11/22/2010	10:12:50 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:12:50 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:12:50 PM	Tube furnace set to 0
11/22/2010	10:13:50 PM	Helium valve closed
11/22/2010	10:13:50 PM	H2 valve closed
11/22/2010	10:13:50 PM	BCl3 valve closed
11/22/2010	10:13:50 PM	PH3 valve closed
11/22/2010	10:13:50 PM	SiCl4 pre valve closed
11/22/2010	10:13:50 PM	SiCl4 post valve closed
11/22/2010	10:13:50 PM	Bubbler valve closed
11/22/2010	10:13:50 PM	Main Vac valve opened
11/22/2010	10:13:50 PM	Bypass valve opened
11/22/2010	10:13:50 PM	Helium MFC set to  0.000000
11/22/2010	10:13:50 PM	H2 MFC set to  0.000000
11/22/2010	10:13:50 PM	BCl3 MFC set to  0.000000
11/22/2010	10:13:50 PM	PHl3 MFC set to  0.000000
11/22/2010	10:13:50 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:13:50 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:13:50 PM	Tube furnace set to 0
11/22/2010	10:14:50 PM	H2 valve closed
11/22/2010	10:14:50 PM	BCl3 valve closed
11/22/2010	10:14:50 PM	PH3 valve closed
11/22/2010	10:14:50 PM	SiCl4 pre valve closed
11/22/2010	10:14:50 PM	SiCl4 post valve closed
11/22/2010	10:14:50 PM	Bubbler valve closed
11/22/2010	10:14:50 PM	Helium valve opened
11/22/2010	10:14:50 PM	Main Vac valve opened
11/22/2010	10:14:50 PM	Bypass valve opened
11/22/2010	10:14:50 PM	Helium MFC set to  100.000000
11/22/2010	10:14:50 PM	H2 MFC set to  0.000000
11/22/2010	10:14:50 PM	BCl3 MFC set to  0.000000
11/22/2010	10:14:50 PM	PHl3 MFC set to  0.000000
11/22/2010	10:14:50 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:14:50 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:14:50 PM	Tube furnace set to 0
11/22/2010	10:15:50 PM	Helium valve closed
11/22/2010	10:15:50 PM	H2 valve closed
11/22/2010	10:15:50 PM	BCl3 valve closed
11/22/2010	10:15:50 PM	PH3 valve closed
11/22/2010	10:15:50 PM	SiCl4 pre valve closed
11/22/2010	10:15:50 PM	SiCl4 post valve closed
11/22/2010	10:15:50 PM	Bubbler valve closed
11/22/2010	10:15:50 PM	Main Vac valve opened
11/22/2010	10:15:50 PM	Bypass valve opened
11/22/2010	10:15:50 PM	Helium MFC set to  0.000000
11/22/2010	10:15:50 PM	H2 MFC set to  0.000000
11/22/2010	10:15:50 PM	BCl3 MFC set to  0.000000
11/22/2010	10:15:50 PM	PHl3 MFC set to  0.000000
11/22/2010	10:15:50 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:15:50 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:15:50 PM	Tube furnace set to 0
11/22/2010	10:16:50 PM	H2 valve closed
11/22/2010	10:16:50 PM	BCl3 valve closed
11/22/2010	10:16:50 PM	PH3 valve closed
11/22/2010	10:16:50 PM	SiCl4 pre valve closed
11/22/2010	10:16:50 PM	SiCl4 post valve closed
11/22/2010	10:16:50 PM	Bubbler valve closed
11/22/2010	10:16:50 PM	Helium valve opened
11/22/2010	10:16:50 PM	Main Vac valve opened
11/22/2010	10:16:50 PM	Bypass valve opened
11/22/2010	10:16:50 PM	Helium MFC set to  100.000000
11/22/2010	10:16:50 PM	H2 MFC set to  0.000000
11/22/2010	10:16:50 PM	BCl3 MFC set to  0.000000
11/22/2010	10:16:50 PM	PHl3 MFC set to  0.000000
11/22/2010	10:16:50 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:16:50 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:16:51 PM	Tube furnace set to 0
11/22/2010	10:17:51 PM	Helium valve closed
11/22/2010	10:17:51 PM	H2 valve closed
11/22/2010	10:17:51 PM	BCl3 valve closed
11/22/2010	10:17:51 PM	PH3 valve closed
11/22/2010	10:17:51 PM	SiCl4 pre valve closed
11/22/2010	10:17:51 PM	SiCl4 post valve closed
11/22/2010	10:17:51 PM	Bubbler valve closed
11/22/2010	10:17:51 PM	Main Vac valve opened
11/22/2010	10:17:51 PM	Bypass valve opened
11/22/2010	10:17:51 PM	Helium MFC set to  0.000000
11/22/2010	10:17:51 PM	H2 MFC set to  0.000000
11/22/2010	10:17:51 PM	BCl3 MFC set to  0.000000
11/22/2010	10:17:51 PM	PHl3 MFC set to  0.000000
11/22/2010	10:17:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:17:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:17:51 PM	Tube furnace set to 0
11/22/2010	10:18:51 PM	H2 valve closed
11/22/2010	10:18:51 PM	BCl3 valve closed
11/22/2010	10:18:51 PM	PH3 valve closed
11/22/2010	10:18:51 PM	SiCl4 pre valve closed
11/22/2010	10:18:51 PM	SiCl4 post valve closed
11/22/2010	10:18:51 PM	Bubbler valve closed
11/22/2010	10:18:51 PM	Helium valve opened
11/22/2010	10:18:51 PM	Main Vac valve opened
11/22/2010	10:18:51 PM	Bypass valve opened
11/22/2010	10:18:51 PM	Helium MFC set to  100.000000
11/22/2010	10:18:51 PM	H2 MFC set to  0.000000
11/22/2010	10:18:51 PM	BCl3 MFC set to  0.000000
11/22/2010	10:18:51 PM	PHl3 MFC set to  0.000000
11/22/2010	10:18:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:18:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:18:51 PM	Tube furnace set to 0
11/22/2010	10:19:51 PM	Helium valve closed
11/22/2010	10:19:51 PM	H2 valve closed
11/22/2010	10:19:51 PM	BCl3 valve closed
11/22/2010	10:19:51 PM	PH3 valve closed
11/22/2010	10:19:51 PM	SiCl4 pre valve closed
11/22/2010	10:19:51 PM	SiCl4 post valve closed
11/22/2010	10:19:51 PM	Bubbler valve closed
11/22/2010	10:19:51 PM	Main Vac valve opened
11/22/2010	10:19:51 PM	Bypass valve opened
11/22/2010	10:19:51 PM	Helium MFC set to  0.000000
11/22/2010	10:19:51 PM	H2 MFC set to  0.000000
11/22/2010	10:19:51 PM	BCl3 MFC set to  0.000000
11/22/2010	10:19:51 PM	PHl3 MFC set to  0.000000
11/22/2010	10:19:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:19:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:19:51 PM	Tube furnace set to 0
11/22/2010	10:20:51 PM	H2 valve closed
11/22/2010	10:20:51 PM	BCl3 valve closed
11/22/2010	10:20:51 PM	PH3 valve closed
11/22/2010	10:20:51 PM	SiCl4 pre valve closed
11/22/2010	10:20:51 PM	SiCl4 post valve closed
11/22/2010	10:20:51 PM	Bubbler valve closed
11/22/2010	10:20:51 PM	Helium valve opened
11/22/2010	10:20:51 PM	Main Vac valve opened
11/22/2010	10:20:51 PM	Bypass valve opened
11/22/2010	10:20:51 PM	Helium MFC set to  100.000000
11/22/2010	10:20:51 PM	H2 MFC set to  0.000000
11/22/2010	10:20:51 PM	BCl3 MFC set to  0.000000
11/22/2010	10:20:51 PM	PHl3 MFC set to  0.000000
11/22/2010	10:20:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:20:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:20:51 PM	Tube furnace set to 0
11/22/2010	10:21:20 PM	Helium valve closed
11/22/2010	10:21:20 PM	H2 valve closed
11/22/2010	10:21:20 PM	BCl3 valve closed
11/22/2010	10:21:20 PM	PH3 valve closed
11/22/2010	10:21:20 PM	SiCl4 pre valve closed
11/22/2010	10:21:20 PM	SiCl4 post valve closed
11/22/2010	10:21:20 PM	Bubbler valve closed
11/22/2010	10:21:20 PM	Main Vac valve opened
11/22/2010	10:21:20 PM	Bypass valve opened
11/22/2010	10:21:20 PM	Helium MFC set to  0.000000
11/22/2010	10:21:20 PM	H2 MFC set to  0.000000
11/22/2010	10:21:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:21:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:21:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:21:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:21:20 PM	Tube furnace set to 0
11/22/2010	10:22:20 PM	H2 valve closed
11/22/2010	10:22:20 PM	BCl3 valve closed
11/22/2010	10:22:20 PM	PH3 valve closed
11/22/2010	10:22:20 PM	SiCl4 pre valve closed
11/22/2010	10:22:20 PM	SiCl4 post valve closed
11/22/2010	10:22:20 PM	Bubbler valve closed
11/22/2010	10:22:20 PM	Helium valve opened
11/22/2010	10:22:20 PM	Main Vac valve opened
11/22/2010	10:22:20 PM	Bypass valve opened
11/22/2010	10:22:20 PM	Helium MFC set to  100.000000
11/22/2010	10:22:20 PM	H2 MFC set to  0.000000
11/22/2010	10:22:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:22:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:22:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:22:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:22:20 PM	Tube furnace set to 0
11/22/2010	10:23:20 PM	Helium valve closed
11/22/2010	10:23:20 PM	H2 valve closed
11/22/2010	10:23:20 PM	BCl3 valve closed
11/22/2010	10:23:20 PM	PH3 valve closed
11/22/2010	10:23:20 PM	SiCl4 pre valve closed
11/22/2010	10:23:20 PM	SiCl4 post valve closed
11/22/2010	10:23:20 PM	Bubbler valve closed
11/22/2010	10:23:20 PM	Main Vac valve opened
11/22/2010	10:23:21 PM	Bypass valve opened
11/22/2010	10:23:21 PM	Helium MFC set to  0.000000
11/22/2010	10:23:21 PM	H2 MFC set to  0.000000
11/22/2010	10:23:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:23:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:23:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:23:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:23:21 PM	Tube furnace set to 0
11/22/2010	10:24:21 PM	H2 valve closed
11/22/2010	10:24:21 PM	BCl3 valve closed
11/22/2010	10:24:21 PM	PH3 valve closed
11/22/2010	10:24:21 PM	SiCl4 pre valve closed
11/22/2010	10:24:21 PM	SiCl4 post valve closed
11/22/2010	10:24:21 PM	Bubbler valve closed
11/22/2010	10:24:21 PM	Helium valve opened
11/22/2010	10:24:21 PM	Main Vac valve opened
11/22/2010	10:24:21 PM	Bypass valve opened
11/22/2010	10:24:21 PM	Helium MFC set to  100.000000
11/22/2010	10:24:21 PM	H2 MFC set to  0.000000
11/22/2010	10:24:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:24:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:24:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:24:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:24:21 PM	Tube furnace set to 0
11/22/2010	10:25:21 PM	Helium valve closed
11/22/2010	10:25:21 PM	H2 valve closed
11/22/2010	10:25:21 PM	BCl3 valve closed
11/22/2010	10:25:21 PM	PH3 valve closed
11/22/2010	10:25:21 PM	SiCl4 pre valve closed
11/22/2010	10:25:21 PM	SiCl4 post valve closed
11/22/2010	10:25:21 PM	Bubbler valve closed
11/22/2010	10:25:21 PM	Main Vac valve opened
11/22/2010	10:25:21 PM	Bypass valve opened
11/22/2010	10:25:21 PM	Helium MFC set to  0.000000
11/22/2010	10:25:21 PM	H2 MFC set to  0.000000
11/22/2010	10:25:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:25:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:25:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:25:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:25:21 PM	Tube furnace set to 0
11/22/2010	10:26:21 PM	H2 valve closed
11/22/2010	10:26:21 PM	BCl3 valve closed
11/22/2010	10:26:21 PM	PH3 valve closed
11/22/2010	10:26:21 PM	SiCl4 pre valve closed
11/22/2010	10:26:21 PM	SiCl4 post valve closed
11/22/2010	10:26:21 PM	Bubbler valve closed
11/22/2010	10:26:21 PM	Helium valve opened
11/22/2010	10:26:21 PM	Main Vac valve opened
11/22/2010	10:26:21 PM	Bypass valve opened
11/22/2010	10:26:21 PM	Helium MFC set to  100.000000
11/22/2010	10:26:21 PM	H2 MFC set to  0.000000
11/22/2010	10:26:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:26:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:26:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:26:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:26:21 PM	Tube furnace set to 0
11/22/2010	10:27:21 PM	Helium valve closed
11/22/2010	10:27:21 PM	H2 valve closed
11/22/2010	10:27:21 PM	BCl3 valve closed
11/22/2010	10:27:21 PM	PH3 valve closed
11/22/2010	10:27:21 PM	SiCl4 pre valve closed
11/22/2010	10:27:21 PM	SiCl4 post valve closed
11/22/2010	10:27:21 PM	Bubbler valve closed
11/22/2010	10:27:21 PM	Main Vac valve opened
11/22/2010	10:27:21 PM	Bypass valve opened
11/22/2010	10:27:21 PM	Helium MFC set to  0.000000
11/22/2010	10:27:21 PM	H2 MFC set to  0.000000
11/22/2010	10:27:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:27:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:27:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:27:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:27:21 PM	Tube furnace set to 0
11/22/2010	10:28:21 PM	H2 valve closed
11/22/2010	10:28:21 PM	BCl3 valve closed
11/22/2010	10:28:21 PM	PH3 valve closed
11/22/2010	10:28:21 PM	SiCl4 pre valve closed
11/22/2010	10:28:21 PM	SiCl4 post valve closed
11/22/2010	10:28:21 PM	Bubbler valve closed
11/22/2010	10:28:21 PM	Helium valve opened
11/22/2010	10:28:21 PM	Main Vac valve opened
11/22/2010	10:28:21 PM	Bypass valve opened
11/22/2010	10:28:21 PM	Helium MFC set to  100.000000
11/22/2010	10:28:21 PM	H2 MFC set to  0.000000
11/22/2010	10:28:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:28:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:28:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:28:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:28:22 PM	Tube furnace set to 0
11/22/2010	10:29:22 PM	Helium valve closed
11/22/2010	10:29:22 PM	H2 valve closed
11/22/2010	10:29:22 PM	BCl3 valve closed
11/22/2010	10:29:22 PM	PH3 valve closed
11/22/2010	10:29:22 PM	SiCl4 pre valve closed
11/22/2010	10:29:22 PM	SiCl4 post valve closed
11/22/2010	10:29:22 PM	Bubbler valve closed
11/22/2010	10:29:22 PM	Main Vac valve opened
11/22/2010	10:29:22 PM	Bypass valve opened
11/22/2010	10:29:22 PM	Helium MFC set to  0.000000
11/22/2010	10:29:22 PM	H2 MFC set to  0.000000
11/22/2010	10:29:22 PM	BCl3 MFC set to  0.000000
11/22/2010	10:29:22 PM	PHl3 MFC set to  0.000000
11/22/2010	10:29:22 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:29:22 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:29:22 PM	Tube furnace set to 0
11/22/2010	10:30:22 PM	H2 valve closed
11/22/2010	10:30:22 PM	BCl3 valve closed
11/22/2010	10:30:22 PM	PH3 valve closed
11/22/2010	10:30:22 PM	SiCl4 pre valve closed
11/22/2010	10:30:22 PM	SiCl4 post valve closed
11/22/2010	10:30:22 PM	Bubbler valve closed
11/22/2010	10:30:22 PM	Helium valve opened
11/22/2010	10:30:22 PM	Main Vac valve opened
11/22/2010	10:30:22 PM	Bypass valve opened
11/22/2010	10:30:22 PM	Helium MFC set to  100.000000
11/22/2010	10:30:22 PM	H2 MFC set to  0.000000
11/22/2010	10:30:22 PM	BCl3 MFC set to  0.000000
11/22/2010	10:30:22 PM	PHl3 MFC set to  0.000000
11/22/2010	10:30:22 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:30:22 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:30:22 PM	Tube furnace set to 0
11/22/2010	10:31:22 PM	Helium valve closed
11/22/2010	10:31:22 PM	H2 valve closed
11/22/2010	10:31:22 PM	BCl3 valve closed
11/22/2010	10:31:22 PM	PH3 valve closed
11/22/2010	10:31:22 PM	SiCl4 pre valve closed
11/22/2010	10:31:22 PM	SiCl4 post valve closed
11/22/2010	10:31:22 PM	Bubbler valve closed
11/22/2010	10:31:22 PM	Main Vac valve opened
11/22/2010	10:31:22 PM	Bypass valve opened
11/22/2010	10:31:22 PM	Helium MFC set to  0.000000
11/22/2010	10:31:22 PM	H2 MFC set to  0.000000
11/22/2010	10:31:22 PM	BCl3 MFC set to  0.000000
11/22/2010	10:31:22 PM	PHl3 MFC set to  0.000000
11/22/2010	10:31:22 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:31:22 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:31:22 PM	Tube furnace set to 0
11/22/2010	10:31:23 PM	Run finished at 10:31 PM
11/22/2010	10:31:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:36:58 PM	Bypass valve closed
11/22/2010	10:36:58 PM	Main Vac valve closed
11/22/2010	10:37:05 PM	Bypass valve opened
11/22/2010	10:37:06 PM	Main Vac valve opened
11/22/2010	10:37:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:37:18 PM	Recipe started at 10:37 PM
11/22/2010	10:37:18 PM	Helium valve closed
11/22/2010	10:37:18 PM	H2 valve closed
11/22/2010	10:37:18 PM	BCl3 valve closed
11/22/2010	10:37:18 PM	PH3 valve closed
11/22/2010	10:37:18 PM	SiCl4 pre valve closed
11/22/2010	10:37:18 PM	SiCl4 post valve closed
11/22/2010	10:37:18 PM	Main Vac valve closed
11/22/2010	10:37:18 PM	Bubbler valve closed
11/22/2010	10:37:18 PM	Bypass valve opened
11/22/2010	10:37:18 PM	Helium MFC set to  0.000000
11/22/2010	10:37:18 PM	H2 MFC set to  0.000000
11/22/2010	10:37:18 PM	BCl3 MFC set to  0.000000
11/22/2010	10:37:18 PM	PHl3 MFC set to  0.000000
11/22/2010	10:37:18 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:37:18 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:37:19 PM	Tube furnace set to 0
11/22/2010	10:37:19 PM	Helium valve closed
11/22/2010	10:37:19 PM	H2 valve closed
11/22/2010	10:37:19 PM	BCl3 valve closed
11/22/2010	10:37:19 PM	PH3 valve closed
11/22/2010	10:37:19 PM	SiCl4 pre valve closed
11/22/2010	10:37:19 PM	SiCl4 post valve closed
11/22/2010	10:37:19 PM	Bubbler valve closed
11/22/2010	10:37:19 PM	Main Vac valve opened
11/22/2010	10:37:19 PM	Bypass valve opened
11/22/2010	10:37:19 PM	Helium MFC set to  0.000000
11/22/2010	10:37:19 PM	H2 MFC set to  0.000000
11/22/2010	10:37:19 PM	BCl3 MFC set to  0.000000
11/22/2010	10:37:19 PM	PHl3 MFC set to  0.000000
11/22/2010	10:37:19 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:37:19 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:37:19 PM	Tube furnace set to 0
11/22/2010	10:38:19 PM	H2 valve closed
11/22/2010	10:38:19 PM	BCl3 valve closed
11/22/2010	10:38:19 PM	PH3 valve closed
11/22/2010	10:38:19 PM	SiCl4 pre valve closed
11/22/2010	10:38:19 PM	SiCl4 post valve closed
11/22/2010	10:38:19 PM	Bubbler valve closed
11/22/2010	10:38:19 PM	Helium valve opened
11/22/2010	10:38:19 PM	Main Vac valve opened
11/22/2010	10:38:19 PM	Bypass valve opened
11/22/2010	10:38:19 PM	Helium MFC set to  100.000000
11/22/2010	10:38:19 PM	H2 MFC set to  0.000000
11/22/2010	10:38:19 PM	BCl3 MFC set to  0.000000
11/22/2010	10:38:19 PM	PHl3 MFC set to  0.000000
11/22/2010	10:38:19 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:38:19 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:38:19 PM	Tube furnace set to 0
11/22/2010	10:39:19 PM	Helium valve closed
11/22/2010	10:39:19 PM	H2 valve closed
11/22/2010	10:39:19 PM	BCl3 valve closed
11/22/2010	10:39:19 PM	PH3 valve closed
11/22/2010	10:39:19 PM	SiCl4 pre valve closed
11/22/2010	10:39:19 PM	SiCl4 post valve closed
11/22/2010	10:39:19 PM	Bubbler valve closed
11/22/2010	10:39:19 PM	Main Vac valve opened
11/22/2010	10:39:19 PM	Bypass valve opened
11/22/2010	10:39:19 PM	Helium MFC set to  0.000000
11/22/2010	10:39:19 PM	H2 MFC set to  0.000000
11/22/2010	10:39:19 PM	BCl3 MFC set to  0.000000
11/22/2010	10:39:19 PM	PHl3 MFC set to  0.000000
11/22/2010	10:39:19 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:39:19 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:39:19 PM	Tube furnace set to 0
11/22/2010	10:40:19 PM	H2 valve closed
11/22/2010	10:40:19 PM	BCl3 valve closed
11/22/2010	10:40:19 PM	PH3 valve closed
11/22/2010	10:40:19 PM	SiCl4 pre valve closed
11/22/2010	10:40:19 PM	SiCl4 post valve closed
11/22/2010	10:40:19 PM	Bubbler valve closed
11/22/2010	10:40:19 PM	Helium valve opened
11/22/2010	10:40:19 PM	Main Vac valve opened
11/22/2010	10:40:19 PM	Bypass valve opened
11/22/2010	10:40:19 PM	Helium MFC set to  100.000000
11/22/2010	10:40:20 PM	H2 MFC set to  0.000000
11/22/2010	10:40:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:40:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:40:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:40:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:40:20 PM	Tube furnace set to 0
11/22/2010	10:41:20 PM	Helium valve closed
11/22/2010	10:41:20 PM	H2 valve closed
11/22/2010	10:41:20 PM	BCl3 valve closed
11/22/2010	10:41:20 PM	PH3 valve closed
11/22/2010	10:41:20 PM	SiCl4 pre valve closed
11/22/2010	10:41:20 PM	SiCl4 post valve closed
11/22/2010	10:41:20 PM	Bubbler valve closed
11/22/2010	10:41:20 PM	Main Vac valve opened
11/22/2010	10:41:20 PM	Bypass valve opened
11/22/2010	10:41:20 PM	Helium MFC set to  0.000000
11/22/2010	10:41:20 PM	H2 MFC set to  0.000000
11/22/2010	10:41:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:41:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:41:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:41:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:41:20 PM	Tube furnace set to 0
11/22/2010	10:42:20 PM	H2 valve closed
11/22/2010	10:42:20 PM	BCl3 valve closed
11/22/2010	10:42:20 PM	PH3 valve closed
11/22/2010	10:42:20 PM	SiCl4 pre valve closed
11/22/2010	10:42:20 PM	SiCl4 post valve closed
11/22/2010	10:42:20 PM	Bubbler valve closed
11/22/2010	10:42:20 PM	Helium valve opened
11/22/2010	10:42:20 PM	Main Vac valve opened
11/22/2010	10:42:20 PM	Bypass valve opened
11/22/2010	10:42:20 PM	Helium MFC set to  100.000000
11/22/2010	10:42:20 PM	H2 MFC set to  0.000000
11/22/2010	10:42:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:42:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:42:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:42:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:42:20 PM	Tube furnace set to 0
11/22/2010	10:43:20 PM	Helium valve closed
11/22/2010	10:43:20 PM	H2 valve closed
11/22/2010	10:43:20 PM	BCl3 valve closed
11/22/2010	10:43:20 PM	PH3 valve closed
11/22/2010	10:43:20 PM	SiCl4 pre valve closed
11/22/2010	10:43:20 PM	SiCl4 post valve closed
11/22/2010	10:43:20 PM	Bubbler valve closed
11/22/2010	10:43:20 PM	Main Vac valve opened
11/22/2010	10:43:20 PM	Bypass valve opened
11/22/2010	10:43:20 PM	Helium MFC set to  0.000000
11/22/2010	10:43:20 PM	H2 MFC set to  0.000000
11/22/2010	10:43:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:43:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:43:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:43:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:43:20 PM	Tube furnace set to 0
11/22/2010	10:44:20 PM	H2 valve closed
11/22/2010	10:44:20 PM	BCl3 valve closed
11/22/2010	10:44:20 PM	PH3 valve closed
11/22/2010	10:44:20 PM	SiCl4 pre valve closed
11/22/2010	10:44:20 PM	SiCl4 post valve closed
11/22/2010	10:44:20 PM	Bubbler valve closed
11/22/2010	10:44:20 PM	Helium valve opened
11/22/2010	10:44:20 PM	Main Vac valve opened
11/22/2010	10:44:20 PM	Bypass valve opened
11/22/2010	10:44:20 PM	Helium MFC set to  100.000000
11/22/2010	10:44:20 PM	H2 MFC set to  0.000000
11/22/2010	10:44:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:44:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:44:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:44:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:44:20 PM	Tube furnace set to 0
11/22/2010	10:45:20 PM	Helium valve closed
11/22/2010	10:45:20 PM	H2 valve closed
11/22/2010	10:45:20 PM	BCl3 valve closed
11/22/2010	10:45:20 PM	PH3 valve closed
11/22/2010	10:45:20 PM	SiCl4 pre valve closed
11/22/2010	10:45:20 PM	SiCl4 post valve closed
11/22/2010	10:45:20 PM	Bubbler valve closed
11/22/2010	10:45:20 PM	Main Vac valve opened
11/22/2010	10:45:20 PM	Bypass valve opened
11/22/2010	10:45:20 PM	Helium MFC set to  0.000000
11/22/2010	10:45:20 PM	H2 MFC set to  0.000000
11/22/2010	10:45:20 PM	BCl3 MFC set to  0.000000
11/22/2010	10:45:20 PM	PHl3 MFC set to  0.000000
11/22/2010	10:45:20 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:45:20 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:45:21 PM	Tube furnace set to 0
11/22/2010	10:46:21 PM	H2 valve closed
11/22/2010	10:46:21 PM	BCl3 valve closed
11/22/2010	10:46:21 PM	PH3 valve closed
11/22/2010	10:46:21 PM	SiCl4 pre valve closed
11/22/2010	10:46:21 PM	SiCl4 post valve closed
11/22/2010	10:46:21 PM	Bubbler valve closed
11/22/2010	10:46:21 PM	Helium valve opened
11/22/2010	10:46:21 PM	Main Vac valve opened
11/22/2010	10:46:21 PM	Bypass valve opened
11/22/2010	10:46:21 PM	Helium MFC set to  100.000000
11/22/2010	10:46:21 PM	H2 MFC set to  0.000000
11/22/2010	10:46:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:46:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:46:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:46:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:46:21 PM	Tube furnace set to 0
11/22/2010	10:47:21 PM	Helium valve closed
11/22/2010	10:47:21 PM	H2 valve closed
11/22/2010	10:47:21 PM	BCl3 valve closed
11/22/2010	10:47:21 PM	PH3 valve closed
11/22/2010	10:47:21 PM	SiCl4 pre valve closed
11/22/2010	10:47:21 PM	SiCl4 post valve closed
11/22/2010	10:47:21 PM	Bubbler valve closed
11/22/2010	10:47:21 PM	Main Vac valve opened
11/22/2010	10:47:21 PM	Bypass valve opened
11/22/2010	10:47:21 PM	Helium MFC set to  0.000000
11/22/2010	10:47:21 PM	H2 MFC set to  0.000000
11/22/2010	10:47:21 PM	BCl3 MFC set to  0.000000
11/22/2010	10:47:21 PM	PHl3 MFC set to  0.000000
11/22/2010	10:47:21 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:47:21 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:47:21 PM	Tube furnace set to 0
11/22/2010	10:48:01 PM	Run aborted at 10:48 PM
11/22/2010	10:48:01 PM	Helium valve closed
11/22/2010	10:48:01 PM	H2 valve closed
11/22/2010	10:48:01 PM	BCl3 valve closed
11/22/2010	10:48:01 PM	PH3 valve closed
11/22/2010	10:48:01 PM	SiCl4 pre valve closed
11/22/2010	10:48:01 PM	SiCl4 post valve closed
11/22/2010	10:48:01 PM	Bypass valve closed
11/22/2010	10:48:01 PM	Main Vac valve closed
11/22/2010	10:48:01 PM	Bubbler valve closed
11/22/2010	10:48:01 PM	Helium MFC set to  0.000000
11/22/2010	10:48:01 PM	H2 MFC set to  0.000000
11/22/2010	10:48:01 PM	BCl3 MFC set to  0.000000
11/22/2010	10:48:01 PM	PHl3 MFC set to  0.000000
11/22/2010	10:48:01 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:48:01 PM	Tube furnace set to 0
11/22/2010	10:48:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:48:31 PM	Bypass valve opened
11/22/2010	10:48:32 PM	Main Vac valve opened
11/22/2010	10:50:26 PM	Main Vac valve closed
11/22/2010	10:50:26 PM	Bypass valve closed
11/22/2010	10:50:33 PM	Bypass valve opened
11/22/2010	10:50:33 PM	Main Vac valve opened
11/22/2010	10:50:38 PM	Helium MFC set to  100.000000
11/22/2010	10:50:39 PM	Helium valve opened
11/22/2010	10:50:47 PM	Helium valve closed
11/22/2010	10:51:24 PM	Recipe started at 10:51 PM
11/22/2010	10:51:24 PM	Helium valve closed
11/22/2010	10:51:24 PM	BCl3 valve closed
11/22/2010	10:51:24 PM	PH3 valve closed
11/22/2010	10:51:24 PM	SiCl4 pre valve closed
11/22/2010	10:51:24 PM	SiCl4 post valve closed
11/22/2010	10:51:24 PM	Main Vac valve closed
11/22/2010	10:51:24 PM	Bypass valve closed
11/22/2010	10:51:24 PM	Bubbler valve closed
11/22/2010	10:51:24 PM	H2 valve opened
11/22/2010	10:51:24 PM	Helium MFC set to  0.000000
11/22/2010	10:51:24 PM	H2 MFC set to  500.000000
11/22/2010	10:51:24 PM	BCl3 MFC set to  0.000000
11/22/2010	10:51:24 PM	PHl3 MFC set to  0.000000
11/22/2010	10:51:24 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:51:24 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:51:24 PM	Tube furnace set to 0
11/22/2010	10:53:23 PM	Run aborted at 10:53 PM
11/22/2010	10:53:23 PM	Helium valve closed
11/22/2010	10:53:23 PM	H2 valve closed
11/22/2010	10:53:23 PM	BCl3 valve closed
11/22/2010	10:53:23 PM	PH3 valve closed
11/22/2010	10:53:23 PM	SiCl4 pre valve closed
11/22/2010	10:53:23 PM	SiCl4 post valve closed
11/22/2010	10:53:23 PM	Bypass valve closed
11/22/2010	10:53:23 PM	Main Vac valve closed
11/22/2010	10:53:23 PM	Bubbler valve closed
11/22/2010	10:53:23 PM	Helium MFC set to  0.000000
11/22/2010	10:53:23 PM	H2 MFC set to  0.000000
11/22/2010	10:53:23 PM	BCl3 MFC set to  0.000000
11/22/2010	10:53:23 PM	PHl3 MFC set to  0.000000
11/22/2010	10:53:23 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:53:24 PM	Tube furnace set to 0
11/22/2010	10:53:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:53:41 PM	Recipe started at 10:53 PM
11/22/2010	10:53:41 PM	Helium valve closed
11/22/2010	10:53:41 PM	H2 valve closed
11/22/2010	10:53:42 PM	BCl3 valve closed
11/22/2010	10:53:42 PM	PH3 valve closed
11/22/2010	10:53:42 PM	SiCl4 pre valve closed
11/22/2010	10:53:42 PM	SiCl4 post valve closed
11/22/2010	10:53:42 PM	Main Vac valve closed
11/22/2010	10:53:42 PM	Bubbler valve closed
11/22/2010	10:53:42 PM	Bypass valve opened
11/22/2010	10:53:42 PM	Helium MFC set to  0.000000
11/22/2010	10:53:42 PM	H2 MFC set to  0.000000
11/22/2010	10:53:42 PM	BCl3 MFC set to  0.000000
11/22/2010	10:53:42 PM	PHl3 MFC set to  0.000000
11/22/2010	10:53:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:53:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:53:42 PM	Tube furnace set to 0
11/22/2010	10:53:42 PM	Helium valve closed
11/22/2010	10:53:42 PM	H2 valve closed
11/22/2010	10:53:42 PM	BCl3 valve closed
11/22/2010	10:53:42 PM	PH3 valve closed
11/22/2010	10:53:42 PM	SiCl4 pre valve closed
11/22/2010	10:53:42 PM	SiCl4 post valve closed
11/22/2010	10:53:42 PM	Bubbler valve closed
11/22/2010	10:53:42 PM	Main Vac valve opened
11/22/2010	10:53:42 PM	Bypass valve opened
11/22/2010	10:53:42 PM	Helium MFC set to  0.000000
11/22/2010	10:53:42 PM	H2 MFC set to  0.000000
11/22/2010	10:53:42 PM	BCl3 MFC set to  0.000000
11/22/2010	10:53:42 PM	PHl3 MFC set to  0.000000
11/22/2010	10:53:42 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:53:42 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:53:42 PM	Tube furnace set to 0
11/22/2010	10:54:08 PM	Run aborted at 10:54 PM
11/22/2010	10:54:08 PM	Helium valve closed
11/22/2010	10:54:08 PM	H2 valve closed
11/22/2010	10:54:08 PM	BCl3 valve closed
11/22/2010	10:54:08 PM	PH3 valve closed
11/22/2010	10:54:08 PM	SiCl4 pre valve closed
11/22/2010	10:54:08 PM	SiCl4 post valve closed
11/22/2010	10:54:08 PM	Bypass valve closed
11/22/2010	10:54:08 PM	Main Vac valve closed
11/22/2010	10:54:08 PM	Bubbler valve closed
11/22/2010	10:54:08 PM	Helium MFC set to  0.000000
11/22/2010	10:54:08 PM	H2 MFC set to  0.000000
11/22/2010	10:54:08 PM	BCl3 MFC set to  0.000000
11/22/2010	10:54:08 PM	PHl3 MFC set to  0.000000
11/22/2010	10:54:08 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:54:08 PM	Tube furnace set to 0
11/22/2010	10:54:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/22/2010	10:54:17 PM	Recipe started at 10:54 PM
11/22/2010	10:54:17 PM	Helium valve closed
11/22/2010	10:54:17 PM	BCl3 valve closed
11/22/2010	10:54:17 PM	PH3 valve closed
11/22/2010	10:54:17 PM	SiCl4 pre valve closed
11/22/2010	10:54:17 PM	SiCl4 post valve closed
11/22/2010	10:54:17 PM	Main Vac valve closed
11/22/2010	10:54:17 PM	Bypass valve closed
11/22/2010	10:54:17 PM	Bubbler valve closed
11/22/2010	10:54:17 PM	H2 valve opened
11/22/2010	10:54:17 PM	Helium MFC set to  0.000000
11/22/2010	10:54:17 PM	H2 MFC set to  500.000000
11/22/2010	10:54:17 PM	BCl3 MFC set to  0.000000
11/22/2010	10:54:17 PM	PHl3 MFC set to  0.000000
11/22/2010	10:54:17 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:54:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:54:17 PM	Tube furnace set to 0
11/22/2010	10:54:53 PM	Run aborted at 10:54 PM
11/22/2010	10:54:53 PM	Helium valve closed
11/22/2010	10:54:53 PM	H2 valve closed
11/22/2010	10:54:53 PM	BCl3 valve closed
11/22/2010	10:54:53 PM	PH3 valve closed
11/22/2010	10:54:53 PM	SiCl4 pre valve closed
11/22/2010	10:54:53 PM	SiCl4 post valve closed
11/22/2010	10:54:53 PM	Bypass valve closed
11/22/2010	10:54:53 PM	Main Vac valve closed
11/22/2010	10:54:53 PM	Bubbler valve closed
11/22/2010	10:54:53 PM	Helium MFC set to  0.000000
11/22/2010	10:54:53 PM	H2 MFC set to  0.000000
11/22/2010	10:54:53 PM	BCl3 MFC set to  0.000000
11/22/2010	10:54:53 PM	PHl3 MFC set to  0.000000
11/22/2010	10:54:53 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:54:53 PM	Tube furnace set to 0
11/22/2010	10:59:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	10:59:51 PM	Recipe started at 10:59 PM
11/22/2010	10:59:51 PM	Helium valve closed
11/22/2010	10:59:51 PM	H2 valve closed
11/22/2010	10:59:51 PM	BCl3 valve closed
11/22/2010	10:59:51 PM	PH3 valve closed
11/22/2010	10:59:51 PM	SiCl4 pre valve closed
11/22/2010	10:59:51 PM	SiCl4 post valve closed
11/22/2010	10:59:51 PM	Main Vac valve closed
11/22/2010	10:59:51 PM	Bubbler valve closed
11/22/2010	10:59:51 PM	Bypass valve opened
11/22/2010	10:59:51 PM	Helium MFC set to  0.000000
11/22/2010	10:59:51 PM	H2 MFC set to  0.000000
11/22/2010	10:59:51 PM	BCl3 MFC set to  0.000000
11/22/2010	10:59:51 PM	PHl3 MFC set to  0.000000
11/22/2010	10:59:51 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:59:51 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:59:51 PM	Tube furnace set to 0
11/22/2010	10:59:52 PM	Helium valve closed
11/22/2010	10:59:52 PM	H2 valve closed
11/22/2010	10:59:52 PM	BCl3 valve closed
11/22/2010	10:59:52 PM	PH3 valve closed
11/22/2010	10:59:52 PM	SiCl4 pre valve closed
11/22/2010	10:59:52 PM	SiCl4 post valve closed
11/22/2010	10:59:52 PM	Bubbler valve closed
11/22/2010	10:59:52 PM	Main Vac valve opened
11/22/2010	10:59:52 PM	Bypass valve opened
11/22/2010	10:59:52 PM	Helium MFC set to  0.000000
11/22/2010	10:59:52 PM	H2 MFC set to  0.000000
11/22/2010	10:59:52 PM	BCl3 MFC set to  0.000000
11/22/2010	10:59:52 PM	PHl3 MFC set to  0.000000
11/22/2010	10:59:52 PM	SiCl4 MFC set to  0.000000
11/22/2010	10:59:52 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	10:59:52 PM	Tube furnace set to 0
11/22/2010	10:59:52 PM	Run finished at 10:59 PM
11/22/2010	10:59:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/22/2010	11:01:13 PM	Helium MFC set to  100.000000
11/22/2010	11:01:14 PM	Helium valve opened
11/22/2010	11:01:58 PM	Helium valve closed
11/22/2010	11:02:49 PM	Bypass valve closed
11/22/2010	11:02:49 PM	Main Vac valve closed
11/22/2010	11:03:01 PM	Recipe started at 11:02 PM
11/22/2010	11:03:01 PM	Helium valve closed
11/22/2010	11:03:01 PM	BCl3 valve closed
11/22/2010	11:03:01 PM	PH3 valve closed
11/22/2010	11:03:01 PM	SiCl4 pre valve closed
11/22/2010	11:03:01 PM	SiCl4 post valve closed
11/22/2010	11:03:01 PM	Main Vac valve closed
11/22/2010	11:03:01 PM	Bypass valve closed
11/22/2010	11:03:01 PM	Bubbler valve closed
11/22/2010	11:03:01 PM	H2 valve opened
11/22/2010	11:03:01 PM	Helium MFC set to  0.000000
11/22/2010	11:03:01 PM	H2 MFC set to  500.000000
11/22/2010	11:03:01 PM	BCl3 MFC set to  0.000000
11/22/2010	11:03:01 PM	PHl3 MFC set to  0.000000
11/22/2010	11:03:01 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:03:01 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:03:02 PM	Tube furnace set to 0
11/22/2010	11:04:17 PM	Helium valve closed
11/22/2010	11:04:17 PM	BCl3 valve closed
11/22/2010	11:04:17 PM	PH3 valve closed
11/22/2010	11:04:17 PM	SiCl4 pre valve closed
11/22/2010	11:04:17 PM	SiCl4 post valve closed
11/22/2010	11:04:17 PM	Main Vac valve closed
11/22/2010	11:04:17 PM	Bypass valve closed
11/22/2010	11:04:17 PM	H2 valve opened
11/22/2010	11:04:17 PM	Bubbler valve opened
11/22/2010	11:04:17 PM	Helium MFC set to  0.000000
11/22/2010	11:04:17 PM	H2 MFC set to  500.000000
11/22/2010	11:04:17 PM	BCl3 MFC set to  0.000000
11/22/2010	11:04:17 PM	PHl3 MFC set to  0.000000
11/22/2010	11:04:17 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:04:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:04:17 PM	Tube furnace set to 1000
11/22/2010	11:24:17 PM	Helium valve closed
11/22/2010	11:24:17 PM	PH3 valve closed
11/22/2010	11:24:17 PM	Main Vac valve closed
11/22/2010	11:24:17 PM	Bypass valve closed
11/22/2010	11:24:17 PM	H2 valve opened
11/22/2010	11:24:17 PM	BCl3 valve opened
11/22/2010	11:24:17 PM	SiCl4 pre valve opened
11/22/2010	11:24:17 PM	SiCl4 post valve opened
11/22/2010	11:24:17 PM	Bubbler valve opened
11/22/2010	11:24:17 PM	Helium MFC set to  0.000000
11/22/2010	11:24:17 PM	H2 MFC set to  500.000000
11/22/2010	11:24:17 PM	BCl3 MFC set to  12.000000
11/22/2010	11:24:17 PM	PHl3 MFC set to  0.000000
11/22/2010	11:24:17 PM	SiCl4 MFC set to  50.000000
11/22/2010	11:24:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:24:17 PM	Tube furnace set to 1000
11/22/2010	11:39:17 PM	H2 valve closed
11/22/2010	11:39:17 PM	BCl3 valve closed
11/22/2010	11:39:17 PM	PH3 valve closed
11/22/2010	11:39:17 PM	SiCl4 pre valve closed
11/22/2010	11:39:17 PM	SiCl4 post valve closed
11/22/2010	11:39:17 PM	Main Vac valve closed
11/22/2010	11:39:17 PM	Bypass valve closed
11/22/2010	11:39:17 PM	Helium valve opened
11/22/2010	11:39:17 PM	Bubbler valve opened
11/22/2010	11:39:17 PM	Helium MFC set to  500.000000
11/22/2010	11:39:17 PM	H2 MFC set to  0.000000
11/22/2010	11:39:17 PM	BCl3 MFC set to  0.000000
11/22/2010	11:39:17 PM	PHl3 MFC set to  0.000000
11/22/2010	11:39:17 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:39:17 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:39:18 PM	Tube furnace set to 950
11/22/2010	11:44:18 PM	H2 valve closed
11/22/2010	11:44:18 PM	BCl3 valve closed
11/22/2010	11:44:18 PM	PH3 valve closed
11/22/2010	11:44:18 PM	SiCl4 pre valve closed
11/22/2010	11:44:18 PM	SiCl4 post valve closed
11/22/2010	11:44:18 PM	Main Vac valve closed
11/22/2010	11:44:18 PM	Bypass valve closed
11/22/2010	11:44:18 PM	Helium valve opened
11/22/2010	11:44:18 PM	Bubbler valve opened
11/22/2010	11:44:18 PM	Helium MFC set to  500.000000
11/22/2010	11:44:18 PM	H2 MFC set to  0.000000
11/22/2010	11:44:18 PM	BCl3 MFC set to  0.000000
11/22/2010	11:44:18 PM	PHl3 MFC set to  0.000000
11/22/2010	11:44:18 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:44:18 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:44:18 PM	Tube furnace set to 900
11/22/2010	11:49:18 PM	H2 valve closed
11/22/2010	11:49:18 PM	BCl3 valve closed
11/22/2010	11:49:18 PM	PH3 valve closed
11/22/2010	11:49:18 PM	SiCl4 pre valve closed
11/22/2010	11:49:18 PM	SiCl4 post valve closed
11/22/2010	11:49:18 PM	Main Vac valve closed
11/22/2010	11:49:18 PM	Bypass valve closed
11/22/2010	11:49:18 PM	Helium valve opened
11/22/2010	11:49:18 PM	Bubbler valve opened
11/22/2010	11:49:18 PM	Helium MFC set to  500.000000
11/22/2010	11:49:18 PM	H2 MFC set to  0.000000
11/22/2010	11:49:18 PM	BCl3 MFC set to  0.000000
11/22/2010	11:49:18 PM	PHl3 MFC set to  0.000000
11/22/2010	11:49:18 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:49:18 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:49:18 PM	Tube furnace set to 850
11/22/2010	11:54:18 PM	H2 valve closed
11/22/2010	11:54:18 PM	BCl3 valve closed
11/22/2010	11:54:18 PM	PH3 valve closed
11/22/2010	11:54:18 PM	SiCl4 pre valve closed
11/22/2010	11:54:18 PM	SiCl4 post valve closed
11/22/2010	11:54:18 PM	Main Vac valve closed
11/22/2010	11:54:18 PM	Bypass valve closed
11/22/2010	11:54:18 PM	Helium valve opened
11/22/2010	11:54:18 PM	Bubbler valve opened
11/22/2010	11:54:18 PM	Helium MFC set to  500.000000
11/22/2010	11:54:18 PM	H2 MFC set to  0.000000
11/22/2010	11:54:18 PM	BCl3 MFC set to  0.000000
11/22/2010	11:54:18 PM	PHl3 MFC set to  0.000000
11/22/2010	11:54:18 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:54:18 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:54:18 PM	Tube furnace set to 800
11/22/2010	11:59:18 PM	H2 valve closed
11/22/2010	11:59:18 PM	BCl3 valve closed
11/22/2010	11:59:18 PM	PH3 valve closed
11/22/2010	11:59:18 PM	SiCl4 pre valve closed
11/22/2010	11:59:18 PM	SiCl4 post valve closed
11/22/2010	11:59:18 PM	Main Vac valve closed
11/22/2010	11:59:18 PM	Bypass valve closed
11/22/2010	11:59:18 PM	Helium valve opened
11/22/2010	11:59:18 PM	Bubbler valve opened
11/22/2010	11:59:18 PM	Helium MFC set to  500.000000
11/22/2010	11:59:18 PM	H2 MFC set to  0.000000
11/22/2010	11:59:18 PM	BCl3 MFC set to  0.000000
11/22/2010	11:59:18 PM	PHl3 MFC set to  0.000000
11/22/2010	11:59:18 PM	SiCl4 MFC set to  0.000000
11/22/2010	11:59:18 PM	Bypass solenoid MFC set to  0.000000
11/22/2010	11:59:18 PM	Tube furnace set to 750
